Rochester Institute of Technology

Academic Program Overviews

Student Skills & Capabilities, Salary Data, Career Information 

Microsystems Engineering PhD

Program Overview

Explore the future of nanotechnology as you work to address the technical challenges of micro-and nano-systems through analysis, research, and integration.

Degrees Awarded

  • Doctorate


  • Approximately 40 students are enrolled in this program

Cooperative Education & Experiential Education Component

  • Co-op is optional for this program
  • Minimum co-op requirement: N/A
  • Co-op availability: N/A

Salary Information

Co-op:  ID
Ph.D.:   ID

Student Skills & Capabilities

The microsystems engineering doctorate includes the following areas of exploration: Next-generation nanoelectronics, Photovoltaic research in silicon, compound semiconductor, and organic solar cells, Photonics and nanophotonics imaging, communications, and sensing research including couplers, micro-lasers, micro detectors, integrated silicon waveguides, silicon spectrometers, and biosensors, MEMS (micro-electro-mechanical systems), MEOMS (micro-electro-optical-mechanical systems), and NEMS (nano-electro-mechanical systems) device, processing, and materials research for smart sensors, actuators, biochips, and micro-implantable appliances, Scaled micro- and nanoelectronics for integration into biomedical systems, New and improved technologies in organic electronic components and devices, Nanomaterials research including carbon nanotubes, nanoparticles, quantum dots, self-assembly materials and their applications in electronics, optics, and materials science, and Microfluidics research on the behavior, control, and manipulation of fluids at the micro-scale.

Equipment & Facilities

Students are exposed to the Semiconductor and Microsystems Fabrication Laboratory (SMFL). A 56,000 sq. ft. the lab opened in 1986–class 10 and class 100 cleanrooms; labs; & classrooms. IC lab includes a complete 6” CMOS wafer processing facility, mask-making, test & evaluation rooms, chemical & gas storage, gowning & line maintenance. Capabilities include chemical vapor deposition, plasma etching, ion implantation, diffusion, photolithography, metallization, surface analysis & electrical testing. An expansion of the SMFL has been dedicated to applied research & development work in Microsystems; which includes integrated microelectronics, MEMS, and photonic devices.‚Äč

Job Titles

Process Integration Engineer, Process Engineer, Device Engineer, Development Engineer, Research Engineer, Equipment Engineer, Principle Engineer, Manufacturing Yield Engineer, Photolithography Engineer, Post Doc 

Selected Employer Hiring Partners

Naval Surface Warfare Center, RIT, Northeastern University, Apple, Intel Corporation, Irixi Photonics, Inc, Vertex Pharmaceuticals, Silicon Microstructures Inc., Micron Technology

Contact Us

We appreciate your interest in your career and we will make every effort to help you succeed. Feel free to contact Maria Pagani Wiegand, the career services coordinator who works with the Microelectronic Engineering program. You can access information about services through our web site at
Maria Pagani Wiegand, Career Services Coordinator, This email address is being protected from spambots. You need JavaScript enabled to view it.; 585.475.5458
Rochester Institute of Technology . Office of Career Services and Cooperative Education
Bausch & Lomb Center
57 Lomb Memorial Drive . Rochester NY  14623-5603