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Microelectronic Engineering MS

Semester Requirements

Robert Pearson, Program Director
(585) 475-2923, repemc@rit.edu

http://www.rit.edu/kgcoe/program/microelectronic-engineering-0

Program overview

The objective of the master of science degree in microelectronic engineering is to provide an opportunity for students to perform graduate-level research as they prepare for entry into either the semiconductor industry or a doctoral program. The degree requires strong preparation in the area of microelectronics and requires a thesis.

Program outcomes

The program has a number of outcomes for its students:

  • Understand the fundamental scientific principles governing solid-state devices and their incorporation into modern integrated circuits.
  • Understand the relevance of a process or device, either proposed or existing, to current manufacturing practices.
  • Develop in-depth knowledge in existing or emerging areas of the field of microelectronics, such as device engineering, circuit design, lithography, materials and processes, and yield and manufacturing.
  • Apply microelectronic processing techniques to the creation/investigation of new process/device structures.
  • Communicate technical material effectively through oral presentations, written reports, and publications.

Program prerequisites include a bachelor of science degree in engineering (such as electrical or microelectronic engineering), including an introductory course in device physics. Students who do not have these prerequisites can take courses during their first semester of study and still complete the MS program in two years. Prerequisite courses do not count toward the graduate courses required for the MS degree.

Curriculum

The program consists of nine core courses, two graduate electives, and a thesis. The curriculum has been designed for students who do not have an undergraduate degree in microelectronic engineering. Students who have an undergraduate degree in microelectronic engineering will develop a custom course of study with their graduate adviser.

Thesis

A thesis is normally undertaken once the student has completed all course requirements. Planning for the thesis, however, should begin as early as possible. Generally, full-time students should complete their degree requirements, including thesis defense, within two years (four academic semesters and one summer term).

Microelectronic engineering, MS degree, typical course sequence

Course Sem. Cr. Hrs.
First Year
MCEE-601 Microelectronic Fabrication 3
MCEE-605 Lithographic Materials and Processes 3
MCEE-603 Thin Films 3
MCEE-795 Microelectronics Research Methods 1
MCEE-732 Microelectronic Man. 3
MCEE-602 VLS Process Modeling 3
  Graduate Elective* 3
MCEE-795 Microelectronics Research Methods 1
Second Year
MCEE-704 Physical Modeling of Semiconductor Devices 3
  Graduate Elective* 3
MCEE-790 MS Thesis 6
MCEE-795 Microelectronics Research Methods 1
Total Semester Credit Hours 33

* With adviser approval.

Admission requirements

To be considered for admission to the MS program in microelectronic engineering, candidates must fulfill the following requirements:

  • Hold a baccalaureate degree from an accredited university in engineering or a related field,
  • Submit official transcripts (in English) from all previously completed undergraduate and graduate course work,
  • Have an GPA of 3.0 or higher,
  • Submit scores from the Graduate Record Exam (RIT graduates exempt),
  • Submit two letters of reference from individuals well qualified to judge the candidate's ability for graduate study, and
  • Complete a graduate application.
  • International applicants whose native language is not English must submit scores from the Test of English as a Foreign Language (TOEFL).

Candidates applying with a bachelor's degree in fields outside of electrical and microelectronic engineering may be considered for admission; however, bridge courses may be required to ensure the student is adequately prepared for graduate study.

[arrow] Click to view program requirements in the Quarter Calendar

Quarter Curriculum - For Reference Only

Effective fall 2013, RIT will convert its academic calendar from quarters to semesters. The following content has been made available as reference only. Currently matriculated students who began their academic programs in quarters should consult their academic adviser for guidance and course selection.

Program overview

The objective of the master of science program in microelectronic engineering is to provide an opportunity for students to perform graduate-level research as they prepare for entry into the semiconductor industry or a doctoral program. The program requires strong preparation in the area of microelectronics and requires a thesis.

