Microelectronic Engineering BS - Curriculum
Microelectronic Engineering BS
Microelectronic Engineering, BS degree, typical course sequence
| Course | Sem. Cr. Hrs. | |
|---|---|---|
| First Year | ||
| CHMG-131 | General Chemistry for Engineers (General Education) This rigorous course is primarily for, but not limited to, engineering students. Topics include an introduction to some basic concepts in chemistry, stoichiometry, First Law of Thermodynamics, thermochemistry, electronic theory of composition and structure, and chemical bonding. The lecture is supported by workshop-style problem sessions. Offered in traditional and online format. Lecture 3 (Fall, Spring). |
3 |
| CMPR-271 | Computational Problem Solving for Engineers (General Education) This course introduces computational problem solving. Basic problem-solving techniques and algorithm development through the process of top-down stepwise refinement and functional decomposition are introduced throughout the course. Classical numerical problems encountered in science and engineering are used to demonstrate the development of algorithms and their implementations. May not be taken for credit by Computer Science, Software Engineering, or Computer Engineering majors. This course is designed for Electrical Engineering and Micro-Electronic Engineering majors and students interested in the Electrical Engineering minor. (Prerequisites: (MATH-181 or MATH-181A or MATH-171) and (MCEE-BS or EEEE-BS or ENGRX-UND or EEEEDU-BS or ENGXDU-UND) or equivalent courses.) Lecture 3 (Fall, Spring). |
3 |
| EEEE-120 | Digital Systems I This course introduces the student to the basic components and methodologies used in digital systems design. It is usually the student's first exposure to engineering design. The laboratory component consists of small design, implement, and debug projects. The complexity of these projects increases steadily throughout the term, starting with circuits of a few gates, until small systems containing several tens of gates and memory elements. Topics include: Boolean algebra, synthesis and analysis of combinational logic circuits, arithmetic circuits, memory elements, synthesis and analysis of sequential logic circuits, finite state machines, and data transfers. (This course is restricted to MCEE-BS, EEEE-BS and ENGRX-UND students.) Lab 2, Lecture 3 (Fall, Spring). |
3 |
| MATH-181 | Project-Based Calculus I (General Education – Mathematical Perspective A) This is the first in a two-course sequence intended for students majoring in mathematics, science, or engineering. It emphasizes the understanding of concepts, and using them to solve physical problems. The course covers functions, limits, continuity, the derivative, rules of differentiation, applications of the derivative, Riemann sums, definite integrals, and indefinite integrals. (Prerequisites: MATH-111 or (NMTH-220 and NMTH-260 or NMTH-272 or NMTH-275) or equivalent courses with a minimum grade of B-, or a score of at least 60% on the RIT Mathematics Placement Exam.
Co-requisites: MATH-181R or equivalent course.) Lecture 6 (Fall, Spring). |
4 |
| MATH-182 | Project-Based Calculus II (General Education – Mathematical Perspective B) This is the second in a two-course sequence. It emphasizes the understanding of concepts, and using them to solve physical problems. The course covers techniques of integration including integration by parts, partial fractions, improper integrals, applications of integration, representing functions by infinite series, convergence and divergence of series, parametric curves, and polar coordinates. (Prerequisites: C- or better in MATH-181 or MATH-181A or equivalent course.
Co-requisites: MATH-182R or equivalent course.) Lecture 6 (Fall, Spring). |
4 |
| MCEE-101 | Introduction to Nanoelectronics An overview of semiconductor technology history and future trends is presented. The course introduces the fabrication and operation of silicon-based integrated circuit devices including resistors, diodes, transistors and their current-voltage (I-V) characteristics. The course also introduces the fundamentals of micro/nanolithography, with topics such as IC masking, sensitometry, radiometry, resolution, photoresist materials and processing. Laboratory teaches the basics of IC fabrication, photolithography and I-V measurements. A five-week project provides experience in digital circuit design, schematic capture, simulation, bread-boarding, layout design, IC processing and testing. (This course is restricted to first year students in MCEE-BS or in the Kate Gleason College of Engineering.) Lab 2, Lecture 1 (Fall). |
1 |
| PHYS-211 | University Physics I (General Education – Scientific Principles Perspective) This is a course in calculus-based physics for science and engineering majors. Topics include kinematics, planar motion, Newton's Laws, gravitation, work and energy, momentum and impulse, conservation laws, systems of particles, rotational motion, static equilibrium, mechanical oscillations and waves, and data presentation/analysis. The course is taught in a workshop format that integrates the material traditionally found in separate lecture and laboratory courses. (Prerequisites: C- or better in MATH-181 or equivalent course. Co-requisites: MATH-182 or equivalent course.) Lec/Lab 6 (Fall, Spring). |
4 |
| UWRT-150 | First Year Writing: FYW: Writing Seminar (WI) (General Education) Writing Seminar is a three-credit course limited to 19 students per section. The course is designed to develop first-year students’ proficiency in analytical and rhetorical reading and writing, and critical thinking. Students will read, understand, and interpret a variety of non-fiction texts representing different cultural perspectives and/or academic disciplines. These texts are designed to challenge students intellectually and to stimulate their writing for a variety of contexts and purposes. Through inquiry-based assignment sequences, students will develop academic research and literacy practices that will be further strengthened throughout their academic careers. Particular attention will be given to the writing process, including an emphasis on teacher-student conferencing, critical self-assessment, class discussion, peer review, formal and informal writing, research, and revision. Small class size promotes frequent student-instructor and student-student interaction. The course also emphasizes the principles of intellectual property and academic integrity for both current academic and future professional writing. Lecture 3 (Fall, Spring, Summer). |
3 |
| YOPS-10 | RIT 365: RIT Connections RIT 365 students participate in experiential learning opportunities designed to launch them into their career at RIT, support them in making multiple and varied connections across the university, and immerse them in processes of competency development. Students will plan for and reflect on their first-year experiences, receive feedback, and develop a personal plan for future action in order to develop foundational self-awareness and recognize broad-based professional competencies. (This class is restricted to incoming 1st year or global campus students.) Lecture 1 (Fall, Spring). |
0 |
General Education – Artistic Perspective |
3 | |
General Education – Ethical Perspective |
3 | |
General Education – Elective |
3 | |
| Second Year | ||
| EEEE-281 | Circuits I Covers basics of DC circuit analysis starting with the definition of voltage, current, resistance, power and energy. Linearity and superposition, together with Kirchhoff's laws, are applied to analysis of circuits having series, parallel and other combinations of circuit elements. Thevenin, Norton and maximum power transfer theorems are proved and applied. Circuits with ideal op-amps are introduced. Inductance and capacitance are introduced and the transient response of RL, RC and RLC circuits to step inputs is established. Practical aspects of the properties of passive devices and batteries are discussed, as are the characteristics of battery-powered circuitry. The laboratory component incorporates use of both computer and manually controlled instrumentation including power supplies, signal generators and oscilloscopes to reinforce concepts discussed in class as well as circuit design and simulation software. (Prerequisite: MATH-173 or MATH-182 or MATH-182A or equivalent course.) Lab 3, Lecture 3 (Fall, Spring, Summer). |
3 |
| EEEE-281R | Circuits I Recitation This course is to be taken concurrently with Circuits I. The focus of the course is to practice problem solving for topics covered in Circuits I. Topics may include use of the calculator for solving multiple equations with multiple unknowns, and use of MATLAB for analyzing problems. Worksheets with problems for the students to solve are posted and the instructor then helps individuals as needed before going over the solution. Students are encouraged to work together in small groups. Students also are encouraged to bring up any questions they have on homework problems and on lab work. (Co-requisites: EEEE-281 or equivalent course.) Recitation 2 (Fall, Spring, Summer). |
