Microelectronic Engineering Department
Santosh Kurinec, Department Head
(585) 475-2927, santosh.kurinec@rit.edu
The worldwide semiconductor industry is expected to grow from $226 billion to $308 billion over the next five years. The technology is advancing at an astounding pace that requires a specially educated workforce. The Kate Gleason College of Engineering is proud to offer two master’s degrees in microelectronic engineering. The master of science in microelectronic engineering is a research-oriented program that includes a master’s thesis. The master of engineering in microelectronics manufacturing engineering is a full-time, intensive classroom and laboratory-oriented program culminating with an internship. Both programs are intended to prepare students for careers in the semiconductor industry.
Integrated circuit technology makes use of many diverse fields of science and engineering. Optical lithography tools, which print microscopic patterns on wafers, represent one of the most advanced applications of the principles of Fourier optics. Plasma etching involves some of the most complex applications of chemistry used in manufacturing today. Ion implantation draws upon understanding from research in high-energy physics and ion solid interactions. Thin films on semiconductor surfaces exhibit complex mechanical and electrical behavior that stretches our understanding of basic materials properties. Computing skills are necessary to design, model, simulate, and predict processes and device behavior, extremely vital to manufacturing. A solid knowledge of statistics is required to manipulate data and process control. Manufacturing concepts are extremely important in maintaining high yields and cost effectiveness.
One of the great challenges in integrated circuit manufacturing is the need to draw on scientific principles and engineering developments from such an extraordinarily wide range of disciplines not adequately provided by traditional engineering or science programs. Scientists and engineers who work in this field need broad understanding and the ability to seek out, integrate, and use ideas from many fields. These programs are tailored to meet the demands of the semiconductor industry for a suitably educated workforce.
Students in these programs have hands-on experience in the design and processing of integrated circuits─the vital component in almost every advanced electronic product manufactured today. RIT’s laboratories are designed for the microelectronic engineering programs. They are among the best in the nation and offer an unparalleled opportunity for students to prepare for professional challenges and successes in one of the leading areas of engineering.
Master of Science in Microelectronic Engineering
The objective of the master of science program in microelectronic engineering is to provide an opportunity for students to perform graduate-level research as they prepare for entry into the semiconductor industry or a doctorate program. The program requires strong preparation in the area of microelectronics and requires a thesis.
Program outcomes
The MS program in microelectronic engineering has a number of outcomes for its students:
- Understand the fundamental scientific principles governing solid-state devices and their incorporation into modern integrated circuits;
- Understand the relevance of a process or device, either proposed or existing, to current manufacturing practices;
- Develop in-depth knowledge in existing or emerging areas of the field of microelectronics, such as device engineering, circuit design, lithography, materials and processes, and yield and manufacturing;
- Apply microelectronic processing techniques to the creation/investigation of new process/device structures; and
- Communicate technical material effectively through oral presentations, written reports, and publications.
The prerequisites include a bachelor of science degree in engineering (such as electrical or microelectronic engineering), including an introductory course in device physics and an introductory course in fabrication technology. Students from RIT’s BS program in microelectronic engineering will meet these prerequisites. Students who do not have these prerequisites can take these courses during their first quarter of study and still complete the MS program in two years. The prerequisite courses will not count toward the 36 credits of graduate courses required for the MS degree.
The program consists of eight graduate courses (700-level or higher), including seven core courses and one elective course for students with a BS degree in a discipline other than microelectronic engineering. Five core courses and three elective courses are required for students with a BS in microelectronic engineering. In addition, all students in this program are required to take a variable-credit (1 or 0 credit) seminar/research course each quarter they are at RIT. Up to 4 credits will be allowed toward the required 36 credit hours. A 9-credit thesis, which includes an oral defense, is required of all students in this program. The total number of credits needed for the MS in microelectronic engineering is 45.
