| Name | Last modified | Size | Description | |
|---|---|---|---|---|
| Parent Directory | - | |||
| talbot_pic.jpg | 2025-01-15 10:10 | 4.4K | ||
| nawater_pic.jpg | 2025-01-15 10:10 | 12K | ||
| microstepper_pic.jpg | 2025-01-15 10:10 | 10K | ||
| immersion_fluidspic.jpg | 2025-01-15 10:10 | 8.1K | ||
| immersion_fluids_update_10252004.pdf | 2025-01-15 10:10 | 429K | ||
| immersion_fluids_update.pdf | 2025-01-15 10:10 | 1.0M | ||
| group logo_a.png | 2025-01-15 10:10 | 67K | ||
| group logo.png | 2025-01-15 10:10 | 1.4M | ||
| evanexcent_block_small.png | 2025-01-15 10:10 | 57K | ||
| bubble_pic.jpg | 2025-01-15 10:10 | 12K | ||
| bubble_SPIE_presentation.ppt | 2025-01-15 10:10 | 2.1M | ||
| amph_XIS.png | 2025-01-15 10:10 | 101K | ||
| _notes/ | 2025-01-15 10:10 | - | ||
| SPIE_5377_24_presentation_v1.pdf | 2025-01-15 10:10 | 7.5M | ||
| SPIE_5377_24_presentation.pdf | 2025-01-15 10:10 | 7.6M | ||
| SPIE_5377_24.pdf | 2025-01-15 10:10 | 693K | ||
| SPIE_5040_58_immersion.pdf | 2025-01-15 10:10 | 5.4M | ||
| SPIE5754-205.pdf | 2025-01-15 10:10 | 232K | ||
| SPIE2005_5754-71_amphibian.pdf | 2025-01-15 10:10 | 4.1M | ||
| SPIE2005_5754-12-b.pdf | 2025-01-15 10:10 | 3.2M | ||
| O28_smith_v2.pdf | 2025-01-15 10:10 | 646K | ||
| Immersion_Microstepper_XIS193.pdf | 2025-01-15 10:10 | 530K | ||
| ILSimFace.png | 2025-01-15 10:10 | 148K | ||
| 6520-191.png | 2025-01-15 10:10 | 95K | ||
| 6520-191.pdf | 2025-01-15 10:10 | 1.2M | ||
| 6520-10.png | 2025-01-15 10:10 | 78K | ||
| 6520-10.pdf | 2025-01-15 10:10 | 856K | ||
| 5377_44presentation.pdf | 2025-01-15 10:10 | 1.2M | ||
| 5377_44paper.pdf | 2025-01-15 10:10 | 824K | ||
| 5377_162poster.pdf | 2025-01-15 10:10 | 11M | ||
| 5377_162paper.pdf | 2025-01-15 10:10 | 90K | ||
| 25nm_immersion.png | 2025-01-15 10:10 | 90K | ||
| 2006SPIE.png | 2025-01-15 10:10 | 67K | ||
| 2006SPIE.pdf | 2025-01-15 10:10 | 839K | ||