0 |
| EEEE-282 | Circuits II This course covers the fundamentals of AC circuit analysis starting with the study of sinusoidal steady-state solutions for circuits in the time domain. The complex plane is introduced along with the concepts of complex exponential functions, phasors, impedances and admittances. Nodal, loop and mesh methods of analysis as well as Thevenin and related theorems are applied to the complex plane. The concept of complex power is developed. The analysis of mutual induction as applied to coupled-coils. Linear, ideal and non-ideal transformers are introduced. Complex frequency analysis is introduced to enable discussion of transfer functions, frequency dependent behavior, Bode plots, resonance phenomenon and simple filter circuits. Two-port network theory is developed and applied to circuits and interconnections. (Prerequisites: C or better in EEEE-281 or equivalent course.) Lecture 3, Recitation 2 (Fall, Spring, Summer). |
3 |
| EGEN-99 | Engineering Co-op Preparation This course will prepare students, who are entering their second year of study, for both the job search and employment in the field of engineering. Students will learn strategies for conducting a successful job search, including the preparation of resumes and cover letters; behavioral interviewing techniques and effective use of social media in the application process. Professional and ethical responsibilities during the job search and for co-op and subsequent professional experiences will be discussed. (This course is restricted to students in Kate Gleason College of Engineering with at least 2nd year standing.) Lecture 1 (Fall, Spring). |
0 |
| MATH-221 | Multivariable and Vector Calculus (General Education) This course is principally a study of the calculus of functions of two or more variables, but also includes a study of vectors, vector-valued functions and their derivatives. The course covers limits, partial derivatives, multiple integrals, Stokes' Theorem, Green's Theorem, the Divergence Theorem, and applications in physics. Credit cannot be granted for both this course and MATH-219. (Prerequisite: C- or better MATH-173 or MATH-182 or MATH-182A or equivalent course.) Lecture 4 (Fall, Spring, Summer). |
4 |
| MATH-231 | Differential Equations (General Education) This course is an introduction to the study of ordinary differential equations and their applications. Topics include solutions to first order equations and linear second order equations, method of undetermined coefficients, variation of parameters, linear independence and the Wronskian, vibrating systems, and Laplace transforms. (Prerequisite: MATH-173 or MATH-182 or MATH-182A or equivalent course.) Lecture 3, Recitation 1 (Fall, Spring, Summer). |
3 |
| MCEE-201 | IC Technology An introduction to the basics of integrated circuit fabrication. The electronic properties of semiconductor materials and basic device structures are discussed, along with fabrication topics including photolithography diffusion and oxidation, ion implantation, and metallization. The laboratory uses a four-level metal gate PMOS process to fabricate an IC chip and provide experience in device design - and layout (CAD), process design, in-process characterization and device testing. Students will understand the basic interaction between process design, device design and device layout. (This course is restricted to EEEE-BS or MCEE-BS students with at least 2nd year standing or with instructor approval.) Lab 3, Lecture 2 (Fall, Spring). |
3 |
| MCEE-205 | Statistics and Design of Experiments (General Education) Statistics and Design of Experiments will study descriptive statistics, measurement techniques, SPC, Process Capability Analysis, experimental design, analysis of variance, regression and response surface methodology, and design robustness. The application of the normal distribution and the central limit theorem will be applied to confidence intervals and statistical inference as well as control charts used in SPC. Students will utilize statistical software to implement experimental design concepts, analyze case studies and design efficient experiments. Lab 3, Lecture 2 (Fall). |
3 |
| PHYS-212 | University Physics II (General Education – Natural Science Inquiry Perspective) This course is a continuation of PHYS-211, University Physics I. Topics include electrostatics, Gauss' law, electric field and potential, capacitance, resistance, DC circuits, magnetic field, Ampere's law, inductance, and geometrical and physical optics. The course is taught in a lecture/workshop format that integrates the material traditionally found in separate lecture and laboratory courses. (Prerequisites: (PHYS-211 or PHYS-211A or PHYS-206 or PHYS-216) or (MECE-102, MECE-103 and MECE-205) and (MATH-182 or MATH-172 or MATH-182A) or equivalent courses. Grades of C- or better are required in all prerequisite courses.) Lec/Lab 6 (Fall, Spring). |
4 |
General Education – Global Perspective |
3 | |
General Education – Social Perspective |
3 | |
General Education – Elective: Restricted STEM Elective |
3 | |
| Third Year | ||
| EEEE-380 | Digital Electronics This is an introductory course in digital MOS circuit analysis and design. The course covers the following topics: (1) MOSFET I-V behavior in aggressively scaled devices; (2) Static and dynamic characteristics of NMOS and CMOS inverters; (3) Combinational and sequential logic networks using CMOS technology; (4) Dynamic CMOS logic networks, including precharge-evaluate, domino and transmission gate circuits; (5) Special topics, including static and dynamic MOS memory, and interconnect RLC behavior. (Prerequisites: EEEE-281 or equivalent course.) Lab 3, Lecture 3 (Fall, Spring, Summer). |
3 |
| MCEE-320 | E&M Fields for Microelectronics |
3 |
| MCEE-260 | Introduction to Semiconductor Devices |
3 |
| MCEE-499 | Microelectronic Engineering Co-op (fall and summer) One semester or summer of paid work experience in microelectronic engineering. (This class is restricted to students in MCEE-BS or BS/MS students in MCEEMSCI-U.) CO OP (Fall, Spring, Summer). |
0 |
| MCEE-502 | Semiconductor Process Integration This is an advanced level course in Integrated Circuit Devices and process technology. A detailed study of processing modules in modern semiconductor fabrication sequences will be done through simulation. Device engineering challenges such as shallow-junction formation, fin FETs, ultra-thin gate dielectrics, and replacement metal gates are covered. Particular emphasis will be placed on non-equilibrium effects. Silvaco Athena and Atlas will be used extensively for process simulation. (Prerequisites: MCEE-201 or equivalent course.
Co-requisite: MCEE-360 or EEEE-260 or equivalent course.) Lab 2, Lecture 3 (Spring). |
3 |
General Education – Immersion |
3 | |
| Fourth Year | ||
| EEEE-353 | Linear Systems Linear Systems provides the foundations of continuous and discrete signal and system analysis and modeling. Topics include a description of continuous linear systems via differential equations, a description of discrete systems via difference equations, input-output relationship of continuous and discrete linear systems, the continuous time convolution integral, the discrete time convolution sum, application of convolution principles to system response calculations, exponential and trigonometric forms of Fourier series and their properties, Fourier transforms including energy spectrum and energy spectral density. Sampling of continuous time signals and the sampling theorem, the Laplace, Z and DTFT. The solution of differential equations and circuit analysis problems using Laplace transforms, transfer functions of physical systems, block diagram algebra and transfer function realization is also covered. A comprehensive study of the z transform and its inverse, which includes system transfer function concepts, system frequency response and its interpretation, and the relationship of the z transform to the Fourier and Laplace transform is also covered. Finally, an introduction to the design of digital filters, which includes filter block diagrams for Finite Impulse Response (FIR) and Infinite Impulse Response (IIR) filters is introduced. (Prerequisites: EEEE-282 and MATH-231 and CMPR-271 or equivalent course.) Lecture 4 (Fall, Spring). |
4 |
