• PPT outline of PMOS process

MEMS

• PDF outline of MEMS process

SMFL-CMOS

• Outline of SMFL-CMOS process

Sub-CMOS

• PDF outline of Sub-CMOS process

Adv-CMOS

• PDF outline of Adv-CMOS process

MEMS Pressure Sensor

• PDF outline of MEMS pressure sensor process

• Aluminium Thickness and Sputter Rate
• 6500Å Field Oxide Thickness and Soak Time
• 150Å Gate Oxide Thickness and Soak Time
• 1000Å Wet Kooi Oxide Thickness and Soak Time
• Low Temperature Oxide Thickness and Dep. Rate
• 1500Å Nitride Thickness and Dep. Rate
• 3500Å Nitride Thickness and Dep. Rate
• 500Å Dry Pad Oxide Thickness and Soak Time
• N+ Poly Sheet Resistance
• N+ Poly Thickness and Dep. Rate
• 5000Å Wet Well Alignment Oxide Thickness and Soak Time