Journal of Microelectronic Research

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Device / Process Design and Fabrication

• Advancing RIT to Submicron Technology: Design and Fabrication of 0.5 µm N-Channel MOS Transistors - Michael Aquilino

• Metal Source/Drain Schottky Field Effect Transistors (MSD SFETs): Proof of Concept - Reinaldo Vega

• Design and Fabrication of Tri-Gated FinFET on SOI - Mohammed Rahman

• Development of Thin Gate Oxide for Advanced CMOS Applications - Bryant Mann

• Capacitance Voltage Analysis of High-K Dielectric on Strained Silicon - Michael Latham

• Work Function Engineering with Mo and MoN Gate PMOS - Valarie Welsh

• Integration of High-K Dielectrics and Metal Gates into Submicron NMOS Transistors at RIT - Daniel J. Jaeger

• NMOS Transistor Design and Fabrication for S-Parameter Extraction - Adam L. James

• Esaki Tunnel Diodes Formed by Proximity Rapid Thermal Diffusion - Raymond T. Krom III

• Field Induced Band-to-Band Tunnel Effect Transistor (FIBTET) - David Pawlik

• Fabrication and Test Characterization of Oraganic Poly (3,3’’’- Dialkylquaterhiophene) (PQT) Transistors - Amy Huang

• Fabrication of Eight Level Microlenses - Mayank Agrawal

• Rostir, Inc.: The Fabrication of Ultra-High Value Chip Resistors and Business Plan Development - Jonathan Ross

Microlithography

• Study of the Interaction between Ultra-pure H2O and Photoresist in Immersion Lithography at 193nm - James Park

• Evaluation of a High Index Immersion Fluid - Karen Wolf

• Design and Assessment of Quadrupole Illumination for an Exitech 193 nm Immersion Stepper - Derek Summers

• Printing of Contact Holes for the 45nm Generation using Immersion Interference Lithography - Michael A. Slocum

• In-Situ Abberation Metrology using Phase Wheel Targets - Matthew M. McQuillan

• Characterization and Optimization of a Bi-Layer BARC - Ryan M. Stamp

• Optical Modulation in Silicon and the ORPEL Device - Robin A. Joyce

• Solutions to Resist Pattern Collapse for 45 nm Lithography - Jonathan Reese

• Alignment in Electron Beam Lithography - Stoyan Jeliazkov

Process Development

• Development of a Full Silicidation (FUSI) Process for Nickel Silicide - Yaser A. Al-Sheheri

• Implementation of Backside Vias as an Alternative to Wafer Thinning - Michael Hathorn

• Face-to-Face Die Bonding and Direct Interconnects - Jeffery Steinfeldt

• Development of Silica-Based Waveguide Fabrication Process for Integrated Optics - Antonio Navarro

• Investigation and Development of Air Bridges - Jay Cabacungan

• Electromigration Testing at RIT: Thermal Test Development - Lance W. Barron

• Characterization of Low Temperature Gate Dielectrics for Thin Film Transistors - G. Robert Mulfinger

• Low Temperature Dopant Activation - Eric Woodard

• Integration of Nickel Monosilicide (NiSi) into an RIT SMFL NMOS Device - Phu Do

• Characterization of TiSi2 Process and Electrical Properties - Laurel E. Haydock

• Design and Manufacturing of Silicon PIN Diodes Utilizing Silicon on Insulator Technology - Patrick Warner

• Implementaion of a J-ramp Test Process to Examine the Reliability of Dielectric Films - William Simpson

• Development of a Bilayer Metallization Process - Anthony Nguyen

• Junction Integrity for Low Temperature Dopant Activation in Silicon - Geoff Watson

• Formation of Self-Aligned MOSFET Source/Drains By Proximity Rapid Thermal Diffusion - Scott Kenny

• Workfunction Tuning of Molybdenum Gate by Nitrogren Incorporation - Kazuya Tokunaga

• End Point Detection of Plasma Etching Using Optical Methods - Jeffery Czebiniak

• Development and Characterization of a RIE Process For Anisotropic Trenches in Silicon - Dan Ghiocel

• Investigation into the Use of SU-8 In High Aspect Ratio Applications - Kody Okafor

MEM / Sensor Devices

• Design and Fabrication of a Micro-size Thermionic Ionization/Flame Ionization Detector for Gas Phase Chemical Analyte - Robert Manley

• Fabrication of a Packaged Polysilicon Surface Micro-Machined MEMS Gas Flow Sensor - Vee Chee Hwang

• Fabrication of Polysilicon Micro Valve Arrays - Jermaine White

• Study of Silicon Solar Cell Array to Power MEMs Cantilever Actuator - Benjamin Kolodzie

• Design and Fabrication of a Magnetically Actuated Torsional Beam to Study Magnetic Fields - Gary Fino

• Micro Optical Pyranometer - Edward Camacho

• Adhesion Optimization of Aluminum on Poly-methyl-methacrylate - George Woodruff

• Development of a Polysilicon Check Microvalve - William C. Hart

• Development of Macroporus Silicon for Bio-chemical Sensing Applications - Tiffany M. Hoover

• MEMS Based Light Modulator - Shushil Shakya

• BIOMEMs Wireless Pressure Sensor - Daniel Pearce

• Microfabrication and Commercialization of a Polymer Absorption Chemical Gas Sensor - Stephen Parshall

• Microfabrication of Biocompatible Stimulation Arrays for Cochlear Implants - Ward Johnson