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ME Program in Microelectronic Manufacturing Engineering
The master of engineering in microelectronics manufacturing engineering program offered by the department of microelectronic engineering at Rochester Institute of Technology provides a broad based education to students with a bachelor's degree in traditional engineering or science disciplines interested in a career in the semiconductor industry.
The master of engineering degree is awarded upon successful completion of an approved graduate program consisting of a minimum of 45 credit hours. The program consists of one transition course, seven core courses, two elective courses (for a total of ten four credit quarter based courses) and a minimum of 5 credits of internship. Under certain circumstances, a student may be required to complete more than the minimum number of credits. The transition course is in an area other than that in which the BS degree was earned. For example, a chemistry major may be required to take a two-course sequence in circuits and electronics. The core courses are microelectronics (processing) I, II, and III; microelectronics (manufacturing) I, II, and microlithography materials and processes and microlithography systems. The two elective courses are graduate-level courses in microelectronic related field. Elective courses may be selected from a list that includes courses such as defect reduction and yield enhancement, semiconductor process and device modeling. This list is periodically updated and is available upon request. The program requires an internship, which is at least three months of full time employment in the semiconductor industry or at RIT. It will involve an investigation or a study of a problem or process directly related to microelectronics manufacturing engineering. This is not a thesis but usually requires a report and an oral presentation at the end of the project. The following documents are available pertaining to the internship:
The Microelectronics I, II, III sequence covers major aspects of integrated circuit manufacturing technology such as oxidation, diffusion, ion implantation, chemical vapor deposition, metallization, plasma etching, etc. These courses emphasize modeling and simulation techniques as well as hands-on laboratory verification of these processes. Students use special software tools for these processes.
In the laboratory students design and fabricate silicon MOS and Bipolar integrated circuits. They learn how to utilize most of the semiconductor processing equipment and how to develop and create a process, manufacture and test their own integrated circuits.
The microlithography courses are advanced courses in the chemistry, physics and processing involved in microlithography. Optical lithography will be studied through diffraction, Fourier and image assessment techniques. Scalar diffraction models will be utilized to simulate aerial image formation and influences of imaging parameters. Positive and negative resist systems, as well as processes for IC application, will be studied. Advanced topics will include chemically amplified resists; multiple layer resist systems; phase shift masks, and electron beam, x-ray and deep UV lithography.
Laboratory exercises include projection system design, resist materials characterization, process optimization, electron beam lithography and excimer laser lithography.
The manufacturing courses include topics such as scheduling, work-in-progress tracking, costing, inventory control, capital budgeting, productivity measures and personnel management. Concepts of quality and statistical process control are introduced to the students. The laboratory for this course is the student-run factory functioning in the department. Important issues that include measurement of yield, defect density, wafer mapping, control charts and other manufacturing measurement tools are introduced to the students in the lecture and laboratory. Computer integrated manufacturing is also studied in detail. Process modeling, simulation, direct control, computer networking, database systems, linking application programs, facility monitoring, expert systems applications for diagnosis and training and robotics are all introduced and supported by laboratory experiences in the integrated circuit factory at RIT. An online (distance delivery) version of this program exists for engineers employed in the semiconductor industry. Please refer to the RIT Part-time/Online Guide for details.