Core courses:
0305-702 Microelectronics II, Lab
0305-703 Microelectronics III, Lab
0305-704 Semiconductor Process and Device Modeling
0305-705 Quantum and Solid State Physics for Nanostructures
0301-712 Physics and Scaling of CMOS
0305-721 Microlithography Materials, Lab
0305-731/732* Microelectronics Manufacturing I/II, Lab
*731 cannot be taken for graduate degree credit by students with a BS in microelectronic engineering.
Elective courses:
The following elective courses are offered by the department of microelectronic engineering for graduate credits:
0305-706 SiGe and SOI Devices and Technology
0305-707 Nanoscale CMOS and Beyond
0305-714 Micro- and
Nano-Characterization
0305-722 Microlithography Systems, Lab
0305-732 Microelectronics Manufacturing II, Lab
0305-830 Metrology for Yield and Failure Analysis
0305-870 Microelectromechanical Systems
0305-890 Special Topics
Based on the student’s particular needs, he or she may, with departmental approval, choose electives from other programs at the university.
Sample of a typical course schedule:
| Fall | Qtr. Cr. Hrs. |
| 0305-701 Transition Microelectronics I, Lab | 4 |
| 0305-560 Transition Semiconductor Devices II | 4 |
| 0305-721 Microlithography Materials and Processes, Lab | 4 |
| 0305-801 Seminar/Research | 1 |
| Winter | |
| 0305-702 Microelectronics II, Lab | 4 |
| 0305-731 Microelectronics Manufacturing I, Lab | 4 |
| 0305-801 Seminar/Research | 1 |
| Full Time Equivalency* | 3 |
| Spring | |
| 0305-703 Microelectronics III, Lab | 4 |
| 0305-xxx Elective | 4 |
| 0305-801 Seminar/Research | 1 |
| Full Time Equivalency* | 3 |
| Summer | |
| Research | |
| Fall | |
| 0305-705 Quantum and Solid State Physics for Nanostructures | 4 |
| 0305-801 Seminar/Research | 1 |
| 0305-889 Thesis | 3 |
| Full-time Equivalency* | |
| Winter | |
| 0305-704 Semiconductor Process and Device Modeling | 4 |
| 0301-712 Physics and Scaling of CMOS | 4 |
| 0305-801 Seminar/Research | 1 |
| 0305-899 Thesis | 3 |
| Spring | |
| 0305-801 Seminar/Research | 1 |
| 0305-899 Thesis | 3 |
| Full-time Equivalency* | 8 |
Sample schedule for students with a BS in microelectronic engineering:
| Fall | Qtr. Cr. Hrs. |
| 0301-705C Quantum and Solid State Physics for Nanostructures | 4 |
| 0305-801 Seminar/Research | 1 |
| 0305-xxx Elective 1 | 4 |
| Full-time Equivalency* | 3 |
| Winter | |
| 0301-712 Physics and Scaling of CMOS | 4 |
| 0305-704 Semiconductor Process and Device Modeling | 4 |
| 0305-801 Seminar/Research | 1 |
| Full-time Equivalency* | 3 |
| Spring | |
| 0305-732 Microelectronic Manufacturing II | 4 |
| 0305-801 Seminar/Research | 1 |
| 0305-xxx Elective 1 | 4 |
| Full-time Equivalency* | 3 |
| Summer | |
| Research | |
| Fall | |
| 0305-xxx Elective 2 | 4 |
| 0305-801 Seminar/Research | 1 |
| 0305-899 Thesis | 3 |
| Full-time Equivalency* | 4 |
| Winter | |
| 0305-xxx Elective 3 | 4 |
| 0305-801 Seminar/Research | 1 |
| 0305-899 Thesis | 3 |
| Full-time Equivalency | 4 |
| Spring | |
| 0305-xxx Elective 4 | 4 |
| 0305-801 Seminar/Research | 1 |
| 0305-899 Thesis | 3 |
| Full-time Equivalency* | 4 |
*A full-time equivalency form must be completed for each
quarter of the academic year for which the form is requested. The form can be
accessed at the department website:
http://www.rit.edu/kgcoe/ue/pdf/Grad%20Student%20FT%20Equiv.pdf
Thesis
A thesis is required for completion of the MS degree in microelectronic engineering. Normally, the thesis is undertaken once the student has completed all course requirements. Planning for the thesis, however, should begin as early as possible. Generally, full-time students should complete their degree requirements, including thesis defense, within two years (six academic quarters and one summer quarter) from the date of entry. A detailed description of the thesis process and previous MS thesis topics are provided on the department website at: http://www.rit.edu/kgcoe/ue/thesisguidelines.php?page=18
Admission requirements
Applicants must hold a baccalaureate degree in electrical engineering, chemical engineering, materials science and engineering, physics, or the equivalent from an accredited college or university. An undergraduate grade point average of 3.0 or better on a 4.0 scale or strong academic/supervisor endorsements are required. Graduate Record Exam scores are not mandatory but may strengthen the student’s candidacy.
