This is an advanced level course in Integrated Circuit Devices and process technology. A detailed study of processing modules in modern semiconductor fabrication sequences will be done through simulation. Device engineering challenges such as shallow-junction formation, fin FETs, ultra-thin gate dielectrics, and replacement metal gates are covered. Particular emphasis will be placed on non-equilibrium effects. Silvaco Athena and Atlas will be used extensively for process simulation. Graduate paper required.
3 credit hours
This 15 week course requires students to spend approximately 9 hours a week on course work.
- Prerequisites: MCEE-601 or equivalent course.
Enrollment restrictions are subject to change. Please contact us for assistance.
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