BS, MS, Ph.D., Rochester Institute of Technology
Professor Bruce Smith has been a member of the engineering faculty at RIT since joining the Microelectronic Engineering program in 1988. He is currently also the Director of the Microsystems Engineering Ph.D. program. He received B.S., M.S. and Ph.D. degrees from RIT, concentrating on semiconductor technology including thin films, materials, and lithography. Prior to joining the RIT faculty, he held R&D positions in semiconductor engineering at Digital Equipment Corporation in Hudson, MA and AMI Semiconductor in San Jose, CA. Professor Smith and his group carry out research in areas of micro- and nano-fabrication including nanolithography, semiconductor processing, thin film materials, and optical engineering. Their work is directed toward leading edge electronic, photonic, micromechanical, and display devices and structures. Professor Smith is a Fellow of the IEEE, a Fellow of the OSA, a Fellow of SPIE, and a member of AVS and ASEE.
Professor Smith has received numerous research grants from federal agencies, research consortia, and industrial groups totaling several million dollars. He has published over 200 papers, presented over 50 invited talks, authored several book chapters, and his textbook “Microlithography: Science and Technology” has become widely used worldwide. His publications have been cited over 2500 times and he has a citation h-index of 28. Professor Smith holds over 30 patents in fields of semiconductor lithography and materials, several of which have been licensed for commercialization. He has also been a key contributor in the development and adoption immersion nanolithography, leading research efforts in the dominant technology for current semiconductor device manufacturing.
Professor Smith has developed courses in semiconductor lithography, materials, and processing that have been used as the basis for classes at universities worldwide. Additionally, he has pioneered unique engineering research experiences for both graduate and undergraduate students. Through support from Mentor Graphics Corp. and IMEC he created a Graduate Research Experience for students with researchers at the IMEC consortium in Belgium. Through the US Department of Education, he established a GAANN program for Ph.D. Study in Microsystems Engineering. Among numerous grants from federal agencies, research consortia, and industrial groups, he has had over 15 years of continuous funding from the SRC for graduate research in semiconductor IC nanolithography, enabling student research experiences around the world.
HONORS AND AWARDS
2018 RIPLA Inventor of the Year
2017 AVS Excellence in Leadership Award
2015 Fellow, Institute of Electrical and Electronics Engineers (IEEE)
2014 IEEE Technology Innovation Award
2014 RIT College of Engineering Research and Publication Award
2013 RIT Innovation Hall of Fame
2012 Fellow, Optical Society of America (OSA)
2011 SPIE Research Mentor Award
2008 Visiting Professor, IMEC Micro and Nanoelectronics Research Center
2007 Trustees Excellence in Scholarship and Teaching Award, Rochester Institute of Technology
2007 Fellow, International Society for Optical Engineering (SPIE)
2007 Rush Henrietta Outstanding Alumni Award
In the News
November 21, 2022
Dozens of RIT researchers included on Stanford University’s list of the world’s top 2% of scientists
Numerous Rochester Institute of Technology faculty, professors emeriti, and postdoctoral researchers were recognized as top-cited scientists in their fields, according to a Stanford University study published by Elsevier.