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Research

Researchers in the Microsystems Engineering program at the Rochester Institute of Technology collaborate with industry, government, and other institutions to carry out a broad array of projects in the fields of Microsystems and Nanotechnology. A partial listing of some of the activities carried out by faculty and students in the program are:

  • Scaling-driven nanoelectronics
    • new materials, techniques, and architectures for next generation semiconductor devices
    • innocations in device patterning and nanolithography
    • new materials research including germanium, III-V materials, carbon nanotubes, and spintronics
  • MEMS (micro-electro-mechanical systems), MEOMS (micro-electro-optical-mechanical systems), and NEMS (nano-electro-mechanical systems) devices, processing and materials research for smart sensors, actuators, biochips, and micro-implantable appliances.
  • Photonics and nanophotonics imaging, communications, and sensing research including couplers, imcro-lasers, microdetectors, integrated silicon waveguides, silicon spectrometers, and biosensors
  • Photovoltaics research in silicon, organic, and stacked solar cells and thrmovoltaics
  • Scaled micro- and nano-electronics for integration into biomedical systems
  • New and improved technologies in organic electronic components and devices
  • Microfluids research on the behavior, control, and manipulation of fluids at the micro-scale