Program outcomes

The program has a number of outcomes for its students:

  • Understand the fundamental scientific principles governing solid-state devices and their incorporation into modern integrated circuits.
  • Understand the relevance of a process or device, either proposed or existing, to current manufacturing practices.
  • Develop in-depth knowledge in existing or emerging areas of the field of microelectronics, such as device engineering, circuit design, lithography, materials and processes, and yield and manufacturing.
  • Apply microelectronic processing techniques to the creation/investigation of new process/device structures.
  • Communicate technical material effectively through oral presentations, written reports, and publications.

The prerequisites include a bachelor of science degree in engineering (such as electrical or microelectronic engineering), including an introductory course in device physics. Students who do not have these prerequisites can take courses during their first quarter of study and still complete the MS program in two years. Prerequisite courses do not count toward the graduate courses required for the MS degree.

Curriculum

The program consists of eight graduate courses (700-level or higher), including seven core courses and one elective course for students with a BS degree in a discipline other than microelectronic engineering. Five core courses and three elective courses are required for students with a BS in microelectronic engineering from RIT. In addition, all students are required to take a variable-credit (1 or 0 quarter credit hour) seminar/research course each quarter they are enrolled in the program. Up to 4 quarter credit hours will be allowed toward the required 36 quarter credit hours. A 9 quarter credit hour thesis, which includes an oral defense, is required of students. The total number of credits needed for the MS in microelectronic engineering is 45 quarter credit hours.

Microelectronic engineering, MS degree, typical course schedule (quarters)

CourseQtr. Cr. Hrs.
First Year
0305-560 Transition Semiconductor Devices II 4‡
0305-701 Microelectronics I, Lab 4
0305-721 Microlithography Materials and Processes, Lab 4
0305-801 Seminar/Research§ 1-4
0305-702 Microelectronics II, Lab 4
0305-731 Microelectronics Manufacturing I, Lab 4
  Full Time Equivalency* 3
0305-703 Microelectronics III, Lab 4
  Elective 4
  Full Time Equivalency* 3
  Research  
Second Year
0305-705 Quantum and Solid State Physics for Nanostructures 4
0305-801 Seminar/Research§ 1-4
  Full-time Equivalency*  
0301-712 Physics and Scaling of CMOS 4
0305-704 Semiconductor Process and Device Modeling 4
0305-899 Thesis 10
  Full-time Equivalency* 9
Total Quarter Credit Hours 45

* A full-time equivalency form must be completed for each quarter of the academic year for which the form is requested.

† For those students who do not have an undergraduate degree in microelectronic engineering from RIT. Those students who do have an undergraduate degree in microelectronic engineering from RIT will develop a custom course of study with their graduate adviser, including 0305-704, 705, and 712.

‡ This course's quarter credit hours are not counted toward the 48 required of the program.

§ A maximum of 4 quarter credit hours are available for Seminar/Research (0305-801).

Thesis

A thesis is required and normally is undertaken once the student has completed all course requirements. Planning for the thesis, however, should begin as early as possible. Generally, full-time students should complete their degree requirements, including thesis defense, within two years (six academic quarters and one summer quarter) from the date of entry.

Admission requirements

To be considered for admission to the MS program in microelectronic engineering, candidates must fulfill the following requirements:

  • Hold a baccalaureate degree from an accredited university in engineering or a related field,
  • Submit official transcripts (in English) from all previously completed undergraduate and graduate course work,
  • Have an GPA of 3.0 or higher,
  • Submit scores from the Graduate Record Exam (RIT graduates exempt),
  • Submit two letters of reference from individuals well qualified to judge the candidate's ability for graduate study, and
  • Complete a graduate application.
  • International applicants whose native language is not English must submit scores from the Test of English as a Foreign Language (TOEFL).

Candidates applying with a bachelor's degree in non-electrical or non-microelectronic engineering fields may be considered for admission; however, they may be required to take additional bridge courses to ensure they are adequately prepared for graduate study.