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MS - Curriculum

The program consists of eight graduate level (600 level or higher) courses, including six core courses and two elective courses for students with BS degree in a discipline other than Microelectronic Engineering. Two core courses and six elective courses are required for students with BS in Microelectronic Engineering. In addition, all graduate students in this program are required to take one credit seminar/research course for three semesters. Up to three seminar/research course credits will be allowed to count toward the required 33 credit hours. A six-credit thesis that includes dissertation submission and oral defense will be required of all students in this program. The total number of credits needed for the Master of Science in Microelectronics Engineering is 33.

IV.3 Core Courses

MCEE-601 Micro Fab
MCEE-602 VLSI Process Modeling
MCEE-603 Thin Films
MCEE-605 Lithography Materials and Processes
MCEE-615* Nanolithography Systems
MCEE-732 CMOS Manufacturing
MCEE-704** Phy Modeling Semicon Dev

*Required for ME not MS
**Required for MS not ME

Elective Courses

The following MCEE elective courses are offered for graduate credits:

MCEE-615* Nanolithography Systems, Lab
MCEE-620 Photovoltaics
MCEE-704** Physical Modeling of Semi Devices
MCEE-706 SiGe and SOI Devices and Technology
MCEE-713 Quantum and Solid State Physics
MCEE-730 Metrology Failure Analysis & Yield
MCEE-732 Microelectronics Manufacturing II, Lab
MCEE-770 Microelectromechanical Systems
MCEE-789 Special Topics

*Required for ME elective for MS

**Required for MS elective for ME

Based on the student's particular needs, he or she may, with the approval of the program director, choose electives from other programs at RIT.

The following non-MCEE elective courses are offered for graduate credits:

CQAS-621  Statistical Quality Control
CQAS-670  DOE for Process Improvement
CQAS-682  Lean Six Sigma Fundamentals
EEEE-531  Biomed Sensors & Transducers I
EEEE-546  Power Electronics
EEEE-602  Random Signals and Noise
EEEE-603  Matrix Methods in EE
EEEE-610  Analog Electronics
EEEE-689  Fundamentals of MEMS
EEEE-712  Advanced Field Effect Devices
EEEE-713  Solid State Physics
EEEE-730  Advanced Analog IC Design
EEEE-766  Multivariable Modeling
EEEE-787  MEMS Evaluation
IMGS-616  Fourier Methods for Imaging
MCSE-713  Lasers
MTSE-601  Materials Science
MTSE-617  Material Degradation
MTSE-702  Polymer Science
MTSE-703  Solid State Science
MTSE-704  Theory Meth Mat Sci & Eng
MTSE-780  Theory Microsensors & Actuators


The student - in consultation with his or her academic advisor - formulates a plan of study based on the student's academic background, program objectives, degree requirements and course offerings and submits it to the program director within the first year. If necessary, the plan of study may be requested for revision with the recommendation of the advisor.Plan of Study

Initial Faculty Advisors

Dr. Karl Hirschman is the initial advisor for students MS students with a BS in Microelectronics. 

Dr. Sean Rommel is the initial advisor for MS students with a BS in other engineering disciplines.