RIT Center for Nanolithography Research


Welcome to the Nanolithography Research Labs at the Rochester Institute of Technology

Research presented here has been carried out by students in the College of Engineering and College of Science under the direction of Dr. Bruce W. Smith and with support from the Semiconductor Research Corporation (SRC), DARPA/AFRL, International SEMATECH, ASML, Finle KLA/Tencor, Exitech, Intel, IBM and others.

Recent Papers

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From left to right: Peng Xie, Andrew Estroff, Jianming Zhou, Neal Lafferty, Bruce Smith, Bob Frankel, Lena Zavyalova, Anatoly Bourov, Meng Zhao

Nanolithography Research Labs Safety Procedure

RIT µE 25 Years

Page last Updated April 26, 2012

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