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Robert Pearson

Robert Pearson
Dir. MicroE Prog. Assoc. Professor

Phone: 585-475-2923
Office: ENG/2645

 

Dr. Robert Pearson received his BS and MS in electrical engineering from RIT and his Ph.D from SUNY Buffalo. After graduation he worked in the semiconductor industry before returning to teach at RIT as the first faculty member hired by the Microelectronic Engineering program. After helping to establish the RIT Microelectronic Engineering program he left RIT to be a founding faculty member of the Virginia Commonwealth University School of Engineering in 1997 and supervise the start-up of their new clean-room and microelectronics program. He returned to RIT in 2003 and in 2008 he became the Microelectronic Engineering program director. He teaches VLSI design, semiconductor processing, semiconductor devices, memory systems and electronics.

His research interests include semiconductor processing (devices) and micro-electro-mechanical systems design, simulation, fabrication and testing. He is a senior member of the IEEE and a life member of the Electron Devices Society and Eta Kappa Nu. He is a member of the University Government Industry Microelectronics Symposium steering committee and a member of the SEMI Advanced Semiconductor Manufacturing Conference Technical Committee.

Website: http://people.rit.edu/~repemc/

Selected recent publications and presentations

Pearson, Robert, “History of the University Government Industry Microelectronics Symposium”, 19th University Government Industry Micro/Nanoelectronics Symposium, July 2012, Berkeley CA.

Pearson, Robert; “On the Co-Evolution of Microelectronic Engineering Laboratories and Education at RIT”, 19th University Government Industry Micro/Nanoelectronics Symposium”, July 2012, Berkeley CA.

Pearson, Robert, Hirschman, Karl and Manley, Robert; “Process Model Verification for Dopant Segregation and Oxidation Enhanced Diffusion”, 17th University Government Industry Microelectronics Symposium, Louisville, Kentucky, July 2008.

Pearson, Robert; Fuller, Lynn and Puchades, Ivan; “MEMS Fabrication Course for Pressure Sensors, Flow Sensors, Fluidic Channels and Micro-Pumps”, 17th University Government Industry Microelectronics Symposium, Louisville, Kentucky, July 2008

 

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