Robert Pearson, Program Director
(585) 475-2923, repemc@rit.edu
http://www.rit.edu/kgcoe/eme/mems
Program overview
The objective of the master of science program in microelectronic engineering is to provide an opportunity for students to perform graduate-level research as they prepare for entry into the semiconductor industry or a doctoral program. The program requires strong preparation in the area of microelectronics and requires a thesis.
Program outcomes
The program has a number of outcomes for its students:
- Understand the fundamental scientific principles governing solid-state devices and their incorporation into modern integrated circuits.
- Understand the relevance of a process or device, either proposed or existing, to current manufacturing practices.
- Develop in-depth knowledge in existing or emerging areas of the field of microelectronics, such as device engineering, circuit design, lithography, materials and processes, and yield and manufacturing.
- Apply microelectronic processing techniques to the creation/investigation of new process/device structures.
- Communicate technical material effectively through oral presentations, written reports, and publications.
The prerequisites include a bachelor of science degree in engineering (such as electrical or microelectronic engineering), including an introductory course in device physics. Students who do not have these prerequisites can take courses during their first term of study and still complete the MS program in two years. The prerequisite courses will not count toward the graduate courses required for the MS degree.
Curriculum
The program consists of eight graduate courses (700-level or higher), including seven core courses and one elective course for students with a BS degree in a discipline other than microelectronic engineering. Five core courses and three elective courses are required for students with a BS in microelectronic engineering from RIT. In addition, all students are required to take a variable-credit (1 or 0 credit) seminar/research course each quarter they are enrolled in the program. Up to 4 credits will be allowed toward the required 36 credit hours. A 9-credit thesis, which includes an oral defense, is required of all students. The total number of credits needed for the MS in microelectronic engineering is 45 quarter credit hours.
Semester conversion
Effective fall 2013, RIT will convert its academic calendar from quarters to semesters. Each program and its associated courses have been sent to the New York State Department of Education for approval of the semester plan. For reference, the following charts illustrate the typical course sequence for this program in both quarters and semesters. Students should consult their academic advisers with questions regarding planning and course selection.
Microelectronic engineering, MS degree†, typical course schedule (quarters)
| Course | Qtr. Cr. Hrs. | |
|---|---|---|
| First Year |
||
| 0305-560 | Transition Semiconductor Devices II | 4‡ |
| 0305-701 | Microelectronics I, Lab | 4 |
| 0305-721 | Microlithography Materials and Processes, Lab | 4 |
| 0305-801 | Seminar/Research§ | 1-4 |
| 0305-702 | Microelectronics II, Lab | 4 |
| 0305-731 | Microelectronics Manufacturing I, Lab | 4 |
| Full Time Equivalency* | 3 | |
| 0305-703 | Microelectronics III, Lab | 4 |
| 0305-xxx | Elective | 4 |
| Full Time Equivalency* | 3 | |
| Research | ||
| Second Year |
||
| 0305-705 | Quantum and Solid State Physics for Nanostructures | 4 |
| 0305-801 | Seminar/Research§ | 1-4 |
| 0305-889 | Thesis | 3 |
| Full-time Equivalency* | ||
| 0301-712 | Physics and Scaling of CMOS | 4 |
| 0305-704 | Semiconductor Process and Device Modeling | 4 |
| 0305-899 | Thesis | 4 |
| 0305-899 | Thesis | 3 |
| Full-time Equivalency* | 9 | |
| Total Quarter Credit Hours | 45 | |
* A full-time equivalency form must be completed for each quarter of the academic year for which the form is requested.
† For those students who do not have an undergraduate degree in microelectronic engineering from RIT. Those students who do have an undergraduate degree in microelectronic engineering from RIT will develop a custom course of study with their graduate adviser, including 0305-704, 705, and 712.
‡ This course's credit hours are not counted toward the 48 required of the program.
§ A maximum of 4 credits are available for Seminar/Research (0305-801).
Microelectronic engineering, MS degree†, typical course sequence (semesters), effective fall 2013
| Course | Sem. Cr. Hrs. | |
|---|---|---|
| First Year | ||
| MCEE-601 | Microelectronic Fabrication | 3 |
| MCEE-605 | Lithographic Materials and Processes | 3 |
| MCEE -603 | Thin Films | 3 |
| MCEE-795 | Microelectronics Research Methods | 1 |
| MCEE-732 | Microelectronic Man. | 3 |
| MCEE-602 | VLS Process Modeling | 3 |
| MCEE-7xx | Graduate Elective* | 3 |
| MCEE-795 | Microelectronics Research Methods | 1 |
| Second Year | ||
| MCEE-704 | Physical Modeling of Semi. Devices | 3 |
| MCEE-7xx | Graduate Elective* | 3 |
| MCEE-790 | MS Thesis | 6 |
| MCEE-795 | Microelectronics Research Methods | 1 |
| Total Semester Credit Hours | 33 | |
* With adviser approval.
† For students who do not have an undergraduate degree in microeletronic engineering from RIT. Students who do have an undergraduate degree in microelectronic engineering from RIT will develop a custom course of study with their graduate adviser.
Thesis
A thesis is required for degree completion. Normally, the thesis is undertaken once the student has completed all course requirements. Planning for the thesis, however, should begin as early as possible. Generally, full-time students should complete their degree requirements, including thesis defense, within two years (six academic quarters and one summer quarter) from the date of entry.
Admission requirements
To be considered for admission to the MS program in microelectronic engineering, candidates must fulfill the following requirements:
- Hold a baccalaureate degree from an accredited university in engineering or a related field,
- Submit official transcripts (in English) from all previously completed undergraduate and graduate course work,
- Have an GPA of 3.0 or higher,
- Submit scores from the Graduate Record Exam (except for RIT graduates),
- Submit two letters of reference from individuals well qualified to judge the candidate's ability for graduate study, and
- Complete a graduate application.
- International applicants, whose native language is not English, must submit scores from the Test of English as a Foreign Language (TOEFL).
Candidates applying with a bachelor's degree in non-electrical or non-microelectronic engineering fields may be considered for admission, however, they may be required to take additional bridge courses to ensure they are adequately prepared for graduate study.