Oblique is a simulator that describes how light propagates at oblique angles in non-transparent media. For Hyper NA lithography, the propagating angle of the wave in the photoresist can no longer be calculated by Snell's law. This simulator offers the ability to calculate these propagation angles and effective indices, NAs, etc. The output data of the simulator can be easily saved as a CSV file by clicking on the plot in the gui.
More Oblique Information
Oblique was developed by Jianming Zhou and is provided free of charge.
MATLAB is required for use.
To install Oblique, first download Oblique.zip
Unzip the file into a directory of your choice.
Load Oblique1.p in MATLAB and input Oblique1 at the command prompt to execute.