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Dale Ewbank

Dale Ewbank
Lecturer

Phone: 585-475-4941
Office: ENG/2551

Dr. Dale Ewbank received his B.S. in Photographic Science and Instrumentation, his M.S. in Materials Science and Engineering, and his Ph.D. in Microsystems Engineering from the Rochester Institute of Technology. He teaches courses in microelectronic engineering including Design of Experiments, Microlithography Materials and Processes, and Nanolithography Systems. Dr. Ewbank’s research involves undergraduate and graduate students in areas of materials and/or processes for enhancement of optical systems related to lithographic techniques.  He also serves as the SPIE RIT Student Chapter Advisor.

Dr. Ewbank’s teaching complements over sixteen years of manufacturing experience in microlithography. He has managed manufacturing engineering and equipment maintenance for a photomask fabrication facility and participated in state-of-the-art engineering and research for development of equipment, processes and products in the semiconductor industry.  Research interests include the fields of microlithography, optical image formation, and electro-optic adaptive microlens design and fabrication. For more about Dr. Ewbank see his personal site at: http://people.rit.edu/deeemc/

Publications

  • D. E. Ewbank, "Single Arm Interferometer System for Reflective Micro-Device Phase Measurement," in Optical Fabrication and Testing, OSA Technical Digest (CD) (Optical Society of America, 2010), paper OWC2. http://www.opticsinfobase.org/abstract.cfm?URI=OFT-2010-OWC2.
  • D. E. Ewbank, "Optical Test System for Reflective Electro-Optical Adaptive Micro-Device Phase Measurement," in Frontiers in Optics, OSA Technical Digest (CD) (Optical Society of America, 2006), paper OFMC6. http://www.opticsinfobase.org/abstract.cfm?URI=OFT-2006-OFMC6
  • Hodge, Daniel C., Fendrock, Loretta R., Ewbank, Dale E., “Chromium Black Light Shield,” US Patent 6,939,015, 2005.

 

 

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