ILSim is a compact, multi-beam interference lithography simulator. ILSim is based on full vector interference theory, which allows for application at extremely high NA values, such as those projected for use with immersion lithography.
ILSim was developed by Yongfa Fan and is provided free of charge.
Installation Instructions/Requirements:
MATLAB is required for use.
To install ILSim, first download ilsim.zip
Unzip the file into a directory of your choice.
Load ILSim.p in MATLAB and execute.