Research
Researchers in the Microsystems Engineering program at the
Rochester Institute of Technology collaborate with
industry, government, and other institutions to carry
out a broad array of projects in the fields of Microsystems
and Nanotechnology. A partial listing of some of the activities
carried out by faculty and students in the program are:
- Scaling-driven nanoelectronics
- new materials, techniques, and architectures for next generation semiconductor devices
- innocations in device patterning and nanolithography
- new materials research including germanium, III-V materials, carbon nanotubes, and spintronics
- MEMS (micro-electro-mechanical systems), MEOMS (micro-electro-optical-mechanical systems), and
NEMS (nano-electro-mechanical systems) devices, processing and materials research for smart sensors,
actuators, biochips, and micro-implantable appliances.
- Photonics and nanophotonics imaging, communications, and sensing research including couplers, imcro-lasers,
microdetectors, integrated silicon waveguides, silicon spectrometers, and biosensors
- Photovoltaics research in silicon, organic, and stacked solar cells and thrmovoltaics
- Scaled micro- and nano-electronics for integration into biomedical systems
- New and improved technologies in organic electronic components and devices
- Microfluids research on the behavior, control, and manipulation of fluids at the micro-scale