Plan of study
In consultation with their adviser, students formulate a plan of study based on their academic background, program objectives, degree requirements, and course offerings. The plan of study is submitted to the department office within the first year. If necessary, a revision of the plan of study may be recommended by the adviser. Plan of study forms are available on the department website at: http://www.rit.edu/kgcoe/ue/pdf/Graduate%20Plan%20of%20Study.doc
Assistantships and fellowships
A limited number of assistantships and fellowships may be available for full-time students. Appointment as a teaching assistant carries a 12-hour-per-week commitment to a teaching function and permits a student to take graduate work at the rate of 12 credits per quarter. The remaining time is devoted to a research effort, which often serves as a thesis subject. Students in the MS program are eligible for research fellowships. Appointments provide full or partial tuition coverage and a stipend. Applicants for financial aid should write directly to the department head for details.
Master of Engineering in Microelectronics Manufacturing Engineering
http://www.rit.edu/kgcoe/ue/me.php
The department of microelectronic engineering offers the master of engineering degree in microelectronics manufacturing engineering. The program provides a broad-based education to students with a bachelor’s degree in traditional engineering or science disciplines who are interested in a career in the semiconductor industry.
The ME degree is awarded upon successful completion of an approved graduate program consisting of a minimum of 45 credit hours. The program consists of one transition course, seven core courses, two elective courses, and a minimum of 5 credits of internship. Under certain circumstances, a student may be required to complete more than the minimum number of credits. The transition course is in an area other than that in which the BS degree was earned. For example, chemistry majors may be required to take a two-course sequence in circuits and electronics.
Program outcomes
The MS program in microelectronics manufacturing engineering has a number of outcomes for its students:
- Design and understand a sequence of processing steps to fabricate a solid state device to meet a set of geometric, electrical and/or processing parameters
- Analyze experimental electrical data from a solid state device to extract performance parameters for comparison to modeling parameters used in the device design
- Understand current lithographic materials, processes, and systems to meet imaging and/or device patterning requirements
- Understand the relevance of a process or device, either proposed or existing, to current manufacturing practices
- Perform in a microelectronic engineering environment, as evidenced by a three-month internship
- Appreciate the areas of specialty in the field of microelectronics, such as device engineering, circuit design, lithography, materials and processes, and yield and manufacturing
The core courses are Microelectronics Processing I, II and III; Microelectronics Manufacturing I, II and III; and Microlithography Materials and Processes and Microlithography Systems. Two elective graduate-level courses in a microelectronic-related field are required. Elective courses may be selected from a list that includes courses such as metrology and failure analysis, semiconductor process and device modeling, and nanoscale CMOS. The program requires an internship, which is at least three months of full-time, successful employment in the semiconductor industry or at RIT in the SMFL Lab. It will involve an investigation or a study of a problem or process directly related to microelectronics manufacturing engineering. Though no thesis is required, a written report and oral presentation are made at the end of the project.