| EEEE-480 | Analog Electronics This is an introductory course in analog electronic circuit analysis and design. The course covers the following topics: (1) Diode circuit DC and small-signal behavior, including rectifying as well as Zener-diode-based voltage regulation; (2) MOSFET current-voltage characteristics; (3) DC biasing of MOSFET circuits, including integrated-circuit current sources; (4) Small-signal analysis of single-transistor MOSFET amplifiers and differential amplifiers; (5) Multi-stage MOSFET amplifiers, such as cascade amplifiers, and operational amplifiers; (6) Frequency response of MOSFET-based single- and multi-stage amplifiers; (7) DC and small-signal analysis and design of bipolar junction transistor (BJT) devices and circuits; (8) Feedback and stability in MOSFET and BJT amplifiers. (Prerequisites: EEEE-281 and EEEE-282 and EEEE-499 or equivalent courses.) Lab 3, Lecture 4 (Fall, Spring). |
4 |
| MCEE-499 | Microelectronic Engineering Co-op (spring and summer) One semester or summer of paid work experience in microelectronic engineering. (This class is restricted to students in MCEE-BS or BS/MS students in MCEEMSCI-U.) CO OP (Fall, Spring, Summer). |
0 |
| MCEE-503 | Thin Films (WI-PR) This course focuses on the deposition and etching of thin films of conductive and insulating materials for IC fabrication. A thorough overview of vacuum technology is presented to familiarize the student with the challenges of creating and operating in a controlled environment. Physical and Chemical Vapor Deposition (PVD & CVD) are discussed as methods of film deposition. Plasma etching and Chemical Mechanical Planarization (CMP) are studied as methods for selective removal of materials. Applications of these fundamental thin film processes to IC manufacturing are presented. (Prerequisites: MCEE-201 or equivalent course.) Lab 3, Lecture 2 (Fall). |
3 |
| MCEE-505 | Lithography Materials and Processes Microlithography Materials and Processes covers the chemical aspects of microlithography and resist processes. Fundamentals of polymer technology will be addressed and the chemistry of various resist platforms including novolac, styrene, and acrylate systems will be covered. Double patterning materials will also be studied. Topics include the principles of photoresist materials, including polymer synthesis, photochemistry, processing technologies and methods of process optimization. Also advanced lithographic techniques and materials, including multi-layer techniques for BARC, double patterning, TARC, and next generation materials and processes are applied to optical lithography. (Prerequisites: CHMG-131 and CHMG-141 or equivalent courses.) Lab 3, Lecture 3 (Fall). |
3 |
General Education – Immersion |
3 | |
| Fifth Year | ||
| MCEE-495 | Senior Design I A capstone design experience for microelectronic engineering senior students. Students propose a project related to microelectronic process, device, component or system design, to meet desired specifications within realistic constraints such as economic, environmental, social, political, ethical, health and safety, manufacturability, and sustainability. The students plan a timetable and write a formal proposal. The proposal is evaluated on the basis of intellectual merit, sound technical/research plan, and feasibility. The proposed work is carried through in the sequel course, Senior Design Project II (MCEE-496). Each student is required to make a presentation of the proposal. (Prerequisites: EEEE-480 and 5th year standing in MCEE-BS with completion of two co-ops (MCEE-499).) Lecture 2 (Fall). |
3 |
| MCEE-496 | Senior Design II A capstone design experience for microelectronic engineering senior students. In this course, students conduct a hands-on implementation of the projects proposed in the previous course, Senior Design Project I. Technical presentations of the results, including a talk and a poster, are required at the annual conference on microelectronic engineering organized by the program. A written paper in IEEE format is required and is included in the conference journal. (Prerequisites: MCEE-495 or equivalent course.) Lec/Lab 2 (Spring). |
3 |
| MCEE-550 | CMOS Processing A laboratory course in which students manufacture and test CMOS integrated circuits. Topics include design of individual process operations and their integration into a complete manufacturing sequence. Students are introduced to work in process tracking, ion implantation, oxidation, diffusion, plasma etch, LPCVD, and photolithography. Student learn VLSI design fundamentals of circuit simulation and layout. Analog and Digital CMOS devices are made and tested. This course is organized around multidisciplinary teams that address the management, engineering and operation of the student run CMOS factory. (Prerequisites: (EEEE-260 or MCEE-360) and MCEE-502 and MCEE-505 or equivalent courses.) Lab 4 (Fall). |
4 |
General Education – Immersion |
3 | |
Open Electives |
9 | |
Professional Electives |
9 | |
| Total Semester Credit Hours | 129 |
|
Please see General Education Curriculum (GE) for more information.
(WI-PR) Refers to a writing intensive course within the major.
* Please see Wellness Education Requirement for more information. Students completing bachelor's degrees are required to complete two different Wellness courses.
Combined Accelerated Bachelor’s/Master’s Degrees
The curriculum below outlines the typical course sequence(s) for combined accelerated degrees available with this bachelor's degree.
Microelectronic Engineering, BS degree/Materials Science and Engineering, MS degree, typical course sequence
| Course | Sem. Cr. Hrs. | |
|---|---|---|
| First Year | ||
| CHMG-131 | General Chemistry for Engineers (General Education – Elective) This rigorous course is primarily for, but not limited to, engineering students. Topics include an introduction to some basic concepts in chemistry, stoichiometry, First Law of Thermodynamics, thermochemistry, electronic theory of composition and structure, and chemical bonding. The lecture is supported by workshop-style problem sessions. Offered in traditional and online format. Lecture 3 (Fall, Spring). |
3 |
| CMPR-271 | Computational Problem Solving for Engineers (General Education – Elective) This course introduces computational problem solving. Basic problem-solving techniques and algorithm development through the process of top-down stepwise refinement and functional decomposition are introduced throughout the course. Classical numerical problems encountered in science and engineering are used to demonstrate the development of algorithms and their implementations. May not be taken for credit by Computer Science, Software Engineering, or Computer Engineering majors. This course is designed for Electrical Engineering and Micro-Electronic Engineering majors and students interested in the Electrical Engineering minor. (Prerequisites: (MATH-181 or MATH-181A or MATH-171) and (MCEE-BS or EEEE-BS or ENGRX-UND or EEEEDU-BS or ENGXDU-UND) or equivalent courses.) Lecture 3 (Fall, Spring). |
3 |
| EEEE-120 | Digital Systems I This course introduces the student to the basic components and methodologies used in digital systems design. It is usually the student's first exposure to engineering design. The laboratory component consists of small design, implement, and debug projects. The complexity of these projects increases steadily throughout the term, starting with circuits of a few gates, until small systems containing several tens of gates and memory elements. Topics include: Boolean algebra, synthesis and analysis of combinational logic circuits, arithmetic circuits, memory elements, synthesis and analysis of sequential logic circuits, finite state machines, and data transfers. (This course is restricted to MCEE-BS, EEEE-BS and ENGRX-UND students.) Lab 2, Lecture 3 (Fall, Spring). |
3 |
| MATH-181 | Calculus I (General Education – Mathematical Perspective A) This is the first in a two-course sequence intended for students majoring in mathematics, science, or engineering. It emphasizes the understanding of concepts, and using them to solve physical problems. The course covers functions, limits, continuity, the derivative, rules of differentiation, applications of the derivative, Riemann sums, definite integrals, and indefinite integrals. (Prerequisites: MATH-111 or (NMTH-220 and NMTH-260 or NMTH-272 or NMTH-275) or equivalent courses with a minimum grade of B-, or a score of at least 60% on the RIT Mathematics Placement Exam.
Co-requisites: MATH-181R or equivalent course.) Lecture 6 (Fall, Spring). |
4 |
| MATH-182 | Calculus II (General Education – Mathematical Perspective B) This is the second in a two-course sequence. It emphasizes the understanding of concepts, and using them to solve physical problems. The course covers techniques of integration including integration by parts, partial fractions, improper integrals, applications of integration, representing functions by infinite series, convergence and divergence of series, parametric curves, and polar coordinates. (Prerequisites: C- or better in MATH-181 or MATH-181A or equivalent course.
