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Microsystems Engineering Ph.D.

Bruce Smith, Director
(585) 475-2295, bruce.smith@rit.edu

http://www.rit.edu/kgcoe/grad/phd

Program overview

The multidisciplinary doctorate degree in microsystems engineering builds on the fundamentals of traditional engineering and science combined with curriculum and research activities addressing the numerous technical challenges of micro- and nano-systems. These include the manipulation of electrical, photonic, optical, mechanical, chemical, and biological functionality to process, sense, and interface with the world at a nanometer scale. The goal of the program is to provide a foundation to explore future technology through research in nano-engineering, design methods, and technologies and their integration into micro- and nano-scaled systems. Some of the program’s areas of exploration include the following:

  • Scaling-driven nanoelectronics including:
    • new materials, techniques, and architectures for next generation semiconductor devices
    • innovations in device patterning and nanolithography
    • new materials research including germanium, III-V materials, carbon nanotubes, and spintronics
  • MEMS (micro-electro-mechanical systems), MEOMS (micro-electro-optical-mechanical systems) and NEMS (nano-electro-mechanical systems) device, processing and materials research for smart sensors, actuators, biochips, and micro-implantable appliances
  • Photonics and nanophotonics imaging, communications, and sensing research including couplers, micro-lasers, microdetectors, integrated silicon waveguides, silicon spectrometers, and biosensors
  • Photovoltaic research in silicon, organic, and stacked solar cells and thermophotovoltaics
  • Scaled micro- and nano- electronics for integration into biomedical systems
  • New and improved technologies in organic electronic components and devices
  • Microfluidics research on the behavior, control, and manipulation of fluids at the micro-scale

Mission

The program fulfills a critical need for an expanded knowledge base and expertise in the innovation, design, fabrication, and application of micro- and nano-scale devices, components, and systems. RIT is becoming an internationally recognized leader in education, research, and economic development in the fields of microsystems and nanoscale engineering.

The curriculum of this multidisciplinary program is structured to provide each student with a sound background and a thorough foundation in engineering and science. The curriculum provides world-class education through the innovative application of educational technologies and partnerships.

Program highlights

The program is designed for students with a strong background in engineering and the physical sciences, and with an interest in hands on exploration into new fields of micro- and nano-systems.

  • The program has a world-renowned, multidisciplinary faculty that shares resources and expertise ranging from nanoelectronics to nanopower research to MEMS and NEMS. The program is administered by core faculty from RIT’s colleges of engineering and science.
  • Unique state-of-the art research laboratories have been designed to provide a focus for microsystems and nanoscale engineering research across traditional disciplinary boundaries. An industrial scale semiconductor and microsystems clean-room is at the heart of the research facilities, providing students access to the most advanced micro- and nano-electronic processing capabilities.
  • Students explore applications of microsystems and nanotechnology through close collaboration with industry and government laboratories.
  • Graduates from the program have discovered exciting opportunities in new technology frontiers.

Curriculum

A total of 99 quarter credit hours combined graduate course work and research are required for completion of the program. This includes a minimum of 60 credit hours of course work and a minimum of 27 hours of research credit toward the dissertation. The course work requires a combination of 16 hours of foundation courses, 36 hours of major and minor technical area courses, and 8 hours of elective courses. The student must pass the Comprehensive Exam, the Qualifying Exam, the Candidacy Exam, and the Dissertation Defense Exam for completion of degree requirements.

Phase 1: The first phase prepares students with a foundation in science and engineering and determines the student’s ability to conduct independent research. This includes foundation and specialization courses taken during the first year together with the successful completion of the Comprehensive Exam. The Comprehensive Exam tests the student’s ability to think and learn independently, to critically evaluate current research work in a field of microsystems engineering, and to use good judgment and creativity to determine appropriate directions for future research work.

Phase 2: The second phase consists of course work in the program of study along with preliminary research. Much of this course work will support the dissertation research to be conducted in the third phase. This second phase is completed when the student has finished most of the formal course work as prescribed in the program of study, has prepared the Dissertation Proposal, and has passed the Qualifying Examination.

Phase 3: The third phase consists of the completion of the experimental and/or theoretical work needed to complete the student’s dissertation along with the required publication of results. The Candidacy Exam is taken and a defense of the dissertation is completed. The defense consists of a public oral presentation and examination.

The course work requirements for the doctorate are divided into four parts to ensure that students complete a well-rounded program of study with the necessary concentration in their specialized field.

Foundation courses

Students complete the following foundation courses: Microelectronics I (0305-701), Introduction to Nanotechnology and Microsystems (0308-702), Material Science for Microsystems Engineering (0308-703), and Introduction to Theoretical Methods (1028-704).

Major technical interest area

Students will complete a sequence of three courses (12 credit hours) in the major technical research area and a sequence of two courses (8 credit hours) in a support area.

Minor technical interest areas

Two course sequences in each minor technical area are completed. At least one sequence must be outside of the student’s undergraduate degree major.

Electives

 

General course requirements

The total number of credit hours taken toward the doctorate depends upon the highest degree completed by the student before entering the program. Students entering the program without prior graduate work must complete a minimum of 60 credit hours of coursework as outlined above. The course work should consist primarily of graduate level (700 and 800) courses with no more than three upper level undergraduate (600) courses.

Students entering the program with a master’s degree may be permitted to use up to 32 credit hours toward the minimum 60 credit hours of coursework required for the degree, based on the approval of the program director.

All students are required to maintain a cumulative grade point average of 3.0 (on a 4.0 scale) to remain in good standing in the program.

Semester conversion
Effective fall 2013, RIT will convert its academic calendar from quarters to semesters. Each program and its associated courses have been sent to the New York State Department of Education for approval of the semester plan. For reference, the following charts illustrate the typical course sequence for this program in both quarters and semesters. Students should consult their academic advisers with questions regarding planning and course selection.

