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A Valuable Resource for a Career in the Semiconductor Industry

Master of Engineering

Microelectronics Manufacturing Engineering online learning

The worldwide semiconductor industry is expected to double, growing from $150 billion to $300 billion over the next five years. The technology is advancing at an astounding pace that requires a specially educated workforce and opportunities for further learning while on the job. Kate Gleason College is proud to offer the master of engineering in microelectronics manufacturing engineering through online learning. The program is intended to prepare engineers for a productive career in the semiconductor industry.

The integrated circuit technology makes use of many diverse fields of science and engineering. The optical lithography tools, which print microscopic patterns on wafers, represent one of the most advanced applications of the principles of Fourier optics. Plasma etching involves some of the most complex chemistries used in manufacturing today. Ion implantation draws upon understanding from research in high-energy physics and ion solid interactions. Thin films on semiconductor surfaces exhibit complex mechanical and electrical behavior that stretches our understanding of basic materials properties. Computing skills are necessary to design, model, simulate and predict processes and device behavior, extremely vital to manufacturing. Statistics is required to manipulate data and process control. Manufacturing concepts are extremely important in maintaining high yields and cost effectiveness. One of the great challenges in integrated circuit manufacturing is the need to draw on scientific principles and engineering developments from such an extraordinary wide range of disciplines not adequately provided by traditional engineering or science programs. Scientists and engineers, who work in this field, need broad understanding and the ability to seek out, integrate and use ideas from many fields. This program is tailored to meet the demands of the semiconductor industry for a suitably educated workforce.

Program Overview

The master of engineering in microelectronics manufacturing engineering program offered by the department of microelectronic engineering at Rochester Institute of Technology provides a broad based education to students with a bachelor's degree in traditional engineering or science disciplines working for the semiconductor industry.

The master of engineering degree is awarded upon successful completion of an approved graduate program consisting of a minimum of 45 credit hours. The program consists of one transition course, seven core courses, two elective courses and a minimum of 5 credits of internship (professional work experience in the semiconductor industry). Under certain circumstances, a student may be required to complete more than the minimum number of credits. The transition course is in an area other than that in which the BS degree was earned. For example, a chemistry major may be required to take a two-course sequence in circuits and electronics. The core courses are microelectronics (processing) I, II, and III, microelectronics (manufacturing) I, II, and microlithography materials and processes and microlithography systems. The two elective courses are graduate-level courses in microelectronics or a related field. Elective courses may be selected from a list that includes courses such as defect reduction and yield enhancement, semiconductor process and device modeling, and nanoscale CMOS.

A maximum of nine quarter credit hours can be earned from other universities subject to the prior approval of the graduate adviser, which include credits of internship, granted on the basis of industrial experience for students working in the semiconductor industry substantiated by the supervisor's endorsement or a technical presentation.

Admission requirements

Applicants must hold a baccalaureate degree in electrical, chemical engineering or the equivalent, from an accredited college or university in good academic standing and at least one year of study and / or experience in semiconductor device physics, VLSI design, and semiconductor fabrication technology. An undergraduate grade point average of 3.0 or better on a 4.0 scale or supervisor recommendations are required. Graduate Record Exam (GRE) scores are not mandatory but may support the candidacy.


Microelectronics (Processing)

The microelectronics I, II, III sequence covers all aspects of integrated circuit manufacturing technology such as introduction to CAD, oxidation, diffusion, ion implantation, chemical vapor deposition, metallization, plasma etching, etc. These courses emphasize modeling and simulation techniques as well as hands-on laboratory verification of these processes.

Microelectronics (Manufacturing)

The manufacturing courses include topics such as modern CMOS process technology, scheduling, work-in-progress tracking, costing, inventory control, capital budgeting, productivity measures and personnel management.


The microlithography courses are advanced courses in the chemistry, physics and processing of microlithographic materials and systems. Image formation in optical projection, optical proximity and high-energy systems (DUV/VUV. E beam/SCALPEL, x-ray, and EUV) are studied. Practical implementation of advanced technologies, materials and processes are studied and future requirements are presented.

Transition Course

An online transition course "Principles of Semiconductor Devices"is available for students from a non electrical engineering background. The course is taught from the unique perspective of microelectronic engineering with a focus on device layout for fabrication.


The choice of electives provides students an opportunity to focus on their area of interest. The electives courses offered online by the department of microelectronic engineering are:

0305-704: Semiconductor process and device modeling

0305-707: Nanoscale CMOS

0305-830: Defect reduction, yield enhancement and reliability of integrated circuits

The following online course offered by the Center for Quality and Applied Statistics of RIT is also acceptable as an approved elective:

0307-721: Statistical Process Control

Other courses may be chosen with prior approval of the program advisor. No more than 9 credits taken outside RIT can be considered for transfer of credits.


The program requires a five-credit internship (0305-777), which is equivalent to at least three months of full time successful employment in the semiconductor industry. The purpose of the internship is to provide a structured and supervised work experience that enables students to gain job-related skills that will assist them in achieving their desired career goals. Students with prior related engineering job experience may request 'credit by experience'. This request must be made with the Department Head supported by a letter from the appropriate authority substantiating the student's job responsibility, duration and performance quality. Upon approval, the student is advised to deposit the incurred fee to the bursar following which the transfer of credit via 'credit by experience' is granted. The rate for experiential credit is $150 per credit hour.

For students who are not working in the semiconductor industry during the course of the program, the internship can be completed at RIT. It will involve an investigation or a study of a subject or process directly related to microelectronic engineering under the supervision of a faculty advisor. An internship may be taken any time after the completion of the first quarter. It must total at least five credits, and may be designed in a number of ways. For example, one 5 credit internship (typically a three month, full-time work experience), five 1 credit experiences, or any combination of separate credits intersperse throughout the graduate program, which will total equivalent of three months of work for the student. In these cases full graduate tuition is charged. At the conclusion of the Internship, a final Internship Report is required to be submitted to the faculty advisor.

Click Here for Distance Learning Courses offered by the Department of Microelectronic Engineering

Sample ME Online Schedule
Year Quarter Course # Course Title Credits
1 Fall 0305-701 Microelectronics I 4
Winter 0305-702 Microelectronics II 4
Spring 0305-760 Principles of Semiconductor Devices 4
Summer 0305-703 Microelectronics III 4
2 Fall 0305-721 Microlithography Materials and Processes 4
Winter 0305-731 Microelectronics Manufacturing I 4
Spring 0305-722 Microlithography Systems 4
3 Fall   Elective 4
Winter Elective 4
Spring 0305-732 Microelectronics Manufacturing II 4

The program can be started at any quarter. Given below is a sample for a spring quarter beginning:

Sample ME Online Schedule
Year Quarter Course # Course Title Credits
1 Spring 0305-760 Principles of Semiconductor Devices 4
Summer 0305-703 Microelectronics III 4
Fall 0305-701 Microelectronics I 4
Winter 0305-702 Microelectronics II 4
2 Spring 0305-722 Microlithography Systems 4
Fall 0305-721 Microlithography Materials and Processes 4
Winter 0305-731 Microelectronics Manufacturing I 4
3 Spring 0305-732 Microelectronics Manufacturing II 4
Fall Elective 4
Winter Elective 4