Co-requisites: MATH-182R or equivalent course.) Lecture 6 (Fall, Spring). |
4 |
| MCEE-101 | Introduction to Nanoelectronics An overview of semiconductor technology history and future trends is presented. The course introduces the fabrication and operation of silicon-based integrated circuit devices including resistors, diodes, transistors and their current-voltage (I-V) characteristics. The course also introduces the fundamentals of micro/nanolithography, with topics such as IC masking, sensitometry, radiometry, resolution, photoresist materials and processing. Laboratory teaches the basics of IC fabrication, photolithography and I-V measurements. A five-week project provides experience in digital circuit design, schematic capture, simulation, bread-boarding, layout design, IC processing and testing. (This course is restricted to first year students in MCEE-BS or in the Kate Gleason College of Engineering.) Lab 2, Lecture 1 (Fall). |
1 |
| PHYS-211 | University Physics I (General Education – Scientific Principles Perspective) This is a course in calculus-based physics for science and engineering majors. Topics include kinematics, planar motion, Newton's Laws, gravitation, work and energy, momentum and impulse, conservation laws, systems of particles, rotational motion, static equilibrium, mechanical oscillations and waves, and data presentation/analysis. The course is taught in a workshop format that integrates the material traditionally found in separate lecture and laboratory courses. (Prerequisites: C- or better in MATH-181 or equivalent course. Co-requisites: MATH-182 or equivalent course.) Lec/Lab 6 (Fall, Spring). |
4 |
| UWRT-150 | General Education - First Year Writing: FYW: Writing Seminar (WI) Writing Seminar is a three-credit course limited to 19 students per section. The course is designed to develop first-year students’ proficiency in analytical and rhetorical reading and writing, and critical thinking. Students will read, understand, and interpret a variety of non-fiction texts representing different cultural perspectives and/or academic disciplines. These texts are designed to challenge students intellectually and to stimulate their writing for a variety of contexts and purposes. Through inquiry-based assignment sequences, students will develop academic research and literacy practices that will be further strengthened throughout their academic careers. Particular attention will be given to the writing process, including an emphasis on teacher-student conferencing, critical self-assessment, class discussion, peer review, formal and informal writing, research, and revision. Small class size promotes frequent student-instructor and student-student interaction. The course also emphasizes the principles of intellectual property and academic integrity for both current academic and future professional writing. Lecture 3 (Fall, Spring, Summer). |
3 |
| YOPS-10 | RIT 365: RIT Connections RIT 365 students participate in experiential learning opportunities designed to launch them into their career at RIT, support them in making multiple and varied connections across the university, and immerse them in processes of competency development. Students will plan for and reflect on their first-year experiences, receive feedback, and develop a personal plan for future action in order to develop foundational self-awareness and recognize broad-based professional competencies. (This class is restricted to incoming 1st year or global campus students.) Lecture 1 (Fall, Spring). |
0 |
General Education – Artistic Perspective |
3 | |
General Education – Ethical Perspective |
3 | |
General Education - Elective |
3 | |
| Second Year | ||
| EEEE-281 | Circuits I Covers basics of DC circuit analysis starting with the definition of voltage, current, resistance, power and energy. Linearity and superposition, together with Kirchhoff's laws, are applied to analysis of circuits having series, parallel and other combinations of circuit elements. Thevenin, Norton and maximum power transfer theorems are proved and applied. Circuits with ideal op-amps are introduced. Inductance and capacitance are introduced and the transient response of RL, RC and RLC circuits to step inputs is established. Practical aspects of the properties of passive devices and batteries are discussed, as are the characteristics of battery-powered circuitry. The laboratory component incorporates use of both computer and manually controlled instrumentation including power supplies, signal generators and oscilloscopes to reinforce concepts discussed in class as well as circuit design and simulation software. (Prerequisite: MATH-173 or MATH-182 or MATH-182A or equivalent course.) Lab 3, Lecture 3 (Fall, Spring, Summer). |
3 |
| EEEE-282 | Circuits II This course covers the fundamentals of AC circuit analysis starting with the study of sinusoidal steady-state solutions for circuits in the time domain. The complex plane is introduced along with the concepts of complex exponential functions, phasors, impedances and admittances. Nodal, loop and mesh methods of analysis as well as Thevenin and related theorems are applied to the complex plane. The concept of complex power is developed. The analysis of mutual induction as applied to coupled-coils. Linear, ideal and non-ideal transformers are introduced. Complex frequency analysis is introduced to enable discussion of transfer functions, frequency dependent behavior, Bode plots, resonance phenomenon and simple filter circuits. Two-port network theory is developed and applied to circuits and interconnections. (Prerequisites: C or better in EEEE-281 or equivalent course.) Lecture 3, Recitation 2 (Fall, Spring, Summer). |
3 |
| EGEN-99 | Engineering Co-op Preparation This course will prepare students, who are entering their second year of study, for both the job search and employment in the field of engineering. Students will learn strategies for conducting a successful job search, including the preparation of resumes and cover letters; behavioral interviewing techniques and effective use of social media in the application process. Professional and ethical responsibilities during the job search and for co-op and subsequent professional experiences will be discussed. (This course is restricted to students in Kate Gleason College of Engineering with at least 2nd year standing.) Lecture 1 (Fall, Spring). |
0 |
| MATH-221 | Multivariable and Vector Calculus (General Education – Elective) This course is principally a study of the calculus of functions of two or more variables, but also includes a study of vectors, vector-valued functions and their derivatives. The course covers limits, partial derivatives, multiple integrals, Stokes' Theorem, Green's Theorem, the Divergence Theorem, and applications in physics. Credit cannot be granted for both this course and MATH-219. (Prerequisite: C- or better MATH-173 or MATH-182 or MATH-182A or equivalent course.) Lecture 4 (Fall, Spring, Summer). |
4 |
| MATH-231 | Differential Equations (General Education – Elective) This course is an introduction to the study of ordinary differential equations and their applications. Topics include solutions to first order equations and linear second order equations, method of undetermined coefficients, variation of parameters, linear independence and the Wronskian, vibrating systems, and Laplace transforms. (Prerequisite: MATH-173 or MATH-182 or MATH-182A or equivalent course.) Lecture 3, Recitation 1 (Fall, Spring, Summer). |
3 |
| MCEE-201 | IC Technology An introduction to the basics of integrated circuit fabrication. The electronic properties of semiconductor materials and basic device structures are discussed, along with fabrication topics including photolithography diffusion and oxidation, ion implantation, and metallization. The laboratory uses a four-level metal gate PMOS process to fabricate an IC chip and provide experience in device design - and layout (CAD), process design, in-process characterization and device testing. Students will understand the basic interaction between process design, device design and device layout. (This course is restricted to EEEE-BS or MCEE-BS students with at least 2nd year standing or with instructor approval.) Lab 3, Lecture 2 (Fall, Spring). |
3 |
| MCEE-205 | Statistics and Design of Experiments (General Education – Elective) Statistics and Design of Experiments will study descriptive statistics, measurement techniques, SPC, Process Capability Analysis, experimental design, analysis of variance, regression and response surface methodology, and design robustness. The application of the normal distribution and the central limit theorem will be applied to confidence intervals and statistical inference as well as control charts used in SPC. Students will utilize statistical software to implement experimental design concepts, analyze case studies and design efficient experiments. Lab 3, Lecture 2 (Fall). |
3 |
| PHYS-212 | University Physics II (General Education – Natural Science Inquiry Perspective) This course is a continuation of PHYS-211, University Physics I. Topics include electrostatics, Gauss' law, electric field and potential, capacitance, resistance, DC circuits, magnetic field, Ampere's law, inductance, and geometrical and physical optics. The course is taught in a lecture/workshop format that integrates the material traditionally found in separate lecture and laboratory courses. (Prerequisites: (PHYS-211 or PHYS-211A or PHYS-206 or PHYS-216) or (MECE-102, MECE-103 and MECE-205) and (MATH-182 or MATH-172 or MATH-182A) or equivalent courses. Grades of C- or better are required in all prerequisite courses.) Lec/Lab 6 (Fall, Spring). |
4 |
Restricted STEM Elective� |
3 | |
General Education – Social Perspective |
3 | |
General Education – Global Perspective |
3 | |
| Third Year | ||
| MCEE-320 | E&M Fields for Microelectronics |
3 |
| MCEE-360 | Semiconductor Devices for Microelectronic Engineers An extensive study of semiconductor physics, principles and device operation tied to realistic device structures and fabrication techniques. Topics include semiconductor fundamentals, pn junction diodes, metal-semiconductor junctions, metal-oxide-semiconductor field-effect transistors (MOSFETs), and bipolar junction transistors (BJT). Throughout the course, finite element simulation of realistic device structures (derived from a technology computer aided design tool) using a Poisson solving software package will be used to reinforce key concepts. (Prerequisites: PHYS-212 or PHYS-208 and 209 or equivalent course.) Lecture 3 (Spring). |
3 |
| EEEE-380 | Digital Electronics This is an introductory course in digital MOS circuit analysis and design. The course covers the following topics: (1) MOSFET I-V behavior in aggressively scaled devices; (2) Static and dynamic characteristics of NMOS and CMOS inverters; (3) Combinational and sequential logic networks using CMOS technology; (4) Dynamic CMOS logic networks, including precharge-evaluate, domino and transmission gate circuits; (5) Special topics, including static and dynamic MOS memory, and interconnect RLC behavior. (Prerequisites: EEEE-281 or equivalent course.) Lab 3, Lecture 3 (Fall, Spring, Summer). |
3 |
| MCEE-499 | Microelectronic Engineering Co-op (fall, summer) One semester or summer of paid work experience in microelectronic engineering. (This class is restricted to students in MCEE-BS or BS/MS students in MCEEMSCI-U.) CO OP (Fall, Spring, Summer). |
0 |
| MCEE-502 | Semiconductor Process Integration This is an advanced level course in Integrated Circuit Devices and process technology. A detailed study of processing modules in modern semiconductor fabrication sequences will be done through simulation. Device engineering challenges such as shallow-junction formation, fin FETs, ultra-thin gate dielectrics, and replacement metal gates are covered. Particular emphasis will be placed on non-equilibrium effects. Silvaco Athena and Atlas will be used extensively for process simulation. (Prerequisites: MCEE-201 or equivalent course.
