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Center For Applied and Computational Mathematics

Microelectromechanical Systems (MEMS)

Faculty David Ross
 Carl Lutzer


The field of Micro-Electro-Mechanical Systems (MEMS) is the branch of microelectronic engineering dedicated to building micro-machines on computer chips. It emerged with the increasing sophistication of microelectronic fabrication techniques over the last half of the 20th century.  By the late 1980s, MEMS was still an academic enterprise. Today, there are many successful products based on MEMS technology. Texas Instruments digital micromirror devices are in digital projectors, HDTV screens, and other display devices. Disposable MEMS blood pressure sensors, manufactured by Lucas NovaSensor and others monitor patients' blood pressure through IV lines--tens of millions are used each year.  MEMS accelerometers, manufactured by Analog Devices, Honeywell, and many others, are used to trigger automobile airbags, and are used in inertial navigation systems.  Perhaps the most common MEMS devices in our everyday lives are inkjet printheads manufactured by many firms, with Epson, HP, and Canon prominent among them.

Research Projects:

Collaborators Svetlana Bukharina (student)
 John Priestly (student)
 Michael Parthum (RIT Mechanical Engineering)
 Michael Potter (RIT and Elecsi Corporation)
 Sheryl Gracewski (University of Rochester)
 Paul Funkenbusch (University of Rochester)
 Eric Jia (University of Rochester)
 John Lebens (Eastman Kodak)
 David Trauernicht (Eastman Kodak)
 Antonio Cabal (Eastman Kodak)