MICROSYSTEMS ENGINEERING

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Zhaolin Lu

Assistant Professor
Microsystems Engineering
Kate Gleason College of Engineering

2010 Submissions

Formal Presentation

Yang, R., W. Zhao, and Z. Lu, “Silicon-Coated Deep Subwavelength Spoof Plasmonic Waveguides for THz Applications.” Frontiers in Optics (FiO) 2010/Laser Science XXIV (LS). Rochester, NY. 24-28 Oct. 2010. Presentation. " 

Eldaiki, O.M., W. Zhao, R. Yang, and Z. Lu. “Experimental Demonstration of Deep Subwavelength Waveguiding Based on Designer Surface Plasmons.” Frontiers in Optics (FiO) 2010: Laser Science XXIV. Rochester, NY. 24-28 Oct. 2010. Presentation. " 

Published Article

Yang, R., R. A. Wahsheh, Z. Lu, and M. A. Abushagur. “Efficient light coupling between dielectric slot waveguide and plasmonic slot waveguide.” Optics Letters, 35.5 (2010): 649-651. Print. "  *

Zhao, W., and Z. Lu. “Negative refraction imaging by three-dimensional metamaterial at microwave frequencies.” Microwave and Optical Technology Letters, 52.10 (2010): 2253-2256. Print. "  *

Zhao, W., O. M. Eldaiki, R. Yang, and Z. Lu. “Deep subwavelength waveguiding and focusing based on designer surface plasmons.” Optics Express, 18.20 (2010): 21498-21503. Web. "  É  *

Lu, Z., Ruoxi. Yang, Rami A. Wahsheh, and M. A. G. Abushagur. “Nanoplasmonic couplers and modulators based on metal-insulator-metal structures.” Proceedings of the SPIE - The International Society for Optical Engineering, 7604 (2010): 1-5. Print. " 

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Stefan Preble

Assistant Professor
Microsystems Engineering
Kate Gleason College of Engineering

2010 Submissions

Formal Presentation

Liang, Cao, Ali W. Elshaari, Abdelsalam A. Aboketaf, and Stefan F. Preble. “Adiabatic couplers in SOI waveguides.” IEEE Conference on Lasers and Electro-Optics (CLEO). San Jose, CA. 16- 21 May 2010. Web. " 

Published Article

Elshaari, Ali. W., Abdelsalam Aboketaf, and Stefan F. Preble. “Controlled Storage of Light in Silicon Cavities.” Optics Express, 18.3 (2010): 3014-3022. Web. " É *

Narayanan, Karthik, and Stefan F. Preble. “Generation of amplitude-shift-keying optical signals using silicon microring resonators.” Optics Express, 18.5 (2010): 5015-5020. Web. " É *

Elshaari, Ali. W., and Stefan F. Preble. “10 Gb/s broadband silicon electro-optic absorption modulator.” Optics Communications, 283.14 (2010): 2829-2834. Print. " *

Karthik, Narayanan, Ali W. Elshaari, and Stefan F. Preble. “Broadband all-optical modulation in hydrogenated-amorphous silicon waveguides.” Optics Express, 18.10 (2010): 9809-9814. Web. " É *

Narayanan, Karthik, and Stefan F. Preble, “Optical nonlinearities in hydrogenated-amorphous silicon waveguides.” Optics Express, 18.9 (2010): 8998-9005. Web. " É *

Aboketaf, Abdelsalam A., Ali W. Elshaari, and Stefan F. Preble. “Optical time division multiplexer on silicon chip.” Optics Express, 18.13 (2010): 13529-13535. Web. " É *

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Bruce SmithDirector of Microsystems Engineering Ph.D. Program

Professor
Microsystems Engineering
Kate Gleason College of Engineering

2010 Submissions

Published Article

Xie, P., and B.W. Smith. “Projection lithography below lambda/7 through deep-ultraviolet evanescent optical imaging.” Journal of Vacuum Science and Technology B, 28.6 (2010): C6Q12-C6Q19. Print. " É *

Telecky, A., P. Xie, J. Stowers, A. Grenville, and B. W. Smith. “Photo-patternable inorganic hardmask.” Journal of Vacuum Science and Technology B, 28.6 (2010): C6S19-C6S22. Print." É *

Baylav, B., M. Zhao, R. Yin, P. Xie, C. Scholz, P. Zimmerman, and B.W. Smith. “Alternatives to Chemical Amplification for 193 nm Lithography.” Proceedings of the SPIE - The International Society for Optical Engineering, 7639 (2010): 1-5. Print. " É *

Chen, L., Y. Goh, K. Lawrie, B.W. Smith, W. Montgomery, P.A. Zimmerman, I. Blakey, and A.K. Whittaker. “Non-chemically amplified resists for 193-nm immersion lithography: influence of absorbance on performance.” Proceedings of the SPIE - The International Society for OpticalEngineering, 7639 (2010): 1-5. Print. É 

Estroff, A., N.V. Lafferty, P. Xie, and B.W. Smith. “Metamaterials for enhancement of DUV lithography.” Proceedings of the SPIE - The International Society for Optical Engineering, 7640 (2010): 1-5. Print. " É 

Xie, P., N.V. Lafferty, and B.W. Smith. “Achieving Interferometric Double Patterning through Wafer Rotation.” Proceedings of the SPIE - The International Society for Optical Engineering, 7640 (2010): 76401Z-1-5. Print. " É 

Trikeriotis, M., Woo Jin Bae, E. Schwartz, M. Krysak, N. Lafferty, Peng Xie, B.W. Smith, P. Zimmerman, C.K. Ober, E.P. Giannelis. “Development of an inorganic photoresist for DUV, EUV, and electron beam imaging.” Proceedings of the SPIE - The International Society for Optical Engineering, 7639 (2010): 76390E-76390E-10. Print. " É 

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