Co-requisite: MCEE-360 or EEEE-260 or equivalent course.) Lab 2, Lecture 3 (Spring). |
3 |
General Education – Immersion 1 |
3 | |
| Fourth Year | ||
| EEEE-353 | Linear Systems Linear Systems provides the foundations of continuous and discrete signal and system analysis and modeling. Topics include a description of continuous linear systems via differential equations, a description of discrete systems via difference equations, input-output relationship of continuous and discrete linear systems, the continuous time convolution integral, the discrete time convolution sum, application of convolution principles to system response calculations, exponential and trigonometric forms of Fourier series and their properties, Fourier transforms including energy spectrum and energy spectral density. Sampling of continuous time signals and the sampling theorem, the Laplace, Z and DTFT. The solution of differential equations and circuit analysis problems using Laplace transforms, transfer functions of physical systems, block diagram algebra and transfer function realization is also covered. A comprehensive study of the z transform and its inverse, which includes system transfer function concepts, system frequency response and its interpretation, and the relationship of the z transform to the Fourier and Laplace transform is also covered. Finally, an introduction to the design of digital filters, which includes filter block diagrams for Finite Impulse Response (FIR) and Infinite Impulse Response (IIR) filters is introduced. (Prerequisites: EEEE-282 and MATH-231 and CMPR-271 or equivalent course.) Lecture 4 (Fall, Spring). |
4 |
| EEEE-480 | Analog Electronics This is an introductory course in analog electronic circuit analysis and design. The course covers the following topics: (1) Diode circuit DC and small-signal behavior, including rectifying as well as Zener-diode-based voltage regulation; (2) MOSFET current-voltage characteristics; (3) DC biasing of MOSFET circuits, including integrated-circuit current sources; (4) Small-signal analysis of single-transistor MOSFET amplifiers and differential amplifiers; (5) Multi-stage MOSFET amplifiers, such as cascade amplifiers, and operational amplifiers; (6) Frequency response of MOSFET-based single- and multi-stage amplifiers; (7) DC and small-signal analysis and design of bipolar junction transistor (BJT) devices and circuits; (8) Feedback and stability in MOSFET and BJT amplifiers. (Prerequisites: EEEE-281 and EEEE-282 and EEEE-499 or equivalent courses.) Lab 3, Lecture 4 (Fall, Spring). |
4 |
| MCEE-505 | Lithography Materials and Processes Microlithography Materials and Processes covers the chemical aspects of microlithography and resist processes. Fundamentals of polymer technology will be addressed and the chemistry of various resist platforms including novolac, styrene, and acrylate systems will be covered. Double patterning materials will also be studied. Topics include the principles of photoresist materials, including polymer synthesis, photochemistry, processing technologies and methods of process optimization. Also advanced lithographic techniques and materials, including multi-layer techniques for BARC, double patterning, TARC, and next generation materials and processes are applied to optical lithography. (Prerequisites: CHMG-131 and CHMG-141 or equivalent courses.) Lab 3, Lecture 3 (Fall). |
3 |
| MCEE-603 | Thin Films (WI-PR) This course focuses on the deposition and etching of thin films of conductive and insulating materials for IC fabrication. A thorough overview of vacuum technology is presented to familiarize the student with the challenges of creating and operating in a controlled environment. Physical and Chemical Vapor Deposition (PVD & CVD) are discussed as methods of film deposition. Plasma etching and Chemical Mechanical Planarization (CMP) are studied as methods for selective removal of materials. Applications of these fundamental thin film processes to IC manufacturing are presented. Graduate paper required. (Prerequisites: Graduate standing in the MCEE-MS or MCEMANU-ME program or permission of instructor.) Lab 3, Lecture 2 (Fall). |
3 |
| MTSE-601 | Materials Science This course provides an understanding of the relationship between structure and properties necessary for the development of new materials. Topics include atomic and crystal structure, crystalline defects, diffusion, theories, strengthening mechanisms, ferrous alloys, cast irons, structure of ceramics and polymeric materials and corrosion principles. Term paper on materials topic. (This class is restricted to degree-seeking graduate students or those with permission from instructor.) Lecture 3 (Fall). |
3 |
| MTSE-704 | Theoretical Methods in Materials Science and Engineering This course includes the treatment of vector analysis, special functions, waves, and fields; Maxwell Boltzmann, Bose-Einstein and Fermi-Dirac distributions, and their applications. Selected topics of interest in electrodynamics, fluid mechanics, and statistical mechanics will also be discussed. (This class is restricted to degree-seeking graduate students or those with permission from instructor.) Lecture 3 (Fall). |
3 |
| MTSE-705 | Experimental Techniques The course will introduce the students to laboratory equipment for hardness testing, impact testing, tensile testing, X-ray diffraction, SEM, and thermal treatment of metallic materials. Experiments illustrating the characterization of high molecular weight organic polymers will be performed. (This class is restricted to degree-seeking graduate students or those with permission from instructor.) Lab 3 (Spring). |
3 |
| Choose one of the following: | 3 |
|
| MTSE-790 | Research & Thesis Dissertation research by the candidate for an appropriate topic as arranged between the candidate and the research advisor. (Enrollment in this course requires permission from the department offering the course.) Thesis (Fall, Spring, Summer). |
|
| MTSE-777 | Graduate Project This course is a capstone project using research facilities available inside or outside of RIT. (This class is restricted to degree-seeking graduate students or those with permission from instructor.) Project . |
|
General Education – Immersion 2, 3 |
6 | |
MTSE Graduate Elective |
3 | |
| Fifth Year | ||
| MCEE-495 | Senior Design I A capstone design experience for microelectronic engineering senior students. Students propose a project related to microelectronic process, device, component or system design, to meet desired specifications within realistic constraints such as economic, environmental, social, political, ethical, health and safety, manufacturability, and sustainability. The students plan a timetable and write a formal proposal. The proposal is evaluated on the basis of intellectual merit, sound technical/research plan, and feasibility. The proposed work is carried through in the sequel course, Senior Design Project II (MCEE-496). Each student is required to make a presentation of the proposal. (Prerequisites: EEEE-480 and 5th year standing in MCEE-BS with completion of two co-ops (MCEE-499).) Lecture 2 (Fall). |
3 |
| MCEE-496 | Senior Design II A capstone design experience for microelectronic engineering senior students. In this course, students conduct a hands-on implementation of the projects proposed in the previous course, Senior Design Project I. Technical presentations of the results, including a talk and a poster, are required at the annual conference on microelectronic engineering organized by the program. A written paper in IEEE format is required and is included in the conference journal. (Prerequisites: MCEE-495 or equivalent course.) Lec/Lab 2 (Spring). |
3 |
| MCEE-550 | CMOS Processing A laboratory course in which students manufacture and test CMOS integrated circuits. Topics include design of individual process operations and their integration into a complete manufacturing sequence. Students are introduced to work in process tracking, ion implantation, oxidation, diffusion, plasma etch, LPCVD, and photolithography. Student learn VLSI design fundamentals of circuit simulation and layout. Analog and Digital CMOS devices are made and tested. This course is organized around multidisciplinary teams that address the management, engineering and operation of the student run CMOS factory. (Prerequisites: (EEEE-260 or MCEE-360) and MCEE-502 and MCEE-505 or equivalent courses.) Lab 4 (Fall). |
4 |
| Choose one of the following: | 6 |
|
| MTSE-790 | Research & Thesis Dissertation research by the candidate for an appropriate topic as arranged between the candidate and the research advisor. (Enrollment in this course requires permission from the department offering the course.) Thesis (Fall, Spring, Summer). |
|
MTSE Graduate Electives |
||
Professional Electives (Graduate courses) |
9 | |
Open Electives |
9 | |
| Total Semester Credit Hours | 150 |
|
Please see General Education Curriculum (GE) for more information.
