Microsystems Engineering Ph.D.

Microsystems Engineering, Ph.D. degree, typical course sequence

Course Sem. Cr. Hrs.
First Year
MCEE-601
Microelectronic Fabrication
This course introduces the beginning graduate student to the fabrication of solid-state devices and integrated circuits. The course presents an introduction to basic electronic components and devices, lay outs, unit processes common to all IC technologies such as substrate preparation, oxidation, diffusion and ion implantation. The course will focus on basic silicon processing. The students will be introduced to process modeling using a simulation tool such as SUPREM. The lab consists of conducting a basic metal gate PMOS process in the RIT clean room facility to fabricate and test a PMOS integrated circuit test ship. Laboratory work also provides an introduction to basic IC fabrication processes and safety. (Prerequisites: Graduate standing in the MCEE-MS or MCEMANU-ME program or permission of instructor.) Lab 3, Lecture 3 (Fall).
3
MCSE-702
Introduction to Nanotechnology and Microsystems
This course will introduce first year Microsystems Engineering students to microsystems and nanotechnology. Topics include, micro and nano systems; MEMS, bioMEMS, MOEMS, and NEMS; nanomaterials; nanopatterning; characterization and analytical techniques; self-assembly approaches; nanoelectronics and nanophotonics; nanomagnetics; organic electronics; and microfluidics. The course will be taught by faculty in the individual fields of nanotechnology and microsystems. (This course is restricted to students in the MCSE-PHD program or those with permission of instructor.) Lecture 3 (Fall).
3
MCSE-703
Material Science for Microsystems Engineering
The intent of this course is to provide a comprehensive review of the fundamental concepts of materials science and engineering with applications to nano- and microsystems. Topics include crystallography, diffusion, phase diagrams, fluids, and thermal, elastic, electrical, optical and magnetic properties. This course provides students in the engineering or science fields of nano- and microsystems with the background for future coursework and research in materials engineering and applications. (This course is restricted to students in the MCSE-PHD program or those with permission of instructor.) Lecture 3 (Spring).
3
MCSE-795
Microsystems Ph.D. Seminar
In this seminar course students will present their latest research and learn about the research taking place in the program. All Microsystems Ph.D. students enrolled full time are required to attend each semester they are on campus. (This course is restricted to students in the MCSE-PHD program or those with permission of instructor.) Lecture 1 (Fall, Spring).
2
MTSE-704
Theoretical Methods in Materials Science and Engineering
This course includes the treatment of vector analysis, special functions, waves, and fields; Maxwell Boltzmann, Bose-Einstein and Fermi-Dirac distributions, and their applications. Selected topics of interest in electrodynamics, fluid mechanics, and statistical mechanics will also be discussed. (This class is restricted to degree-seeking graduate students or those with permission from instructor.) Lecture 3 (Fall).
3
 
Major Technical Area Electives
6
Second Year
MCSE-795
Microsystems Ph.D. Seminar
In this seminar course students will present their latest research and learn about the research taking place in the program. All Microsystems Ph.D. students enrolled full time are required to attend each semester they are on campus. (This course is restricted to students in the MCSE-PHD program or those with permission of instructor.) Lecture 1 (Fall, Spring).
2
MCSE-890
MCSE-Dissertation
Research in an appropriate topic as arranged by doctoral candidate and dissertation adviser in fulfillment of the dissertation requirement. (Enrollment in this course requires permission from the department offering the course.) Thesis (Fall, Spring, Summer).
2
 
Major Technical Area Electives
6
 
Minor Technical Area Electives
6
Third Year
MCSE-795
Microsystems Ph.D. Seminar
In this seminar course students will present their latest research and learn about the research taking place in the program. All Microsystems Ph.D. students enrolled full time are required to attend each semester they are on campus. (This course is restricted to students in the MCSE-PHD program or those with permission of instructor.) Lecture 1 (Fall, Spring).
2
MCSE-890
MCSE-Dissertation
Research in an appropriate topic as arranged by doctoral candidate and dissertation adviser in fulfillment of the dissertation requirement. (Enrollment in this course requires permission from the department offering the course.) Thesis (Fall, Spring, Summer).
9
 
Technical Elective
3
Fourth Year
MCSE-890
MCSE-Dissertation
Research in an appropriate topic as arranged by doctoral candidate and dissertation adviser in fulfillment of the dissertation requirement. (Enrollment in this course requires permission from the department offering the course.) Thesis (Fall, Spring, Summer).
16
Total Semester Credit Hours
66