N. Lafferty, J. Zhou, B. W. Smith, "Mask Enhancement Using and Evanescent Wave Effect", Proc. SPIE 6520,(2007) paper

A. Bourov, S. A. Robertson, B. W. Smith, M. A. Slocum, E. C. Piscani, "Experimental Measurement of Photoresist Modulation Curves", Proc. SPIE 6154, (2006) paper

A. Bourov, S. A. Robertson, B. W. Smith, M. A. Slocum, E. C. Piscani, "Resist Process Window Characterization for the 45-nm Node Using an Interferometric Immersion Microstepper", Proc. SPIE 6153, (2006) paper

Y. Fan, A. Bourov, M. Slocum, B. W. Smith, "Effects of Beam Pointing Instability on Two-Beam Interferometric Lithography", Proc. SPIE 6154, (2006) paper

B.W. Smith, Y. Fan, J. Zhou, N. Lafferty, A. Estroff, "Evanescent Wave Imaging in Optical Lithography", Proc. SPIE 6154, (2006) paper

A. Bourov, Y. Fan, F. C. Cropanese, B. W. Smith, "Photoresist Modulation Curves", Proc. SPIE 5754, (2005) paper

N. Lafferty, G. Vandenberghe, B.W. Smith, M. Lassiter, P. Martin, "Gray assist bar OPC", Proc. SPIE 5377, (2004) paper | presentation

F. Cropanese, A. Bourov, Y. Fan, A. Estroff, L. Zavyalova, B.W. Smith, "Synthesis of projection lithography for low k1 via interferometry", Proc. SPIE 5377, (2004) paper | poster

B.W. Smith, "Forbidden pitch or duty free: revealing the causes of across-pitch imaging differences", Proc. SPIE 5040, (2003) paper | presentation

B.W. Smith, G. Vandenberghe, "Image enhancement through square illumination shaping", Proc. SPIE 4691, (2002) paper

B.W. Smith, D. Ewbank, "OPC and image optimization using localized frequency analysis", Proc. SPIE 4691, (2002) paper

B.W. Smith, "Mutually optimizing resolution enhancement techniques: illumination, APSM, assist feature OPC, and gray bars", Proc. SPIE 4348, (2001) paper