(WI) Refers to a writing intensive course within the major.
* Please see Wellness Education Requirement for more information. Students completing bachelor's degrees are required to complete two different Wellness courses.
† Courses for the restricted STEM elective include: PHYS-213 (Modern Physics I), MATH-241 (Linear Algebra), MATH-251 (Probability and Statistics I), CHMG-142 (General & Analytic Chemistry II), CHMG-201 (Introduction to Organic Polymer Technology), BIOG-140 (Cell and Molecular Biology for Engineers I).
Microelectronic Engineering, BS degree/Science, Technology and Public Policy, MS degree, typical course sequence
| Course | Sem. Cr. Hrs. | |
|---|---|---|
| First Year | ||
| CHMG-131 | General Chemistry for Engineers This rigorous course is primarily for, but not limited to, engineering students. Topics include an introduction to some basic concepts in chemistry, stoichiometry, First Law of Thermodynamics, thermochemistry, electronic theory of composition and structure, and chemical bonding. The lecture is supported by workshop-style problem sessions. Offered in traditional and online format. Lecture 3 (Fall, Spring). |
3 |
| CMPR-271 | Computational Problem Solving for Engineers This course introduces computational problem solving. Basic problem-solving techniques and algorithm development through the process of top-down stepwise refinement and functional decomposition are introduced throughout the course. Classical numerical problems encountered in science and engineering are used to demonstrate the development of algorithms and their implementations. May not be taken for credit by Computer Science, Software Engineering, or Computer Engineering majors. This course is designed for Electrical Engineering and Micro-Electronic Engineering majors and students interested in the Electrical Engineering minor. (Prerequisites: (MATH-181 or MATH-181A or MATH-171) and (MCEE-BS or EEEE-BS or ENGRX-UND or EEEEDU-BS or ENGXDU-UND) or equivalent courses.) Lecture 3 (Fall, Spring). |
3 |
| EEEE-120 | Digital Systems I This course introduces the student to the basic components and methodologies used in digital systems design. It is usually the student's first exposure to engineering design. The laboratory component consists of small design, implement, and debug projects. The complexity of these projects increases steadily throughout the term, starting with circuits of a few gates, until small systems containing several tens of gates and memory elements. Topics include: Boolean algebra, synthesis and analysis of combinational logic circuits, arithmetic circuits, memory elements, synthesis and analysis of sequential logic circuits, finite state machines, and data transfers. (This course is restricted to MCEE-BS, EEEE-BS and ENGRX-UND students.) Lab 2, Lecture 3 (Fall, Spring). |
3 |
| MATH-181 | Calculus I (General Education - Mathematical Perspective A) This is the first in a two-course sequence intended for students majoring in mathematics, science, or engineering. It emphasizes the understanding of concepts, and using them to solve physical problems. The course covers functions, limits, continuity, the derivative, rules of differentiation, applications of the derivative, Riemann sums, definite integrals, and indefinite integrals. (Prerequisites: MATH-111 or (NMTH-220 and NMTH-260 or NMTH-272 or NMTH-275) or equivalent courses with a minimum grade of B-, or a score of at least 60% on the RIT Mathematics Placement Exam.
Co-requisites: MATH-181R or equivalent course.) Lecture 6 (Fall, Spring). |
4 |
| MATH-182 | Calculus II (General Education - Mathematical Perspective B) This is the second in a two-course sequence. It emphasizes the understanding of concepts, and using them to solve physical problems. The course covers techniques of integration including integration by parts, partial fractions, improper integrals, applications of integration, representing functions by infinite series, convergence and divergence of series, parametric curves, and polar coordinates. (Prerequisites: C- or better in MATH-181 or MATH-181A or equivalent course.
Co-requisites: MATH-182R or equivalent course.) Lecture 6 (Fall, Spring). |
4 |
| MCEE-101 | Introduction to Nanoelectronics An overview of semiconductor technology history and future trends is presented. The course introduces the fabrication and operation of silicon-based integrated circuit devices including resistors, diodes, transistors and their current-voltage (I-V) characteristics. The course also introduces the fundamentals of micro/nanolithography, with topics such as IC masking, sensitometry, radiometry, resolution, photoresist materials and processing. Laboratory teaches the basics of IC fabrication, photolithography and I-V measurements. A five-week project provides experience in digital circuit design, schematic capture, simulation, bread-boarding, layout design, IC processing and testing. (This course is restricted to first year students in MCEE-BS or in the Kate Gleason College of Engineering.) Lab 2, Lecture 1 (Fall). |
1 |
| PHYS-211 | University Physics I (General Education - Scientific Principles Perspective) This is a course in calculus-based physics for science and engineering majors. Topics include kinematics, planar motion, Newton's Laws, gravitation, work and energy, momentum and impulse, conservation laws, systems of particles, rotational motion, static equilibrium, mechanical oscillations and waves, and data presentation/analysis. The course is taught in a workshop format that integrates the material traditionally found in separate lecture and laboratory courses. (Prerequisites: C- or better in MATH-181 or equivalent course. Co-requisites: MATH-182 or equivalent course.) Lec/Lab 6 (Fall, Spring). |
4 |
| YOPS-010 | RIT 365: RIT Connections RIT 365 students participate in experiential learning opportunities designed to launch them into their career at RIT, support them in making multiple and varied connections across the university, and immerse them in processes of competency development. Students will plan for and reflect on their first-year experiences, receive feedback, and develop a personal plan for future action in order to develop foundational self-awareness and recognize broad-based professional competencies. (This class is restricted to incoming 1st year or global campus students.) Lecture 1 (Fall, Spring). |
0 |
| UWRT-150 | General Education - First Year Writing: FYW: Writing Seminar (WI) Writing Seminar is a three-credit course limited to 19 students per section. The course is designed to develop first-year students’ proficiency in analytical and rhetorical reading and writing, and critical thinking. Students will read, understand, and interpret a variety of non-fiction texts representing different cultural perspectives and/or academic disciplines. These texts are designed to challenge students intellectually and to stimulate their writing for a variety of contexts and purposes. Through inquiry-based assignment sequences, students will develop academic research and literacy practices that will be further strengthened throughout their academic careers. Particular attention will be given to the writing process, including an emphasis on teacher-student conferencing, critical self-assessment, class discussion, peer review, formal and informal writing, research, and revision. Small class size promotes frequent student-instructor and student-student interaction. The course also emphasizes the principles of intellectual property and academic integrity for both current academic and future professional writing. Lecture 3 (Fall, Spring, Summer). |
3 |
General Education - Ethical Perspective |
3 | |
General Education - Artistic Perspective |
3 | |
General Education Elective |
3 | |
| Second Year | ||
| EEEE-281 | Circuits I Covers basics of DC circuit analysis starting with the definition of voltage, current, resistance, power and energy. Linearity and superposition, together with Kirchhoff's laws, are applied to analysis of circuits having series, parallel and other combinations of circuit elements. Thevenin, Norton and maximum power transfer theorems are proved and applied. Circuits with ideal op-amps are introduced. Inductance and capacitance are introduced and the transient response of RL, RC and RLC circuits to step inputs is established. Practical aspects of the properties of passive devices and batteries are discussed, as are the characteristics of battery-powered circuitry. The laboratory component incorporates use of both computer and manually controlled instrumentation including power supplies, signal generators and oscilloscopes to reinforce concepts discussed in class as well as circuit design and simulation software. (Prerequisite: MATH-173 or MATH-182 or MATH-182A or equivalent course.) Lab 3, Lecture 3 (Fall, Spring, Summer). |
