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Microelectronic Engineering Minor

Michael Jackson, Minor Adviser
(585) 475-2828, majemc@rit.edu

The minor in microelectronic engineering provides basic integrated circuit fabrication skills to students from science and other engineering disciplines whose career path may involve the semiconductor industry. With one of the finest clean rooms in the world specializing in undergraduate microelectronic education, this minor provides students with a unique opportunity to experience a highly specialized and dynamic industry. The minor is closed to students majoring in microelectronic engineering.

Course
Prerequisites*
MATH-182 Project-based Calculus II
PHYS-212 University Physics II
CHMG-131 General Chemistry for Engineers (or equivalent)
Required Courses
MCEE-201 IC Technology
MCEE-503 Thin Films
Electives
Choose three of the following:
   EEEE-260    Semiconductor Devices
   MCEE-360    Semiconductor Devices-MicroE
   MCEE-502    VLSI Process Modeling
   MCEE-505    Microlithography Materials and Processing
   MCEE-515    Nanolithography Systems
   MCEE-550    CMOS Processing
   MCEE-720    Photovoltaics
   MCEE-730    Metrology for Failure Analysis and Yield of ICs
   MCEE-732    Evaluation of Microelectronic Manufacturing
   MCEE-770    Microelectromechanical Systems

* Additional prerequisites may be required based on the choice of microelectronic engineering electives.

[arrow] Click to view minor requirements in the Quarter Calendar

Quarter Curriculum - For Reference Only

Effective fall 2013, RIT will convert its academic calendar from quarters to semesters. The following content has been made available as reference only. Currently matriculated students who began their academic programs in quarters should consult their academic adviser for guidance and course selection.

This minor is designed to provide basic knowledge of microelectronics and nanofabrication to non-microelectronic engineering students from math and statistics, science, and other engineering disciplines. It is intended for students interested in career opportunities in microelectronics and nanotechnology that may involve working in the semiconductor industry. This program also prepares students to pursue graduate studies in microelectronics, microsystems engineering, novel semiconductor applications, and nanotechnology.

Prerequisites:
1016-281, 282 Calculus I, II
1017-311 University Physics I
1011-208 College Chemistry

Required Courses:
0305-221 Introduction to Micro/Nanolithography
0305-350 IC Technology
0305-643 Thin Film Processes

Electives—Choose two of the following:†
0305-564, 574 Microlithography Systems, Lab*
0305-632 Silicon Process Integration
0305-650 CMOS Processing
0305-666, 676 Microlithography, Materials and Processes, Lab
0305-704 Semiconductor Process and Device Modeling
0305-707 Nanoscale CMOS and Beyond*
0305-731 Microelectronics Manufacturing I
0305-732 Microelectronics Manufacturing II
0305-830 Metrology for Yield and Failure Analysis
0305-870 Microelectromechanical Systems

* These electives are suitable for students with appropriate prerequisites from their major program.

† See minor adviser for additional elective options.