Research

The microsystems engineering program is a multidisciplinary area and the active research reflects it. The following are some of our faculty and students research areas:

• Microelectromechanical systems
• RF and analog microelectronics
• Micro- and nano-lithography
• Integrated microphotonics
• Micro-fluidics
• Micro-power devices and systems
• Nano-materials
• Bio-MEMS