MICROSYSTEMS ENGINEERING

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Parsian Katal Mohseni

Associate Professor
Microsystems Engineering
Kate Gleason College of Engineering

2015 Submissions

Journal Paper

Liu, Runyu, et al. "Enhanced Optical Transmission through MacEtch-Fabricated Buried Metal Gratings." Advanced Materials. (2015): Not listed at time of submission. Web. *

Invited Keynote/Presentation

Mohseni, Parsian K. "Solar Cells and Light Emitting Diodes via Wafer-Scale Monolithic Integration of III-V Semiconductor Nanowire Arrays on Si and Graphene." 39th IEEE EDS Activities in Western New York Conference. IEEE. Rochester, NY. 6 Nov. 2015. Conference Presentation.

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Zhaolin Lu

Associate Professor
Microsystems Engineering
Kate Gleason College of Engineering

2015 Submissions

Journal Paper

Shi, Kaifeng and Zhaolin Lu. "Optical modulators and beam steering based on electrically tunable plasmonic material." Journal of Nanophotonics 9. 1 (2015): 93793. Print. *

Shi, Kaifeng, et al. "Graphene-sandwiched silicon structures for greatly enhanced unpolarized light absorption." Optics Communications 339. (2015): 47-52. Print. *

Lu, Zhaolin, Kaifeng Shi, and Peichuan Yin. "Photonic MOS Based on Optical Property Inversion." MRS Advances 2015. 5 (2015): 1-13. Web. *

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Stefan Preble

Professor
Microsystems Engineering
Kate Gleason College of Engineering

2015 Submissions

Journal Paper

Hach, E. E., et al. "Scalable Hong-Ou-Mandel manifolds in quantum optical ring resonators." Physical Review A 89. (2014): 43805. Print. *

Cao, L., et al. "Hybrid Amorphous Silicon (a-Si:H)-LiNbO3 Electro-Optic Modulator." Optics Communications 330. (2014): 40. Web. * £

Preble, S. F., et al. "On-chip quantum interference from a single silicon ring-resonator source." Physical Review Applied 4. (2015): 21001. Web. * £

Wang, Z., et al. "High Performance InAs Quantum Dot Lasers on Silicon Substrates by Low Temperature Pd-GaAs Wafer Bonding." Applied Physics Letters 107. (2015): 261107. Print. * £

Published Conference Proceedings

Wang, Z., C-S. Lee, and W. Guo. "Room temperature CW operation of 1.3um quantum dot lasers on a Si substrate by Pd-mediated wafer bonding." Proceedings of the Advanced Photonics Conference. Ed. -. Boston, MA: n.p., Web. *

Steidle, J.A., et al. "High spectral purity silicon ring resonator photon-pair source." Proceedings of the SPIE DSS 2015. Ed. -. Baltimore, MD: n.p., 2015. Print. *

Fanto, M. L., et al. "A bright PPKTP waveguide source of polarization entangled photons." Proceedings of the SPIE DSS 2015. Ed. -. Baltimore, MD: n.p., 2015. Print. *

Hach, E. E., S. F. Preble, and J. A. Steidle. "heoretical analysis of on-chip linear quantum optical information processing networks." Proceedings of the SPIE DSS 2015. Ed. -. Baltimore, MD: n.p., 2015. Print. *

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Bruce Smith

Professor
Microsystems Engineering
Kate Gleason College of Engineering

2015 Submissions

Journal Paper

Smith, Sudharshanan Raghunathan, Obert R Wood II, Pawitter Mangat, Erik Verduijn, Vicky Philipsen, Eric Hendrickx, Rik Jonckheere, Kenneth A Goldberg, Markus P Benk, Patrick Kearney, Zachary Levinson, Bruce W. "Experimental measurements of telecentricity errors in high-numerical-aperture extreme ultraviolet mask images." Journal of Vacuum Science & Technology B 32. 6 (2015): 06f801. Print. *

Book Chapter

Smith, Bruce. "Optical projection lithography." Nanolithography: the art of fabricating nanoelectronic and nanophotonic devices and systems. London, UK: Woodhead Publishing, 2014. 1-42. Print. £

