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| Hyper-NA and Polarization | Mask Induced Polarization Effects at High NA |
High NA and Polarization
A. Estroff, Y. Fan, A. Bourov, B.W. Smith, P. Foubert, L.H.A. Leunissen, Y. Aksenov, "Mask Induced Polarization Effects at High NA", Proc. SPIE 5754, (2005) paper
B.W. Smith, L. Zavyalova, A. Estroff, "Benefiting from polarization - effects of high-NA on imaging", Proc. SPIE 5377, (2004) paper | presentation
A. Estroff, Y. Fan, A. Bourov, F. Cropanese, N. Lafferty, L. Zavyalova, B.W. Smith, "Mask induced polarization", Proc. SPIE 5377, (2004) paper | poster
B.W. Smith, J. Cashmore, "Challenges in high NA, polarization, and photoresists", Proc. SPIE 4691, (2002) paper
Copyright 2007 Society of Photo-Optical
Instrumentation Engineers.
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