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Lynn Fuller

Lynn Fuller

Phone: 585-475-2035
Office: ENG/2553

Dr. Fuller received his B.S. and M.S. in Electrical Engineering from RIT and his Ph.D. in Electrical Engineering from the State University of New York at Buffalo. He has been a Professor at RIT since 1970.  In1982 he founded the Department of Microelectronic Engineering and held the position of Department Head until 2000.  As department head he put together a faculty of nine, developed a bachelors and masters program and built a new laboratory facility. The program now has over 150 students and 1000 alumni. Dr. Fuller also initiated discussions that led to the creation of the Ph.D. program in Microsystems Engineering, the first Ph.D. program in the Kate Gleason College of Engineering at RIT.

Dr. Fuller has designed, fabricated and tested hundreds of different microchips at RIT.  These chips range from totally mechanical MEMS devices for drug delivery, MEMS pressure sensors, accelerometers, optical-pyometers, CMOS integrated circuits for hearing aids, and sophisticated CID imagers with over 35,000 transistors per chip.  He has developed and taught MEMS fabrication courses and CMOS manufacturing courses for over 35 years. In total he has taught more than 30 different courses at RIT in EE and MicroE at all levels.  Dr. Fuller has been an advisor for over 100 M.S. students in EE and MicroE and for a few Ph.D. students in Imaging Science and Microsystems Engineering.

The laboratory facility (Semiconductor and Microsystems Fabrication Laboratory – SMFL) is a 15,000 sq. ft. clean room laboratory for semiconductor and MEMS manufacturing.   A complete 4 and 6 inch wafer processing line running CMOS, MEMS and Bipolar devices, the lab features outstanding lithography capability (two steppers, MEBES electron beam system, wafer tracks, excimer laser microlithography), Ion implanters, Reactive Ion Etch and LPCVD. 

Dr. Fuller has been involved with several start-up companies, including founder and Vice President for AST, a company that designed and manufactured hearing aids and Integrated NanoTechnologies, LLC, a company that makes systems for the detection of specific DNA molecule fragments.

Dr. Fuller is a Fellow of the IEEE; IEEE Region 1 Award for "Prolific Contributions in Education and Research in Microelectronic Engineering", Eisenhart Outstanding Teacher Award, May 2006, Distinguished Alumnus of the College of Engineering 1990, RIT Sports Hall of Fame, and named "Motorola Professor of Microelectronic Engineering" at RIT.



Puchades, Ivan; Koz, Mustafa; Fuller, Lynn. 2012. "Mechanical Vibrations of Thermally Actuated Silicon Membranes." Micromachines 3, no. 2: 255-269.

"A Thermally Actuated Microelectromechanical (MEMS) Device for Measuring Viscosity", Ivan Puchades and Lynn Fuller, IEEE/ASME Journal of Microelectromechanical Systems. JMEMS-2010-0130.R1, June 2011.

 “A MEMS Universal Fluid Quality Interrogation Sensor”, presented at the University Government Industry Micro/Nano Symposium (UGIM), at Purdue University, June 2010

             “Optical Micromirror Actuation using Thermocapillary Effect in Microdroplets”, Dhull, R.K.; Puchades, I.; Fuller, L.; Lu, Y.W., Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on Microsystems, 25-29 Jan. 2009 Page(s):995 – 998

 “A Chemical Sensor for Chloromethanes using a Nanocomposite of Multiwalled Carbon Nanotubes with Poly(3-methylthiophene), K.S.V. Santhanam, Rajiv Sangoi, L. Fuller, Sensors and Actuators B, Vol 106/2 pp 766-771, April 2005.

 “An Inter-digitated Electrode Detector for the Identification of a Single Specific DNA Molecule Fragment,” L.F.Fuller, Renaldo Vega, Robert Manley, Vee Chee Hwang, Dan Jansen, An Pham, Nate Wescott, Mike Connolly,  Proceedings of the IEEE UGIM Conference, June 2003, Boise State University.       

“Development of a Deep-Submicron CMOS Process for Fabrication of High Performance 0.25 mm Transistors,” Michael Aquilino and Dr. Lynn F. Fuller, IEEE Fellow, Microelectronic Engineering, Rochester Institute of Technology, 16th Biennial University Government Industry Microelectronics Symposium, San Jose State University, CA, June 25-28, 2006

“Individually Driven Capstone Design Projects in the Multidisciplinary Fields of Microelectronic Engineering, MEMS, and Nanotechnology,” Santosh Kurinec, Michael Jackson, Sean Rommel, Karl Hirschman and Lynn Fuller, National Capstone Design  Course Conference 13-15 June 2007, Boulder, CO



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