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Nano-science and Engineering

The integration of entire systems into micron-scale devices and the sensing technology to interface these devices to the real world is and will be core disciplines required for next generation technology. Within the past decade, Microsystems (micro-optical, micro-electrical, and micro-mechanical systems) have emerged as a critical technology worldwide. Simply stated, a microsystem is an ensemble of integrated components, the functionality of which derives from micron-size (or smaller) elements that collectively perform mechanical, electrical, optical, logical, and even biological functions. It is an enabling technology that will add functionality to and reduce the cost of many product applications, particularly in the areas of telecommunications, imaging, electronics, and biomedical diagnostics and treatment.

Faculty active in Microsystems research:

  • David Borkholder:  biosensors (electromagnetic and chemical), biomedical instrumentation MEMS fabrication, systems engineering
  • Lynn Fuller:  microelectronic engineering, IC design, semiconductor manufacturing, MEMS and microsystems
  • Karl Hirschman:  microelectronic engineering, semiconductor process integration, photonic devices
  • Santosh Kurinec:  electronic materials and devices, IC processing, quantum and nanoscale devices, non-volatile memory, photovoltaics
  • Brian Landi:  carbon nanotubes, batteries, wires
  • Stefan Preble:  nanophotonics, silicon photonics, optics
  • Sean Rommel:  microelectronic engineering, emerging semiconductor devices, photonic devices, integration
  • Bruce Smith:  microlithography, nanopatterning and nanomaterials, thin films materials and processes
  • Jiandi Wan:  microfluidics, signaling dynamics of microvascular system, micro-emulsion-based functional materials, photocatalytic multiphase reactions
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