RIT Center for Nanolithography Research

Aberration Metrology

In situ Aberration Metrology Automated Aberration Extraction using Phase Wheel Targets Practical approach to full-field wavefront aberration measurement using phase wheel targets
On the quality of measured optical aberration coefficients using phase wheel monitor

L. Zavyalova, A. Robinson, A. Bourov, N. Lafferty, B. W. Smith, "On the quality of measured optical aberration coefficients using phase wheel monitor", Proc. SPIE 6520, (2007) paper

L. Zavyalova, B. W. Smith, A. Bourov, G. Zhang, V. Vellanki, P. Reynolds, D. Flagello, "Practical Approach to Full-Field Wavefront Aberration Measurement using Phase Wheel Targets", Proc. SPIE 6154, (2006) paper

L. Zavyalova, A. Bourov, B.W. Smith, "Automated Aberration Extraction using Phase Wheel Targets", Proc. SPIE 5754, (2005) paper

L. Zavyalova, B.W. Smith, T. Suganaga, S. Matsuura, T. Itani, J. Cashmore, "In-situ aberration monitoring using phase wheel targets", Proc. SPIE 5377, (2004) paper

Copyright 2007 Society of Photo-Optical Instrumentation Engineers.
These papers were (will be) published in Proceedings of SPIE, Microlithography and are made available as electronic reprints (preprints) with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.

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