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Areas of Study

Microsystems Engineering

Bruce Smith
Director, Professor

The multidisciplinary doctorate degree in microsystems engineering builds on the fundamentals of traditional engineering and science combined with curriculum and research activities addressing the numerous technical challenges of micro- and nano-systems. These include the manipulation of electrical, photonic, optical, mechanical, chemical, and biological functionality to process, sense, and interface with the world at a nanometer scale. The program provides a foundation to explore future technology through research in nano-engineering, design methods, and technologies and their integration into micro- and nano-scaled systems. Some of the program’s areas of exploration include:

  • Next-generation nanoelectronics including:
    • development of new techniques, processes and architectures for nanoelectronic and nano-optoelectronic devices
    • exploration into new materials research including germanium, III-V materials, carbon annotubes, and spintronics
  • Photovoltaic research in silicon, compound semiconductor, and organic solar cells
  • Photonics and nanophotonics imaging, communications, and sensing research including couplers, micro-lasers, microdetectors, integrated silicon waveguides, silicon spectrometers, and biosensors
  • MEMS (micro-electro-mechanical systems). MEOMS (micro-electro-optical-mechanical systems), and NEMS (nano-electro-mechanical systems) device, processing, and materials research for smart sensors, actuators, biochips, and micro-implantable appliances
  • Scaled micro- and nano- electronics for integration into biomedical systems
  • New and improved technologies in organic electronic components and devices
  • Anaomaterials research including carbon nanotubes, nanoparticles, quantum dots, self-assembly materials and their applications in electronics, optics, and materials science
  • Microfluidics research on the behavior, control, and manipulation of fluids at the micro-scale
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