This course focuses on the deposition and etching of thin films of conductive and insulating materials for IC fabrication. A thorough overview of vacuum technology is presented to familiarize the student with the challenges of creating and operating in a controlled environment. Physical and Chemical Vapor Deposition PVD & CVD) are discussed as methods of film deposition. Plasma etching and Chemical Mechanical Planarization CMP) are studied as methods for selective removal of materials. Applications of these fundamental thin film processes to IC manufacturing are presented.
This course is not being offered at this time. Please contact the concierge to find out more information.