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SMFL Resources

The Semiconductor and Microsystems Fabrication Laboratory (SMFL): its resources for use in education.

For more detailed information about the lab and its resources for research and industry please visit their website.

The SMFL Facility started out as the RIT Microelectronic Engineering cleanroom facility. It was built in 1985 to support the first ABET accredited undergraduate program in Microelectronic Engineering. Dr. Lynn Fuller, Dean Richard Kenyon, and others along with a grant from Texas Instruments helped to start this new engineering curriculum at RIT and were the driving force behind the construction of the current building. A federal grant provided $5.5M toward the construction of the Center for Microelectronic and Computer Engineering which houses the cleanroom.

The main portion of the facility is 10,000 sq. ft. of class 1000 cleanroom with a bay and chase configuration. Additional laboratory space includes a class 100/10 MEBES E-beam Laboratory (established by Perkin-Elmer), a surface analysis laboratory, a chemical-mechanical planarization laboratory, and an electrical characterization laboratory.

Some statistics

  • 10,000 square feet of Class 1000, 100, & 10 cleanroom space.
  • Complete equipment set for 100 & 150mm CMOS processing.
  • Bay & chase design.

RIT Microelectronics and Microsystems

The cleanroom facility is an integral part of both the RIT Microelectronic Engineering BS and MS degree programs as well as the Microsystems PhD program started in 2003, and has been named the Semiconductor & Microsystems Fabrication Laboratory (SMFL). The SMFL was made a separate entity within RIT’s Kate Gleason College of Engineering. The SMFL offers processing resources and technical expertise in the design and development of microsystems to industrial and academic customers.

The SMFL mission encompasses education, research and industrial partnership. In addition to providing faculty and students with exceptional resources for education and research, a principal objective is to become the choice organization for applied solutions in microdevice design, process development, microsystem integration, and prototype fabrication.

More info see

Safety in the SMFL is essential for all users and enables research as well as education of undergraduate and graduate students.