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  • Stellar Students
    Advancing Lithium Ion Battery Technology
  • Plasmonic Electronics
    Exploring a Plasmonic Alternative
  • Cutting Edge Research
    MOVPE Equipment Changes Everything in Semiconductor Processing
  • Micro-Device Research
    Implantable Micro-Device Research Could Lead To New Therapies To Treat Hearing Loss
  • Truly Unique
    Micro-Device Research
  • Truly Unique
    RIT's Semiconductor and Microsystems Fabrication Laboratory
  • Microscale Heat Transfer
    Satish Kandlikar: Reduced in Heat in Electronic Devices
  • Micro-Device Research
    Photonics Light The Way of Microprocessors
  • Nanocomputing
    Brain Power
  • Advancing Tissue Engineering
    Research by RIT Professor Points to Improvements in Tissue Engineering
  • Renewable Energy
    Impacts on Climate Change

Microsystems Engineering builds on the fundamentals of traditional engineering and science and tackles technical challenges of small-scale nano-systems. Microsystems Engineers manipulate electrical, photonic, optical, mechanical, chemical, and biological systems on a nano-scale.

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  • Monica Kempsell Sears - PhD Graduate
    I’ve always wanted to be one of the people who figures out how to push this field further and further—and now I am.
  • Burak Baylav - PhD Graduate
    I had access to the latest technology, tools and data. It was a dream come true and I was able to use this relationship for my Ph.D. research.”
  • Anand Gopalan - PhD Graduate
    “While working toward my PhD in Microsystems at RIT, I was exposed to cutting edge technology with the opportunity to be part of industry supported research.”
  • Cory Cress - PhD Graduate
    During my time at RIT, I performed research in the NanoPower Research Labs. It was here that I learned how to create nanomaterials and devices. I learned how to understand them, and test their performance. Now, I use these skills at the US Naval Research Lab in Washington, DC. My work here has a massive impact on how electronics are created.
  • Peng Xie - PhD Graduate
    I found my Microsystems experience prepared me well for the challenges of industry. During my Ph.D. program, I had taken a 1-year internship at IMEC as well as a 4 months internship at GlobalFoundries. These experiences helped me to better understand the workspace, expand my professional network and get a pulse of where the industry is heading. With my solid preparation at RIT, I am confident that I am ready to take on any challenges in the future.


  • The Nanophotonics Group is developing silicon photonic chips that will revolutionize computing, communication, and sensing systems. Silicon enabled the electronics age with its good electrical properties, high purity, and scalable manufacturability. However, all electronic devices face imposing performance and energy challenges due to the fundamental limits of electrons. In contrast, photons propagate at the speed of light, can carry vast...

  • The group’s research activities focus on enhancing the performance of energy conversion, transmission, and storage devices through the use of nanomaterials.  Current interests include the development of high capacity anode and cathode active materials for lithium ion batteries as well as engineering novel device architectures using carbon nanotubes (CNTs).  A second research area focuses on fabricating and improving the...

  • Innovative and greener chemical processes are needed in order to address societal grand challenges, which mostly involve conservation of resources. One of such societal grand challenges is future fresh water supply, for example. New water desalination technologies are urgent considering that 98% of water available in our planet is sea water or brackish water. Our research group focuses on the development of next generation chemical processes...

  • Recently the Rochester Institute of Technology has demonstrated the co-integration of CMOS devices and resonant interband tunnel diodes (RITDs).  Our strategy has been to integrate the tunnel diodes following all high temperature steps, but prior to the contact metallization of the CMOS devices.  A recent paper in the Sept. 2003 issue of IEEE Transactions on Electron Devices co-written by our sister group at the Ohio State...

  • The research activities in the Thin Film Electronics group are focused on inorganic thin-film electronics on both silicon and non-silicon platforms.  Research on low-temperature polycrystalline silicon (LTPS) is exploring an alternative method of crystallization using a flash-lamp annealing (FLA) process.  The instrument uses Xenon flash-lamps with an extremely high irradiance to expose samples with pulses in the microsecond...