3 |
| EEEE-281R | Circuits I Recitation This course is to be taken concurrently with Circuits I. The focus of the course is to practice problem solving for topics covered in Circuits I. Topics may include use of the calculator for solving multiple equations with multiple unknowns, and use of MATLAB for analyzing problems. Worksheets with problems for the students to solve are posted and the instructor then helps individuals as needed before going over the solution. Students are encouraged to work together in small groups. Students also are encouraged to bring up any questions they have on homework problems and on lab work. (Co-requisites: EEEE-281 or equivalent course.) Recitation 2 (Fall, Spring, Summer). |
0 |
| EEEE-282 | Circuits II This course covers the fundamentals of AC circuit analysis starting with the study of sinusoidal steady-state solutions for circuits in the time domain. The complex plane is introduced along with the concepts of complex exponential functions, phasors, impedances and admittances. Nodal, loop and mesh methods of analysis as well as Thevenin and related theorems are applied to the complex plane. The concept of complex power is developed. The analysis of mutual induction as applied to coupled-coils. Linear, ideal and non-ideal transformers are introduced. Complex frequency analysis is introduced to enable discussion of transfer functions, frequency dependent behavior, Bode plots, resonance phenomenon and simple filter circuits. Two-port network theory is developed and applied to circuits and interconnections. (Prerequisites: C or better in EEEE-281 or equivalent course.) Lecture 3, Recitation 2 (Fall, Spring, Summer). |
3 |
| EGEN-099 | Engineering Co-op Preparation This course will prepare students, who are entering their second year of study, for both the job search and employment in the field of engineering. Students will learn strategies for conducting a successful job search, including the preparation of resumes and cover letters; behavioral interviewing techniques and effective use of social media in the application process. Professional and ethical responsibilities during the job search and for co-op and subsequent professional experiences will be discussed. (This course is restricted to students in Kate Gleason College of Engineering with at least 2nd year standing.) Lecture 1 (Fall, Spring). |
0 |
| MATH-221 | Multivariable and Vector Calculus This course is principally a study of the calculus of functions of two or more variables, but also includes a study of vectors, vector-valued functions and their derivatives. The course covers limits, partial derivatives, multiple integrals, Stokes' Theorem, Green's Theorem, the Divergence Theorem, and applications in physics. Credit cannot be granted for both this course and MATH-219. (Prerequisite: C- or better MATH-173 or MATH-182 or MATH-182A or equivalent course.) Lecture 4 (Fall, Spring, Summer). |
4 |
| MATH-231 | Differential Equations This course is an introduction to the study of ordinary differential equations and their applications. Topics include solutions to first order equations and linear second order equations, method of undetermined coefficients, variation of parameters, linear independence and the Wronskian, vibrating systems, and Laplace transforms. (Prerequisite: MATH-173 or MATH-182 or MATH-182A or equivalent course.) Lecture 3, Recitation 1 (Fall, Spring, Summer). |
3 |
| MCEE-201 | IC Technology An introduction to the basics of integrated circuit fabrication. The electronic properties of semiconductor materials and basic device structures are discussed, along with fabrication topics including photolithography diffusion and oxidation, ion implantation, and metallization. The laboratory uses a four-level metal gate PMOS process to fabricate an IC chip and provide experience in device design - and layout (CAD), process design, in-process characterization and device testing. Students will understand the basic interaction between process design, device design and device layout. (This course is restricted to EEEE-BS or MCEE-BS students with at least 2nd year standing or with instructor approval.) Lab 3, Lecture 2 (Fall, Spring). |
3 |
| MCEE-205 | Statistics and Design of Experiments Statistics and Design of Experiments will study descriptive statistics, measurement techniques, SPC, Process Capability Analysis, experimental design, analysis of variance, regression and response surface methodology, and design robustness. The application of the normal distribution and the central limit theorem will be applied to confidence intervals and statistical inference as well as control charts used in SPC. Students will utilize statistical software to implement experimental design concepts, analyze case studies and design efficient experiments. Lab 3, Lecture 2 (Fall). |
3 |
| PHYS-212 | University Physics II (General Education - Natural Science Inquiry Perspective) This course is a continuation of PHYS-211, University Physics I. Topics include electrostatics, Gauss' law, electric field and potential, capacitance, resistance, DC circuits, magnetic field, Ampere's law, inductance, and geometrical and physical optics. The course is taught in a lecture/workshop format that integrates the material traditionally found in separate lecture and laboratory courses. (Prerequisites: (PHYS-211 or PHYS-211A or PHYS-206 or PHYS-216) or (MECE-102, MECE-103 and MECE-205) and (MATH-182 or MATH-172 or MATH-182A) or equivalent courses. Grades of C- or better are required in all prerequisite courses.) Lec/Lab 6 (Fall, Spring). |
4 |
General Education - Global Perspective |
3 | |
General Education - Social Perspective |
3 | |
Restricted STEM Elective |
3 | |
| Third Year | ||
| EEEE-260 | Introduction to Semiconductor Devices An introductory course on the fundamentals of semiconductor physics and principles of operation of basic devices. Topics include semiconductor fundamentals (crystal structure, statistical physics of carrier concentration, motion in crystals, energy band models, drift and diffusion currents) as well as the operation of pn junction diodes, bipolar junction transistors (BJT), metal-oxide-semiconductor (MOS) capacitors and MOS field-effect transistors. (Prerequisites: PHYS-212 or PHYS-208 and 209 or equivalent course.) Lecture 3 (Fall, Spring). |
3 |
| EEEE-380 | Digital Electronics This is an introductory course in digital MOS circuit analysis and design. The course covers the following topics: (1) MOSFET I-V behavior in aggressively scaled devices; (2) Static and dynamic characteristics of NMOS and CMOS inverters; (3) Combinational and sequential logic networks using CMOS technology; (4) Dynamic CMOS logic networks, including precharge-evaluate, domino and transmission gate circuits; (5) Special topics, including static and dynamic MOS memory, and interconnect RLC behavior. (Prerequisites: EEEE-281 or equivalent course.) Lab 3, Lecture 3 (Fall, Spring, Summer). |
3 |
| MCEE-320 | E&M Fields for Microelectronics |
3 |
| MCEE-499 | Microelectronic Engineering Co-op (fall, summer) One semester or summer of paid work experience in microelectronic engineering. (This class is restricted to students in MCEE-BS or BS/MS students in MCEEMSCI-U.) CO OP (Fall, Spring, Summer). |
0 |
| MCEE-502 | Semiconductor Process Integration This is an advanced level course in Integrated Circuit Devices and process technology. A detailed study of processing modules in modern semiconductor fabrication sequences will be done through simulation. Device engineering challenges such as shallow-junction formation, fin FETs, ultra-thin gate dielectrics, and replacement metal gates are covered. Particular emphasis will be placed on non-equilibrium effects. Silvaco Athena and Atlas will be used extensively for process simulation. (Prerequisites: MCEE-201 or equivalent course.
