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RIT Photonics

Bruce Smith: The 2021 SPIE Frits Zernike Award for Microlithography

Bruce Smith has served as an active leader in microlithography for over 35 years, contributing extensively to the community's understanding of optical lithography and educating an entire generation of engineers who have, in turn, advanced related academic research and industry. Smith has made multiple pioneering contributions across micro and nanolithography, including in the areas of optical materials, masking methods, patterning materials, and process technology.

Publication Date: 
Tuesday, January 12, 2021