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  • Social Impact
    Impacts on Climate Change
  • Cutting Edge Research
    MOVPE Equipment Changes Everything in Semiconductor Processing
  • Plasmonic Electronics
    Exploring a Plasmonic Alternative
  • Micro-Device Research
    Photonics Light The Way of Microprocessors
  • Stellar Students
    Advancing Lithium Ion Battery Technology
  • Micro-Device Research
    Implantable Micro-Device Research Could Lead To New Therapies To Treat Hearing Loss

Microsystems Engineering builds on the fundamentals of traditional engineering and science and tackles technical challenges of small-scale nano-systems. Microsystems Engineers manipulate electrical, photonic, optical, mechanical, chemical, and biological systems on a nano-scale.

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  • Burak Baylav - PhD Graduate
    I had access to the latest technology, tools and data. It was a dream come true and I was able to use this relationship for my Ph.D. research.”
  • Cory Cress - PhD Graduate
    During my time at RIT, I performed research in the NanoPower Research Labs. It was here that I learned how to create nanomaterials and devices. I learned how to understand them, and test their performance. Now, I use these skills at the US Naval Research Lab in Washington, DC. My work here has a massive impact on how electronics are created.
  • Monica Kempsell Sears - PhD Graduate
    I’ve always wanted to be one of the people who figures out how to push this field further and further—and now I am.
  • Peng Xie - PhD Graduate
    I found my Microsystems experience prepared me well for the challenges of industry. During my Ph.D. program, I had taken a 1-year internship at IMEC as well as a 4 months internship at GlobalFoundries. These experiences helped me to better understand the workspace, expand my professional network and get a pulse of where the industry is heading. With my solid preparation at RIT, I am confident that I am ready to take on any challenges in the future.
  • Anand Gopalan - PhD Graduate
    “While working toward my PhD in Microsystems at RIT, I was exposed to cutting edge technology with the opportunity to be part of industry supported research.”


  • The Semiconductor Photonics and Electronics Group focuses on developing highly efficient III-V and III-Nitride semiconductors for photonic, optoelectronic, and electronic devices. High-efficiency III-V and III-Nitride semiconductor based photonic and optoelectronic devices such as lasers and light-emitting diodes (LEDs) are considered as promising candidates for next generation communication and illumination system.  The research group...

  • Recently the Rochester Institute of Technology has demonstrated the co-integration of CMOS devices and resonant interband tunnel diodes (RITDs).  Our strategy has been to integrate the tunnel diodes following all high temperature steps, but prior to the contact metallization of the CMOS devices.  A recent paper in the Sept. 2003 issue of IEEE Transactions on Electron Devices co-written by our sister group at the Ohio State...

  • Effective manipulation of fluids at the micro/nanometer scale is of great interest in fluid dynamics, biological processes, and material synthesis. Microfluidics together with nanofabrication provides a fine control of fluid transport and interfacial dynamics, and therefore offers a wealth of ways to harness the processes of multiphase flow at the microscale. Our group takes microfluidics and nanofabrication as the main technical...

  • The conversion of light from the sun into electrical energy is playing a very important role in our current challenge for alternative energy technologies, to reduce our dependence on fossil fuels as well as reduce greenhouse gas emissions. The vision of Dr. Hubbard’s research group is to accelerate scientific breakthroughs in the discovery of materials and structures that will advance the frontier of the conversion of light to...

  • Fiber-optical links have enabled tera-bits-per-second transcontinental communication. The mission of Novel Material Photonics (NMP) lab is to develop novel photonic devices that can guide and manipulate optical signals at the nanoscale, bring photonic components into VLSI circuits, and realize on-chip communication and computation at the optical speed. Activities within NMP lab are directed toward the exploration of novel nanomaterials and...