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Online ME-Curriculum

The Online Master of Engineering degree requires upon successful completion of an approved graduate program consisting of a minimum of 30 credit hours. The program consists of six core courses and four elective courses. The core courses are divided into three areas, the first is Microfabrication MCEE 601, 602 and 603; the second is Microelectronic Manufacturing MCEE 732, and the third is Lithography, which includes lithographic materials and processes (MCEE605) and nanolithography systems MCEE 615 (see the typical course schedule listed below). Students should have a prior course in linear systems before taking MCEE 615.The four elective courses are graduate-level courses in a microelectronics related field. Select elective courses from a list that includes courses such as defect reduction and yield enhancement, semiconductor process and device modeling. See the program director for a more complete list of elective courses.


The Microelectronics sequence (MCEE 601, 602, 603) covers major aspects of integrated circuit manufacturing technology such as oxidation, diffusion, ion implantation, chemical vapor deposition, metallization, plasma etching, etc. These courses emphasize modeling and simulation techniques as well as verification of these processes. Students use special software tools for these processes. Students design and simulate the fabrication of silicon MOS integrated circuits. They learn how to utilize most of the semiconductor processing equipment and how to develop and create a process, manufacture and test their own integrated circuits.


The microlithography courses are advanced courses in the chemistry, physics and processing involved in microlithography. Optical lithography including diffraction, Fourier and image assessment techniques are studied. Scalar diffraction models are utilized to simulate aerial image formation and influences of imaging parameters. Topics include positive and negative resist systems, as well as processes for IC application. Advanced topics will include chemically amplified resists; multiple layer resist systems; phase shift masks, and electron beam, x-ray and deep UV lithography and advanced double patterning and self-assembly techniques. Exercises include projection system design, resist materials characterization, process optimization, electron beam lithography and excimer laser lithography.


The manufacturing course include topics such as scheduling, work-in-progress tracking, costing, inventory control, capital budgeting, productivity measures and personnel management. Concepts of quality and statistical process control are introduced to the students. The laboratory for this course is the student-run factory functioning in the department. Important issues that include measurement of yield, defect density, wafer mapping, control charts and other manufacturing measurement tools are introduced to the students in the lecture and laboratory. Computer integrated manufacturing is also studied in detail. Process modeling, simulation, direct control, computer networking, database systems, linking application programs, facility monitoring, expert systems applications for diagnosis and training and robotics are all introduced and supported by laboratory experiences in the integrated circuit factory at RIT. 

An aggressive 2 year schedule for an Online Master of Engineering in Microelectronic Manufacturing Engineering degree


Fall (year 1)

Spring (year 1)

Summer (year 1)

MCEE-601 Micro Fab, CORE   

MCEE-602 Semi. Process IntegrationCORE

Graduate elective 1

MCEE-605 Lithography Materials & Processes, CORE

MCEE-732 CMOS Manufacturing, CORE



Fall (Year 2)

Spring (year 2)

Summer (year 2)

MCEE-603 Thin Films, CORE


MCEE-615 Nanolithographic Systems, CORE

Graduate elective 4

Graduate elective 2


Graduate Elective 3



Total of 30 credits: (10 courses). Transition courses may be required which do not count towards the degree credits and would increase the time required to obtain a degree.

Most on-line students do not take two courses every semester and take 3-4 years to complete their degrees.

Note: MCEE-603 can be taken in year 1 and MCEE-605 in year 2.