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Semiconductor & Microsystems Fabrication Lab

Karl Hirschman
Director, SMFL, Professor

The main portion of the Semiconductor & Microsystems Fabrication Laboratory (SMFL) is 10,000 sq. ft. of class 1000 cleanroom with a bay and chase configuration. Additional laboratory space includes a class 100/10 MEBES E-beam Laboratory (established by Perkin-Elmer), a surface analysis laboratory, a chemical-mechanical planarization laboratory, and an electrical characterization laboratory.

The SMFL mission encompasses education, research and industrial partnership. In addition to providing faculty and students with exceptional resources for education and research, a principal objective is to become the choice organization for applied solutions in microdevice design, process development, microsystem integration, integrated microelectronics, MEMS, photonic devices, and prototype fabrication.

The SMFL offers various levels of facility use for research and development activity. Customers have the option of using the facility for its process resources only, or interacting with SMFL staff and/or RIT faculty and students.

For more information about the capabilities of this facility, see the SMFL website.

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