Close up of a circuit board
Semiconductor Process Integration
Instructor Robert Pearson
Course Number MCEE-602-04
Jan 16, 2018
Starts
15 weeks
Length
20 Seats
Remaining

This is an advanced level course in Integrated Circuit Devices and process technology. A detailed study of processing modules in modern semiconductor fabrication sequences will be done through simulation. Device engineering challenges such as shallow-junction formation fin FETs ultra-thin gate dielectrics and replacement metal gates are covered. Particular emphasis will be placed on non-equilibrium effects. Silvaco Athena and Atlas will be used extensively for process simulation.

  • Price $1,035 per credit hour (2017-18 AY)
  • Credits

    3 credit hours

    This 15 week course requires students to spend approximately 9 hours a week on course work.

  • Enrollment Restrictions
  • Related Programs
  • Request Information
    We’ll be in touch shortly.