Graduate Study
Microelectronics Manufacturing Engineering
Program Overview
A ME or a MS degree is offered in the area of microelectronics manufacturing. The ME in microelectronics manufacturing engineering is a full-time, one-year intensive classroom- and laboratory-oriented program culminating with an internship. The MS in microelectronics manufacturing engineering is a full-time, two-year research-oriented program, which includes a master's thesis. Both programs are intended to prepare students for a career in the semiconductor industry and provide a broad interdisciplinary background in optics, chemistry, device physics, computer science, electrical engineering, photographic science, and statistics.
The master of engineering in microelectronics manufacturing engineering program offered by the department of microelectronic engineering at Rochester Institute of Technology provides a broad based education to students with a bachelor's degree in traditional engineering or science disciplines interested in a career in the semiconductor industry.
The master of engineering degree is awarded upon successful completion of an approved graduate program consisting of a minimum of 45 credit hours. The program consists of one transition course, seven core courses, two elective courses, and a minimum of 5 credits of internship (professional work experience in the semiconductor industry). Under certain circumstances, a student may be required to complete more than the minimum number of credits. For example, a chemistry major may be required to take a two-course sequence in circuits and electronics. The core courses are Microelectronics (processing) I, II, and III; Microelectronics (manufacturing) I and II; and Microlithography Materials and Processes; and Microlithography Systems. The two elective courses are graduate-level courses in microelectronics or a related field. Elective courses may be selected from a list that includes courses such as Defect Reduction and Yield Enhancement, Semiconductor Process and Device Modeling, and Nanoscale CMOS.
A maximum of nine quarter credit hours can be earned from other universities subject to the prior approval of the graduate adviser, which include credits of internship, granted on the basis of industrial experience for students working in the semiconductor industry substantiated by the supervisors endorsement or a technical presentation.
Curriculum Review
Microelectronics (Processing)The Microelectronics I, II, and III sequence covers all aspects of integrated circuit manufacturing technology such as introduction to CAD, oxidation, diffusion, ion implantation, chemical vapor deposition, metallization, plasma etching, etc. These courses emphasize modeling and simulation techniques as well as hands-on laboratory verification of these processes.
Microelectronics (Manufacturing)
The manufacturing courses include topics such as modern
CMOS process technology, scheduling, work-in-progress
tracking, costing, inventory control, capital budgeting,
productivity measures, and personnel management.
Microlithography
The microlithography courses are advanced courses in the
chemistry, physics, and processing of microlithographic
materials and systems. Image formation in optical projection,
optical proximity, and high-energy systems (DUV/VUV.
E beam/SCALPEL, X-ray, and EUV) are studied. Practical implementation of advanced technologies, materials, and
processes are studied and future requirements are presented.
Transition course
An online transition course, Principles of Semiconductor
Devices, is available for students from a non-electrical
engineering background. The course is taught from the
unique perspective of microelectronic engineering with
a focus on device layout for fabrication.
Electives
The choice of electives provides students with an opportunity
to focus on their area of interest. The recommended elective
courses available online are:
Semiconductor Process and Device Modeling, 0305-704
Nanoscale CMOS, 0305-707
Statistical Process Control, 0307-721
Metrology and Failure Analysis, 0305-830
Other courses may be chosen with prior approval of the program adviser. No more than nine credits taken outside RIT can be considered for transfer of credits.
Internship
The program requires a five-credit internship (0305-777),
which is equivalent to at least three months of full-time
successful employment in the semiconductor industry.
Distance Learning Courses offered by the Department of Microelectronic Engineering
Fall 0305-701 Microelectronics I
Winter 0305-702 Microelectronics II
Summer 0305-703 Microelectronics III
Winter 0305-704 Semiconductor Process and Device Modeling
Winter 0305-707 Nanoscale CMOS
Fall 0305-721 Microlithography Materials and Processes
Spring 0305-722 Microlithography Systems
Winter 0305-731 Microelectronics Manufacturing I
Spring 0305-732 Microelectronics Manufacturing II
Spring 0305-760 Principles of Semiconductor Devicees
Fall 0305-830 Metrology and Failure Analysis
The program may be started in any quarter.
Career Outcomes
Job TitlesApplications engineer, device engineer, process development engineer, process engineer, product engineer
Functions
Integrated circuit (IC) processing and design
Recent Employers
Advanced Micro Devices, ATMEL, IBM, Intel Corporation, Micron Technology, Motorola, Triquint
Admission Requirements
Applicants must hold a baccalaureate degree in electrical, chemical engineering or the equivalent, from an accredited college or university in good academic standing and at least one year of study and/or experience in semiconductor device physics, VLSI design, and semiconductor fabrication technology. An undergraduate grade point average of 3.0 or better on a 4.0 scale or supervisor recommendations are required. Graduate Record Exam (GRE) scores are not mandatory but may support the candidacy.