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Bruce Smith

Bruce Smith
Director, Professor

Phone: 585-475-2058
Office: ENG/2153

Professor Bruce Smith has been a member of the engineering faculty at RIT since joining the Microelectronic Engineering program in 1988.  He is currently the Director of Microsystems Engineering and an extended faculty member with the Center for Imaging Science and the Center for Materials Science and Engineering.  He received B.S., M.S. and Ph.D. degrees in Imaging Science from RIT, concentrating on thin films, materials, and semiconductor lithography. Prior to joining the RIT faculty, he held R&D positions at Digital Equipment Corporation in Hudson, MA and AMI Semiconductor in San Jose, CA.  Professor Smith and his group in the Nanolithography Research Laboratory carry out research in areas of micro- and nano-fabrication including nanolithography, semiconductor processing, thin film materials, and optical engineering.  Their work is directed toward leading edge electronic, photonic, micromechanical, and display devices and structures.  Dr. Smith is also the founder of Amphibian Systems, a semiconductor R&D equipment company in Rochester, NY with contracts in the US, Asia, and Europe.

Professor Smith has received numerous research grants from federal agencies, research consortia, and industrial groups, totaling several million dollars.  He has published over 150 papers, presented over 50 keynote, plenary, or invited talks, authored several book chapters, and his textbook “Microlithography: Science and Technology” has become widely used worldwide for academics and professionals.  He holds 27 patents in areas including illumination systems, masking devices, optical system design, and semiconductor materials engineering, several of which have been licensed for commercialization.  Dr. Smith has been a key contributor in the development and adoption of excimer laser water immersion nanolithography, leading research efforts in the dominant technology for current semiconductor device manufacturing.

Professor Smith is a Fellow of the OSA, a Fellow of SPIE, a Senior Member of IEEE, and a member of AVS, ASEE, and SID.   He is the recipient of the IEEE Technical Excellence award, the RIT Trustees Scholarship Award, the SPIE Research Mentoring Award, the RIT Creators Award, the Rush Henrietta Outstanding Alumni Award, the RIT Million Dollar Principle Investigator Award, the RIT Patenting Productivity Award, the Intel Professorship of Research and Technology, and other awards and has been a visiting professor with SEMATECH at the University of Texas (UT, Austin) and with IMEC at the Katholieke Universiteit Leuven (KUL, Belgium).

Additional information about Dr. Smith and the Nanolithography Research Laboratory can be found at www.rit.edu/lithography .

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