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The multidisciplinary doctorate degree in microsystems engineering builds on the fundamentals of traditional engineering and science combined with curriculum and research activities addressing the numerous technical challenges of micro- and nano-systems. These include the manipulation of electrical, photonic, optical, mechanical, chemical, and biological functionality to process, sense, and interface with the world at a nanometer scale. The goal of the program is to provide a foundation to explore future technology through research in nano-engineering, design methods, and technologies and their integration into micro- and nano-scaled systems.

Some of the program's areas of exploration include:

  • Next-generation nanoelectronics including:
      1. development of new techniques, processes and architectures for nanoelectronic and nano-optoelectronic devices
      2. exploration into new materials research including germanium, III-V materials, carbon nanotubes, and spintronics
  • Photovoltaic research in silicon, compound semiconductor, and organic solar cells
  • Photonics and nanophotonics imaging, communications, and sensing research including couplers, micro-lasers, microdetectors, integrated silicon waveguides, silicon spectrometers, and biosensors
  • MEMS (micro-electro-mechanical systems), MEOMS (micro-electro-optical-mechanical systems) and NEMS (nano-electro-mechanical systems) device, processing and materials research for smart sensors, actuators, biochips, and micro-implantable appliances
  • Scaled micro- and nano- electronics for integration into biomedical systems
  • New and improved technologies in organic electronic components and devices
  • Nanomaterials research including carbon nanotubes, nanoparticles, quantum dots, self-assembly materials and their applications in electronics, optics, and materials science
  • Microfluidics research on the behavior, control, and manipulation of fluids at the micro-scale