Microelectronics
The Microelectronics I, II, and III course sequence covers major aspects of integrated circuit manufacturing technology such as oxidation, diffusion, ion implantation, chemical vapor deposition, metalization, plasma etching, etc. These courses emphasize modeling and simulation techniques as well as hands-on laboratory verification of these processes. Students use special software tools for these processes. In the laboratory, students design and fabricate silicon MOS and bipolar integrated circuits, learn how to utilize most of the semiconductor processing equipment, develop and create a process, and manufacture and test their own integrated circuits.
Microlithography
The microlithography courses are advanced courses in the chemistry, physics, and processing involved in microlithography. Optical lithography will be studied through diffraction, Fourier, and image-assessment techniques. Scalar diffraction models will be utilized to simulate aerial image formation and influences of imaging parameters. Positive and negative resist systems, as well as processes for IC application, will be studied. Advanced topics will include chemically amplified resists; multiple-layer resist systems; phase-shift masks; and electron beam, X-ray, and deep UV lithography.
Laboratory exercises include projection-system design, resist-materials characterization, process optimization, electron-beam lithography, and excimer laser lithography.
Manufacturing
The manufacturing courses include topics such as scheduling, work-in-progress tracking, costing, inventory control, capital budgeting, productivity measures, and personnel management. Concepts of quality and statistical process control are introduced, and the laboratory for this course is the student-run factory functioning within the department. Important issues such as measurement of yield, defect density, wafer mapping, control charts, and other manufacturing measurement tools are examined in lectures and through laboratory work. Computer-integrated manufacturing also is studied in detail. Process modeling, simulation, direct control, computer networking, database systems, linking application programs, facility monitoring, expert systems applications for diagnosis and training, and robotics are supported by laboratory experiences in the integrated circuit factory. An online (distance delivery) version of this program exists for engineers employed in the semiconductor industry. Please refer to RIT’s Online Guide for details.
Internship
The program requires a 5 credit internship, which is equivalent to at least three months of full-time, successful employment in the semiconductor industry. The purpose of the internship is to provide a structured and supervised work experience that enables students to gain job-related skills that will assist them in achieving their desired career goals.
Students with prior engineering-related job experience may request “credit by experience.” This request must be made with the department head and supported by a letter from the appropriate authority substantiating the student’s job responsibility, duration, and performance quality. Upon approval, the student is advised to deposit the incurred fee to the bursar after the transfer of credit is granted.
For students who are not working in the semiconductor industry while enrolled in this program, the internship can be completed at RIT. It will involve an investigation or study of a subject or process directly related to microelectronic engineering under the supervision of a faculty adviser. An internship may be taken any time after the completion of the first quarter, must total at least 5 credits, and may be designed in a number of ways. For example, one 5-credit internship (typically a three-month, full-time work experience), five 1-credit experiences, or any combination of separate credits interspersed throughout the graduate program may be used, as long as the total is the equivalent of three months of work. In these cases, full graduate tuition is charged. At the conclusion of the internship, submission of a final internship report to the faculty adviser is required.
| Fall | Qtr. Cr. Hrs. |
| 0305-701 Microelectronics I, Lab | 4 |
| 0305-721 Microlithography Materials and Processes, Lab | 4 |
| Transition | 4 |
| Winter | |
| 0305-702 Microelectronics II, Lab | 4 |
| 0305-731 Microelectronics Manufacturing I, Lab | 4 |
| Transition | 4 |
| 0305-xxx Elective 1 | 4 |
| Spring | |
| 0305-703 Microelectronics III, Lab | 4 |
| 0305-722 Microlithography Systems, Lab | 4 |
| 0305-732 Microelectronics Manufacturing II, Lab | 4 |
| 0305-xxx Elective 2 | 4 |
| Summer | |
| Internship | 5 |