This is an advanced level course in Integrated Circuit Devices and process technology. A detailed study of processing modules in modern semiconductor fabrication sequences will be done through simulation. Device engineering challenges such as shallow-junction formation fin FETs ultra-thin gate dielectrics and replacement metal gates are covered. Particular emphasis will be placed on non-equilibrium effects. Silvaco Athena and Atlas will be used extensively for process simulation.
- Price $1,035 per credit hour (2017-18 AY)
3 credit hours
This 15 week course requires students to spend approximately 9 hours a week on course work.
- Enrollment Restrictions
- Request Information