Co-requisite: MCEE-360 or EEEE-260 or equivalent course.) Lab 2, Lecture 3 (Spring). |
3 |
General Education - Immersion 1 |
3 | |
Open Elective |
3 | |
| Fourth Year | ||
| EEEE-353 | Linear Systems Linear Systems provides the foundations of continuous and discrete signal and system analysis and modeling. Topics include a description of continuous linear systems via differential equations, a description of discrete systems via difference equations, input-output relationship of continuous and discrete linear systems, the continuous time convolution integral, the discrete time convolution sum, application of convolution principles to system response calculations, exponential and trigonometric forms of Fourier series and their properties, Fourier transforms including energy spectrum and energy spectral density. Sampling of continuous time signals and the sampling theorem, the Laplace, Z and DTFT. The solution of differential equations and circuit analysis problems using Laplace transforms, transfer functions of physical systems, block diagram algebra and transfer function realization is also covered. A comprehensive study of the z transform and its inverse, which includes system transfer function concepts, system frequency response and its interpretation, and the relationship of the z transform to the Fourier and Laplace transform is also covered. Finally, an introduction to the design of digital filters, which includes filter block diagrams for Finite Impulse Response (FIR) and Infinite Impulse Response (IIR) filters is introduced. (Prerequisites: EEEE-282 and MATH-231 and CMPR-271 or equivalent course.) Lecture 4 (Fall, Spring). |
4 |
| EEEE-480 | Analog Electronics This is an introductory course in analog electronic circuit analysis and design. The course covers the following topics: (1) Diode circuit DC and small-signal behavior, including rectifying as well as Zener-diode-based voltage regulation; (2) MOSFET current-voltage characteristics; (3) DC biasing of MOSFET circuits, including integrated-circuit current sources; (4) Small-signal analysis of single-transistor MOSFET amplifiers and differential amplifiers; (5) Multi-stage MOSFET amplifiers, such as cascade amplifiers, and operational amplifiers; (6) Frequency response of MOSFET-based single- and multi-stage amplifiers; (7) DC and small-signal analysis and design of bipolar junction transistor (BJT) devices and circuits; (8) Feedback and stability in MOSFET and BJT amplifiers. (Prerequisites: EEEE-281 and EEEE-282 and EEEE-499 or equivalent courses.) Lab 3, Lecture 4 (Fall, Spring). |
4 |
| MCEE-499 | Microelectronic Engineering Co-op (summer) One semester or summer of paid work experience in microelectronic engineering. (This class is restricted to students in MCEE-BS or BS/MS students in MCEEMSCI-U.) CO OP (Fall, Spring, Summer). |
0 |
| MCEE-503 | Thin Films This course focuses on the deposition and etching of thin films of conductive and insulating materials for IC fabrication. A thorough overview of vacuum technology is presented to familiarize the student with the challenges of creating and operating in a controlled environment. Physical and Chemical Vapor Deposition (PVD & CVD) are discussed as methods of film deposition. Plasma etching and Chemical Mechanical Planarization (CMP) are studied as methods for selective removal of materials. Applications of these fundamental thin film processes to IC manufacturing are presented. (Prerequisites: MCEE-201 or equivalent course.) Lab 3, Lecture 2 (Fall). |
3 |
| MCEE-505 | Lithography Materials and Processes Microlithography Materials and Processes covers the chemical aspects of microlithography and resist processes. Fundamentals of polymer technology will be addressed and the chemistry of various resist platforms including novolac, styrene, and acrylate systems will be covered. Double patterning materials will also be studied. Topics include the principles of photoresist materials, including polymer synthesis, photochemistry, processing technologies and methods of process optimization. Also advanced lithographic techniques and materials, including multi-layer techniques for BARC, double patterning, TARC, and next generation materials and processes are applied to optical lithography. (Prerequisites: CHMG-131 and CHMG-141 or equivalent courses.) Lab 3, Lecture 3 (Fall). |
3 |
| PUBL-701 | Graduate Policy Analysis This course provides graduate students with necessary tools to help them become effective policy analysts. The course places particular emphasis on understanding the policy process, the different approaches to policy analysis, and the application of quantitative and qualitative methods for evaluating public policies. Students will apply these tools to contemporary public policy decision making at the local, state, federal, and international levels. Lecture 3 (Fall). |
3 |
| PUBL-702 | Graduate Decision Analysis This course provides students with an introduction to decision science and analysis. The course focuses on several important tools for making good decisions, including decision trees, including forecasting, risk analysis, and multi-attribute decision making. Students will apply these tools to contemporary public policy decision making at the local, state, federal, and international levels. Lecture 3 (Spring). |
3 |
Graduate Professional Electives/Policy Electives |
6 | |
General Education - Immersion 2 |
3 | |
Open Elective |
3 | |
| Fifth Year | ||
| EEEE-496 | Senior Design II |
3 |
| MCEE-495 | Senior Design I A capstone design experience for microelectronic engineering senior students. Students propose a project related to microelectronic process, device, component or system design, to meet desired specifications within realistic constraints such as economic, environmental, social, political, ethical, health and safety, manufacturability, and sustainability. The students plan a timetable and write a formal proposal. The proposal is evaluated on the basis of intellectual merit, sound technical/research plan, and feasibility. The proposed work is carried through in the sequel course, Senior Design Project II (MCEE-496). Each student is required to make a presentation of the proposal. (Prerequisites: EEEE-480 and 5th year standing in MCEE-BS with completion of two co-ops (MCEE-499).) Lecture 2 (Fall). |
3 |
| MCEE-550 | CMOS Processing A laboratory course in which students manufacture and test CMOS integrated circuits. Topics include design of individual process operations and their integration into a complete manufacturing sequence. Students are introduced to work in process tracking, ion implantation, oxidation, diffusion, plasma etch, LPCVD, and photolithography. Student learn VLSI design fundamentals of circuit simulation and layout. Analog and Digital CMOS devices are made and tested. This course is organized around multidisciplinary teams that address the management, engineering and operation of the student run CMOS factory. (Prerequisites: (EEEE-260 or MCEE-360) and MCEE-502 and MCEE-505 or equivalent courses.) Lab 4 (Fall). |
4 |
| PUBL-700 | Readings in Public Policy An in-depth inquiry into key contemporary public policy issues. Students will be exposed to a wide range of important public policy texts, and will learn how to write a literature review in a policy area of their choosing. (This class is restricted to degree-seeking graduate students or those with permission from instructor.) Seminar (Fall). |
3 |
| PUBL-703 | Evaluation and Research Design The focus of this course is on evaluation of program outcomes and research design. Students will explore the questions and methodologies associated with meeting programmatic outcomes, secondary or unanticipated effects, and an analysis of alternative means for achieving program outcomes. Critique of evaluation research methodologies will also be considered. Seminar (Spring). |
3 |
| STSO-710 | Graduate Science and Technology Policy Seminar Examines how federal and international policies are developed to influence research and development, innovation, and the transfer of technology in the United States and other selected nations. Students in the course will apply basic policy skills, concepts, and methods to contemporary science and technology policy topics. (This class is restricted to degree-seeking graduate students or those with permission from instructor.) Seminar (Fall). |
3 |
Graduate Public Policy Elective |
3 | |
Professional Elective |
3 | |
General Education - Immersion 3 |
3 | |
| Choose one of the following: | 6 |
|
| PUBL-785 | Capstone Research Experience The Public Policy Capstone Experience serves as a culminating experience for those MS in Science, Technology and Public Policy students who chose this option in the Public Policy Department. Over the course of the semester, students will have the opportunity to investigate and address contemporary topics in science and technology policy using analytic skills and theoretical knowledge learned over the course of their MS degree. Project 1 (Fall, Spring, Summer). |
|
| PUBL-790 | Public Policy Thesis The master's thesis in science, technology, and public policy requires the student to select a thesis topic, advisor and committee; prepare a written thesis proposal for approval by the faculty; present and defend the thesis before a thesis committee; and submit a bound copy of the thesis to the library and to the program chair. (Enrollment in this course requires permission from the department offering the course.) Thesis 3 (Fall, Spring, Summer). |
|
| PUBL-798 | Comprehensive Exam plus 2 Graduate Electives |
|
| Total Semester Credit Hours | 150 |
|
Please see General Education Curriculum for more information.
* Please see Wellness Education Requirement for more information. Students completing bachelor's degrees are required to complete two different Wellness courses.