RIT Center for Nanolithography Research

Utilities

Optical thin films for UV/VUV

UV/VUV properties of various oxide, nitride, silicide, and intermetallic thin films and multilayer film stacks for application as attenuated phase shift mask (APSM) materials, optical AR's, resist ARCs, binary masks materials have been investigated. Thin films refractive index and extinction coefficient data was obtained by means of spectroscopic ellipsometry combined with spectrophotometry.

Mobile optical thin films for UV/VUV

Similar to the original link, but accessible via mobile phone compatible xhtml. There is also a simplified go redirect: Mobile optical thin films

Composite films for UV/VUV

Atomistic modeling allows for simulation of various composites based on the materials we have characterized. An effective media approximation is used, which assumes structural dimension (grain size, layer thickness, etc.) is less than 0.1 of minimum wavelength considered.

Mobile composite films for UV/VUV

Similar to the original link, but accessible via mobile phone compatible xhtml. There is also a simplified go redirect: Mobile composite thin films

Resist parameter Characterization

Several commercial resists have been optically characterized . Results of these studies include the n&k data, Cauchy coefficients, and the ABC parameters (Dill parameters). The extracted Cauchy coefficients are valid for use at wavelengths of 400 nm to 800 nm.

High Index Fluids for Immersion Lithgraphy

UV properties of various inorganic solutions such as sulfates, phosphates, and halides. Refractive index and extinction coefficient data were obtained by means of deviation angle experiment and spectrophotometry.

ILSim

ILSim is a compact, multi-beam interference lithography simulator. ILSim is based on full vector interference theory, which allows for application at extremely high NA values, such as those projected for use with immersion lithography.

Oblique

Oblique is a lithography simulator that focuses on wave propagation for very high NA lithography.

RET Plotter

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