Published Conference Proceedings

Smith, Zac Levinson, Andrew Burbine, Erik Verduijn, Obert Wood, Pawitter Mangat, Kenneth Goldberg, Markus Benk, Antoine Wojdyla, Bruce. "Image-based pupil plane characterization via principal component analysis for EUVL tools." Proceedings of the SPIE Advanced Lithography. Ed. NA. San Jose, CA: SPIE, 2016. Print. £

Smith, Riaz R Haque, Zac Levinson, Bruce W. "3D mask effects of absorber geometry in EUV lithography systems." Proceedings of the SPIE Advanced Lithography. Ed. NA. San Jose, CA: n.p., 2016. Print. £

Smith, Zac Levinson, Jack S Smith, Germain Fenger, Bruce W. "An automated image-based tool for pupil plane characterization of EUVL tools." Proceedings of the SPIE Advanced Lithography. Ed. NA. San Jose, CA: n.p., 2016. Print. £

Smith, Andrew Burbine, John Sturtevant, David Fryer, Bruce W. "Bayesian inference for OPC modeling." Proceedings of the SPIE Advanced Lithography. Ed. NA. San Jose, CA: n.p., 2016. Print. £

Smith, Zac Levinson, Sudharshanan Raghunathan, Erik Verduijn, Obert Wood, Pawitter Mangat, Kenneth Goldberg, Markus Benk, Antoine Wojdyla, Vicky Philipsen, Eric Hendrickx, Bruce W. "A method of image-based aberration metrology for EUVL tools." Proceedings of the SPIE Advanced Lithography. Ed. NA. San Jose, CA: n.p., 2015. Print. £

Smith, Andrew Burbine, Zac Levinson, Anthony Schepis, Bruce W. "Study of angular effects for optical systems into the EUV." Proceedings of the SPIE Advanced Lithography. Ed. NA. San Jose, CA: n.p., 2014. Print. £

Smith, Zac Levinson, Germain Fenger, Andrew Burbine, Anthony R Schepis, Bruce W. "Optimization of image-based aberration metrology for EUV lithography." Proceedings of the SPIE Advanced Lithography. Ed. NA. San Jose, CA: n.p., 2014. Print. £

Smith, Chris Maloney, James Word, Germain L Fenger, Ardavan Niroomand, Gian F Lorusso, Rik Jonckheere, Eric Hendrickx, Bruce W. "Feasibility of compensating for EUV field edge effects through OPC." Proceedings of the SPIE Advanced Lithography. Ed. NA. San Jose, CA: n.p., 2014. Print. £

Smith, Burak Baylav, Chris Maloney, Zac Levinson, Joost Bekaert, A Vaglio Pret, Bruce. "Mitigating mask roughness via pupil filtering." Proceedings of the SPIE Advanced Lithography. Ed. NA. San Jose, CA: n.p., 2014. Print. £

Smith, Bruce W. "The saga of sigma: influences of illumination throughout optical generations." Proceedings of the SPIE Advanced Lithography. Ed. NA. San Jose, CA: n.p., 2014. Print. £

Smith, Anthony R Schepis, Zac Levinson, Andrew Burbine, Bruce W. "Alternative method for variable aspect ratio vias using a vortex mask." Proceedings of the SPIE Advanced Lithography. Ed. NA. San Jose, CA: n.p., 2014. Print. £

Journal Editor

Smith, Bruce, ed. SPIE Advanced Lithography. Bellingham, WA: SPIE, 2015. Print. £

Smith, Bruce, ed. SPIE Advanced Lithography. Bellingham, WA: SPIE, 2016. Print. £

Full Patent

Smith, Bruce. "Method of photolithography using a fluid and a system thereof." U.S. Patent 8852850. 7 Oct. 2014.

Invited Keynote/Presentation

Smith, Bruce. "The influences of illumination throughout optical lithography generations." IMEC Technical Conference. IMEC. Leuven, Belgium. 8 Aug. 2015. Conference Presentation. ∆

Invited Article/Publication

Smith, Andreas Erdmann, Rongguang Liang, Apo Sezginer, Bruce. "Advances in Lithography: Special Feature." Applied Optics. (2015). Print. *

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