Robert Pearson, Ph.D.
This program may be completed online. Visit RIT Online for additional information.
Please contact the admissions counselor below for additional information about applying to the online program.
|Program Available Online?||Yes|
|Admit Term||Full-time = fall; Part-time = Fall/Spring|
|English Language Exams:|
Priority deadline - COMPLETE applications that are received by this date are given priority consideration for admission and financial aid (if applicable). Applications received after the priority deadline will be considered on a space-available basis.
Rolling - There is no specific deadline for applications; applications will be accepted and reviewed throughout the year until the program reaches capacity.
The master of engineering in microelectronics manufacturing engineering provides a broad-based education for students who are interested in a career in the semiconductor industry and hold a bachelor’s degree in traditional engineering or other science disciplines.
After completing the program, students will be able to:
This 30 credit hour program is awarded upon the successful completion of six core courses, two elective courses, two research methods seminars, and an internship, or six core courses, three elective courses, and three research methods seminars. Under certain circumstances, a student may be required to complete bridge courses totaling more than the minimum number of credits. Students complete courses in microelectronics, microlithography, and manufacturing.
The microelectronics courses cover major aspects of integrated circuit manufacturing technology, such as oxidation, diffusion, ion implantation, chemical vapor deposition, metalization, plasma etching, etc. These courses emphasize modeling and simulation techniques as well as hands-on laboratory verification of these processes. Students use special software tools for these processes. In the laboratory, students design and fabricate silicon MOS integrated circuits, learn how to utilize semiconductor processing equipment, develop and create a process, and manufacture and test their own integrated circuits.
The microlithography courses are advanced courses in the chemistry, physics, and processing involved in microlithography. Optical lithography is studied through diffraction, Fourier, and image-assessment techniques. Scalar diffraction models are utilized to simulate aerial image formation and influences of imaging parameters. Positive and negative resist systems as well as processes for IC application are studied. Advanced topics include chemically amplified resists; multiple-layer resist systems; phase-shift masks; and electron beam, X-ray, and deep UV lithography. Laboratory exercises include projection-system design, resist-materials characterization, process optimization, and electron-beam lithography.
The manufacturing courses include topics such as scheduling, work-in-progress tracking, costing, inventory control, capital budgeting, productivity measures, and personnel management. Concepts of quality and statistical process control are introduced. The laboratory for this course is a student-run factory functioning within the department. Important issues such as measurement of yield, defect density, wafer mapping, control charts, and other manufacturing measurement tools are examined in lectures and through laboratory work. Computer-integrated manufacturing also is studied in detail. Process modeling, simulation, direct control, computer networking, database systems, linking application programs, facility monitoring, expert systems applications for diagnosis and training, and robotics are supported by laboratory experiences in the integrated circuit factory. The program is also offered online for engineers employed in the semiconductor industry.
The program requires students to complete an internship. This option involves a structured and supervised work experience that enables students to gain job-related skills that assist them in achieving their desired career goals.
An internship may be taken any time after the completion of the first semester, and may be designed in a number of ways. At the conclusion of the internship, submission of a final internship report to the faculty adviser and program director is required.
|Course||Sem. Cr. Hrs.|
|MCEE-605||Lithography Materials and Processes||3|
|MCEE-795||Microelectronics Research Methods||1|
|MCEE-602||VLS Process Modeling||3|
|MCEE-795||Microelectronics Research Methods||1|
|MCEE-777||Microelectronic Engineering Internship||4|
|Total Semester Credit Hours||30|
To be considered for admission to the ME program in microelectronic manufacturing engineering, candidates must fulfill the following requirements:
The RIT Office of Career Services and Cooperative Education website provides information pertaining to student skills and capabilities, salary data, career information, job outcomes, and contact information for the Career Services Coordinator by program.