Microsystems engineering, Ph.D. degree, typical course sequence (quarters)

Course Qtr. Cr. Hrs.
First Year
0305-701 Microelectronics 4
0308-702 Introduction to Nantechnology and Microsystems 4
0308-703 Material Science for Microsystems Engineering 4
1028-704 Introduction to Theroetical Methods 4
  Major Technical Interest Area Elective 1, 2, 3 12
  Major Technical Interest Support Area Course 1, 2 8
  Minor Technical Interest Area Course 1, 2, 3 12
Second Year
  Minor Technical Interest Area Course 4 4
  Electives 8
  Research and Dissertation 9
Third Year
  Research and Dissertation 9
Fourth Year
  Research and Dissertation 9
Total Quarter Credit Hours* 99

* Total quarter credit hours will depend on the highest degree completed by the student before entering the program and how many courses from previously completed graduate course work can be counted toward the program.

Microsystems engineering, Ph.D. degree, typical course sequence (semesters), effective fall 2013

Course Sem. Cr. Hrs.
First Year
MCSE-702 Introduction to Nanotechnology and Microsystems 3
MCEE-601 Microelectronics I 3
  Major Technical Area Elective A 3
MCSE-703 Material Science for Microsystems Engineering 3
MTSE-704 Theoretical Methods in Materials Science and Engineering 3
  Major Technical Area Elective A 3
Second Year
  Major Technical Area Elective A 3
  Minor Technical Area Elective 3
MCSE-890 Doctoral Dissertation (Research and Thesis) 1
  Minor Technical Area Elective 3
  Technical Elective 3
MCSE-890 Doctoral Dissertation (Research and Thesis) 1
Third Year
  Technical Elective 3
  Major Technical Area Elective B 3
MCSE-890 Doctoral Dissertation (Research and Thesis)  2
MCSE-890 Doctoral Dissertation (Research and Thesis) 5
  Major Technical Area Elective B 3
Fourth Year
MCSE-890 Doctoral Dissertation (Research and Thesis) 6
MCSE-890 Doctoral Dissertation (Research and Thesis) 12
Total Semester Credit Hours 66

Examples of course sequences

Course
MEMS
0308-786 MEMS Design
0308-811 Microsystems Design and Packaging
Microelectronics
0305-702 Microelectronics II, Lab
0305-703 Microelectronics III, Lab
0305-707 Nanoscale CMOS and Beyond
Nanopatterning
0305-721 Microlithography Materials, Lab
0305-722 Microlithography Systems, Lab
1051-733 Optics
Electronics
0301-726 Mixed Signal IC Design
0301-730 Advanced Analog IC Design
0301-814 RF Integrated Circuit Design
Photonics
0308-721 Micro-optics
0308-831 Micro and Nano-Photonics
0308-841 Advanced Micro-Photonics
Microfluidics
0301-798 Microfluidic MEMS
0304-847 Microscale Heat and Mass Transfer

Advising

Doctoral students’ work is overseen by an adviser, the advisory committee, and the program’s director.

Program of study

Based on the requirements of the program, students should prepare a program of study after passing the Comprehensive Exam and no later than the winter quarter of the second year. The program of study should be reviewed periodically by the student and the adviser, and modifications should be made as necessary. Upon completion of the Qualifying and Candidacy exams, the student’s adviser and advisory committee may add additional course work requirements so that the student is sufficiently prepared to carry out and complete their dissertation research.

Comprehensive examination

Every student enrolled in the program must take the Comprehensive Examination, which tests student’s ability to think and learn independently, to critically evaluate current research work in the field of microsystems engineering, and to use good judgment and creativity to determine appropriate directions for future research work. The exam must be completed successfully before a student can submit a thesis proposal and attempt the Qualifying Examination.

Research proposal

A research topic chosen by the student and their research adviser becomes the basis for the dissertation. The research proposal sets forth both the exact nature of the matter to be investigated and a detailed account of the methods to be employed. In addition, the proposal usually contains material supporting the importance of the topic selected and the appropriateness of the research methods to be employed.

Qualifying examination

The Qualifying Examination is an oral examination based on the dissertation research proposal and allows the advising committee to judge the student's ability to execute a research task and to communicate the results. The exam also serves to evaluate the proposed topic to ensure that if completed as posed it constitutes an original contribution to knowledge.

Candidacy exam

The Candidacy Exam is administered by the student’s adviser and the advisory committee between the time the student passes the Qualifying Exam and registers for the Dissertation Defense. This normally occurs approximately six months prior to the dissertation defense.

Dissertation exam

The culmination of a student’s work toward the doctorate degree is the publication of their research. In addition to developing experimental and technical skills during the creation of research, a student needs to acquire the necessary literary skills to communicate results to others. The preparation of the proposal and the dissertation manuscripts will demonstrate these skills. It is also expected that these skills are developed through the publication of technical papers and communications. The dissertation defense and examination is scheduled after all course requirements for the degree have been successfully completed.

Admission requirements

To be considered for admission to the doctorate program in microsystems engineering, candidates must fulfill the following requirements:

  • Hold a baccalaureate degree from an accredited university in the physical sciences or engineering,
  • Submit official transcripts (in English) from all previously completed undergraduate and graduate course work,
  • Have an undergraduate GPA of 3.0 or higher, or a graduate GPA of 3.5 or higher,
  • Submit scores from the Graduate Record Exam (GRE). Minimum scores of 1200 (V&Q) and 3.0 (writing) are required,
  • Submit three letters of reference from individuals well qualified to judge the candidate's ability for graduate study, and
  • Complete a graduate application.
  • International applicants, whose native language is not English, must submit scores from the Test of English as a Foreign Language (TOEFL).