Facilities

A white Vacuum Technology 2+3 bay glovebox system with multiple enclosed work chambers and access panels is shown in a laboratory setting. The equipment includes visible glove ports, support framing, storage space beneath the chambers, and red emergency stop buttons on the front panels.

Vacuum Technology 2 +3 Bay Glovebox

Multi-bay inert-atmosphere glovebox for air- and moisture-sensitive materials, enabling controlled preparation and processing of air- and moisture-sensitive electronic materials and devices

A Lake Shore Cryogenic Probe Station is shown beside a control rack with measurement instruments, keyboard, and monitor displaying “MeasureLINK.” The probe station includes a sample chamber, microscope/probe assemblies, and support equipment used for low-temperature electrical testing.

Lake Shore Cryogenic Probe Station

Cryogen-free, high-vacuum probe station for precision electrical characterization of advanced materials and semiconductor devices from below 10 K to 350 K

A Bruker Innova atomic force microscope is shown next to a computer monitor displaying surface scan images, graphs, and instrument control software. The microscope includes a compact white base with an exposed scanning stage and probe assembly, used for nanoscale surface imaging inside a glovebox.

Bruker Atomic Force Microscope (inside glovebox)

Research-grade atomic force microscope for high-resolution nanoscale imaging and characterization of surface structure, morphology, and properties in advanced materials and devices

Keysight semiconductor parameter analyzer shown as a benchtop instrument with a large front display, control buttons, and side ventilation panels. The screen shows device test settings, a circuit diagram, and a graph of electrical measurement curves used to evaluate semiconductor performance.

Keysight Semiconductor Parameter Analyzer

Advanced semiconductor device analyzer with 10 fA current resolution for precision I-V, C-V, and pulsed measurements

Mettler Toledo MS104TS analytical balance with a glass draft shield surrounding the weighing platform and a touchscreen control panel on the front. The compact balance is shown on a plain background and is intended for precise measurements, including use inside a glovebox.

Mettler Toledo Analytical Balance MS104TS (Inside Glovebox)

High-precision analytical balance with 0.1 mg readability for preparing and quantifying materials for advanced materials and device research

A compact spin coater with its lid open, showing the circular sample chamber used to spread thin films by rotation. A touchscreen control panel sits at the front of the unit, and warning symbols are visible on the raised lid.

Spincoater (Inside Glovebox)

High-precision spin coater for uniform thin-film deposition on wafers and substrates up to 150 mm

A 100X metallurgical microscope with binocular eyepieces, multiple objective lenses, and a flat mechanical stage for examining material samples. The microscope is shown on a plain background with focus controls and an attached illumination or imaging module near the upper body.

100X Metallurgical Microscope

100× metallurgical microscope for high-resolution inspection of semiconductor devices, microfabricated structures, thin films, and advanced material surfaces

A Signatone probe station with a microscope, adjustable probe arms, sample stage, and connected tubing is shown on a plain background. The instrument is used to position fine electrical probes on small devices or semiconductor samples for measurement.

Signatone Probe Station

200 mm manual probe station with microscope, vacuum chuck, and four independent X-Y-Z micropositioners for precision wafer-level testing of semiconductor devices.

Nanofabrication Lab

RIT Semiconductor Nanofabrication Lab

The Xu Group is affiliated with the RIT Semiconductor Nanofabrication Lab, which has a complete equipment set for 150mm CMOS processing located in 10,000 sq ft of Class 1000/ISO 6 cleanroom with a bay and chase configuration.  An additional Class 100/10 laboratory, an MOCVD Growth Lab and a variety of test characterization equipment round out the facility's research capabilities.