Microelectronics and Nanofabrication MinorProgram Code: ESEM
Faculty Advisor: Dr. Michael Jackson, (585) 475-2828, majemc@rit.edu, Associate Professor, Microelectronic Engineering, Director of Microelectronics and Nanofabrication Minor Program
This program is designed to provide basic knowledge to non-microelectronic engineering students from math & statistics, science, and other engineering disciplines whose career path may involve the semiconductor industry.
For example, an electrical or computer engineering student with fabrication and processing knowledge will be a better circuit designer, because they will understand the relationships between electrical data and process conditions. Mechanical engineers, largely employed by the equipment or packaging industries, will have the advantage by knowing the processes involved and how they may impact their system or package design. Industrial engineers will be exposed to facility layout, wafer flow, lot tracking, and other manufacturing issues. Physics/materials science majors will become a top choice for positions in reliability and failure analysis where their expertise in characterization methods would be an asset. Math and statistics major students would be extremely marketable for developing computational algorithms and statistical analysis for advanced simulations. Biology or biotechnology majors with an interest in the bio-chips/bio-MEMS area will find this minor extremely attractive provided they satisfy prerequisites of math and physics.
This program also prepares students to pursue graduate studies in Microsystems Engineering, research in semiconductor applications, and nanotechnology.
Eligibility:
All matriculated undergraduates in engineering and science programs having the math and science prerequisites, except microelectronic engineering students.
A minimum of five courses comprised of three core courses and two electives are required. Course numbers, quarters offered, and suggested elective options follow.
Prerequisite Courses:
Calculus I & Calculus II (1016-281,282)
Required Courses
| Course number | Title | Cr.Hr | Offerings |
| A. 0305-221 | Intro to Microlithography | 4 | S |
| B. 0305-350 | IC Technology | 4 | S, F |
| C. 0305-643 | Thin Film Processes | 4 | S, Su |
Elective Courses:
A minimum of two of the following list of courses are required. However, students can define tracks as suggested below:
| Course number | Title | Offerings | Pre-requisites |
| 0305-632 | Silicon Process Integration | F, W | Core Courses A, B, C |
| 0305-666, 676 | Microlithography Materials & Processes | Core Course A | |
| 0305-650 | CMOS Processing | F, W | Core Course A, B, C, |
| 0305-704 | Process and Device Modeling | W | Core Courses B, C, 0305-632 |
| 0305-731 | Microelectronics Manufacturing I | W | Core B |
| 0305-732 | Microelectronics Manufacturing II | S | Core B |
| 0305-830 | Defect Reduction &Yield Enhancement | F | Core B |
| 0305-870 | Microelectromechanical Systems | W, S | Core B |
| *0305-564, 574 | Microlithography Systems | Intro to Optics, Linear Systems, Core A | |
| *0305-707 | Nanoscale CMOS | Semiconductor Devices Class, Core B |
Suggested Tracks:
Processing Technology/MEMS: 650, 870
Processing Modeling: 632, 704
Manufacturing: 731, 732
Manufacturing and Reliability: 731, 830
* some electives suitable for students with appropriate prerequisites from their major program